JP2016512398A5 - - Google Patents
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- JP2016512398A5 JP2016512398A5 JP2016502480A JP2016502480A JP2016512398A5 JP 2016512398 A5 JP2016512398 A5 JP 2016512398A5 JP 2016502480 A JP2016502480 A JP 2016502480A JP 2016502480 A JP2016502480 A JP 2016502480A JP 2016512398 A5 JP2016512398 A5 JP 2016512398A5
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- load lock
- carousel
- substrates
- double width
- Prior art date
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Applications Claiming Priority (7)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201361787117P | 2013-03-15 | 2013-03-15 | |
| US61/787,117 | 2013-03-15 | ||
| US201361868795P | 2013-08-22 | 2013-08-22 | |
| US61/868,795 | 2013-08-22 | ||
| US201361879076P | 2013-09-17 | 2013-09-17 | |
| US61/879,076 | 2013-09-17 | ||
| PCT/US2014/027567 WO2014143662A1 (en) | 2013-03-15 | 2014-03-14 | Substrate deposition systems, robot transfer apparatus, and methods for electronic device manufacturing |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2016512398A JP2016512398A (ja) | 2016-04-25 |
| JP2016512398A5 true JP2016512398A5 (https=) | 2017-04-27 |
| JP6703937B2 JP6703937B2 (ja) | 2020-06-03 |
Family
ID=51527659
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016502480A Active JP6703937B2 (ja) | 2013-03-15 | 2014-03-14 | 基板堆積システム、ロボット移送装置、及び電子デバイス製造のための方法 |
Country Status (6)
| Country | Link |
|---|---|
| US (2) | US10427303B2 (https=) |
| JP (1) | JP6703937B2 (https=) |
| KR (2) | KR20210014778A (https=) |
| CN (2) | CN105164799B (https=) |
| TW (1) | TWI614102B (https=) |
| WO (1) | WO2014143662A1 (https=) |
Families Citing this family (68)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102326244B (zh) | 2009-01-11 | 2014-12-17 | 应用材料公司 | 用于在电子器件制造中传输基板的机械手系统、装置及方法 |
| CN104428884B (zh) * | 2012-07-05 | 2017-10-24 | 应用材料公司 | 吊杆驱动装置、多臂机械手装置、电子器件处理系统及用于在电子器件制造系统中传送基板的方法 |
| US9190306B2 (en) * | 2012-11-30 | 2015-11-17 | Lam Research Corporation | Dual arm vacuum robot |
| CN103192384B (zh) * | 2013-03-11 | 2015-08-19 | 上海交通大学 | 一种集成旋转变压器的静态真空轴系装置 |
| TWI624897B (zh) | 2013-03-15 | 2018-05-21 | Applied Materials, Inc. | 多位置批次負載鎖定裝置與系統，以及包括該裝置與系統的方法 |
| WO2014157358A1 (ja) * | 2013-03-28 | 2014-10-02 | 株式会社日立国際電気 | 基板処理装置、半導体装置の製造方法及び記録媒体 |
| CN105580124B (zh) | 2013-09-26 | 2018-05-18 | 应用材料公司 | 用于基板处理的混合平台式设备、系统以及方法 |
| KR102323370B1 (ko) | 2014-01-05 | 2021-11-05 | 어플라이드 머티어리얼스, 인코포레이티드 | 전자 디바이스 제조에서 기판들을 운송하기 위한 로봇 장치, 구동 조립체들, 및 방법들 |
| CN106463438B (zh) * | 2014-01-28 | 2019-09-10 | 布鲁克斯自动化公司 | 基板运输设备 |
| KR20170084240A (ko) | 2014-11-14 | 2017-07-19 | 마퍼 리쏘그라피 아이피 비.브이. | 리소그래피 시스템에서 기판을 이송하기 위한 로드 로크 시스템 및 방법 |
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| CN111095524B (zh) | 2017-09-12 | 2023-10-03 | 应用材料公司 | 用于使用保护阻挡物层制造半导体结构的设备和方法 |
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| US10998209B2 (en) | 2019-05-31 | 2021-05-04 | Applied Materials, Inc. | Substrate processing platforms including multiple processing chambers |
| US11850742B2 (en) | 2019-06-07 | 2023-12-26 | Applied Materials, Inc. | Dual robot including splayed end effectors and systems and methods including same |
| CN110255156A (zh) * | 2019-06-29 | 2019-09-20 | 苏州精濑光电有限公司 | 一种中转装置 |
| KR102240925B1 (ko) * | 2019-07-17 | 2021-04-15 | 세메스 주식회사 | 기판 처리 설비 및 기판 반송 장치 |
| TWI797461B (zh) * | 2019-07-26 | 2023-04-01 | 日商新川股份有限公司 | 封裝裝置 |
| CN112582318B (zh) * | 2019-09-30 | 2025-07-25 | 沈阳芯源微电子设备股份有限公司 | 涂胶显影设备 |
| EP4022239A1 (en) | 2019-10-03 | 2022-07-06 | LPE S.p.A. | Treating arrangement with loading/unloading group and epitaxial reactor |
| US12522949B2 (en) | 2019-10-03 | 2026-01-13 | Lpe S.P.A. | Treating arrangement with storage chamber and epitaxial reactor |
| WO2021064650A1 (en) | 2019-10-03 | 2021-04-08 | Lpe S.P.A. | Treating arrangement with transfer chamber and epitaxial reactor |
| US11901222B2 (en) | 2020-02-17 | 2024-02-13 | Applied Materials, Inc. | Multi-step process for flowable gap-fill film |
| US11557496B2 (en) * | 2020-03-23 | 2023-01-17 | Applied Materials, Inc. | Load lock with integrated features |
| CN113829377B (zh) * | 2020-06-24 | 2023-08-18 | 拓荆科技股份有限公司 | 一种衬底的装载和拾取装置及衬底的装载和拾取方法 |
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| US12195314B2 (en) | 2021-02-02 | 2025-01-14 | Applied Materials, Inc. | Cathode exchange mechanism to improve preventative maintenance time for cluster system |
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| WO2023129142A1 (en) * | 2021-12-28 | 2023-07-06 | Applied Materials, Inc. | Electronic device manufacturing systems having paired deposition chambers for enhanced deposition uniformity |
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-
2014
- 2014-03-14 US US14/211,049 patent/US10427303B2/en active Active
- 2014-03-14 KR KR1020217003363A patent/KR20210014778A/ko not_active Ceased
- 2014-03-14 KR KR1020157028049A patent/KR102214394B1/ko active Active
- 2014-03-14 JP JP2016502480A patent/JP6703937B2/ja active Active
- 2014-03-14 CN CN201480025132.8A patent/CN105164799B/zh active Active
- 2014-03-14 TW TW103109720A patent/TWI614102B/zh active
- 2014-03-14 CN CN202010154972.1A patent/CN111489987A/zh not_active Withdrawn
- 2014-03-14 WO PCT/US2014/027567 patent/WO2014143662A1/en not_active Ceased
-
2019
- 2019-08-21 US US16/547,437 patent/US20190375105A1/en not_active Abandoned
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