JP2016512398A5 - - Google Patents
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- JP2016512398A5 JP2016512398A5 JP2016502480A JP2016502480A JP2016512398A5 JP 2016512398 A5 JP2016512398 A5 JP 2016512398A5 JP 2016502480 A JP2016502480 A JP 2016502480A JP 2016502480 A JP2016502480 A JP 2016502480A JP 2016512398 A5 JP2016512398 A5 JP 2016512398A5
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- load lock
- carousel
- substrates
- double width
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Applications Claiming Priority (7)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201361787117P | 2013-03-15 | 2013-03-15 | |
| US61/787,117 | 2013-03-15 | ||
| US201361868795P | 2013-08-22 | 2013-08-22 | |
| US61/868,795 | 2013-08-22 | ||
| US201361879076P | 2013-09-17 | 2013-09-17 | |
| US61/879,076 | 2013-09-17 | ||
| PCT/US2014/027567 WO2014143662A1 (en) | 2013-03-15 | 2014-03-14 | Substrate deposition systems, robot transfer apparatus, and methods for electronic device manufacturing |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2016512398A JP2016512398A (ja) | 2016-04-25 |
| JP2016512398A5 true JP2016512398A5 (https=) | 2017-04-27 |
| JP6703937B2 JP6703937B2 (ja) | 2020-06-03 |
Family
ID=51527659
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016502480A Active JP6703937B2 (ja) | 2013-03-15 | 2014-03-14 | 基板堆積システム、ロボット移送装置、及び電子デバイス製造のための方法 |
Country Status (6)
| Country | Link |
|---|---|
| US (2) | US10427303B2 (https=) |
| JP (1) | JP6703937B2 (https=) |
| KR (2) | KR102214394B1 (https=) |
| CN (2) | CN111489987A (https=) |
| TW (1) | TWI614102B (https=) |
| WO (1) | WO2014143662A1 (https=) |
Families Citing this family (68)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101778519B1 (ko) | 2009-01-11 | 2017-09-15 | 어플라이드 머티어리얼스, 인코포레이티드 | 전자 디바이스 제조시에 기판을 이송하기 위한 로봇 시스템, 장치 및 방법 |
| WO2014008009A1 (en) * | 2012-07-05 | 2014-01-09 | Applied Materials, Inc | Boom drive apparatus, multi-arm robot apparatus, electronic device processing systems, and methods for transporting substrates in electronic device manufacturing systems |
| US9190306B2 (en) * | 2012-11-30 | 2015-11-17 | Lam Research Corporation | Dual arm vacuum robot |
| CN103192384B (zh) * | 2013-03-11 | 2015-08-19 | 上海交通大学 | 一种集成旋转变压器的静态真空轴系装置 |
| US9378994B2 (en) | 2013-03-15 | 2016-06-28 | Applied Materials, Inc. | Multi-position batch load lock apparatus and systems and methods including same |
| KR101686032B1 (ko) * | 2013-03-28 | 2016-12-13 | 가부시키가이샤 히다치 고쿠사이 덴키 | 기판 처리 장치, 반도체 장치의 제조 방법 및 기록 매체 |
| JP2016537805A (ja) | 2013-09-26 | 2016-12-01 | アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ | 基板処理のための混合プラットフォームの装置、システム、及び方法 |
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| JP6947914B2 (ja) | 2017-08-18 | 2021-10-13 | アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ | 高圧高温下のアニールチャンバ |
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| JP7183635B2 (ja) * | 2018-08-31 | 2022-12-06 | 東京エレクトロン株式会社 | 基板搬送機構、基板処理装置及び基板搬送方法 |
| CN112840447B (zh) * | 2018-10-04 | 2025-11-21 | 应用材料公司 | 运输系统 |
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| US10998209B2 (en) | 2019-05-31 | 2021-05-04 | Applied Materials, Inc. | Substrate processing platforms including multiple processing chambers |
| US11850742B2 (en) | 2019-06-07 | 2023-12-26 | Applied Materials, Inc. | Dual robot including splayed end effectors and systems and methods including same |
| CN110255156A (zh) * | 2019-06-29 | 2019-09-20 | 苏州精濑光电有限公司 | 一种中转装置 |
| KR102240925B1 (ko) * | 2019-07-17 | 2021-04-15 | 세메스 주식회사 | 기판 처리 설비 및 기판 반송 장치 |
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| JP7670696B2 (ja) | 2019-10-03 | 2025-04-30 | エルピーイー ソシエタ ペル アチオニ | ローディング又はアンローディング群およびエピタキシャル反応器を有する処理装置 |
| US12522949B2 (en) | 2019-10-03 | 2026-01-13 | Lpe S.P.A. | Treating arrangement with storage chamber and epitaxial reactor |
| EP4022238A1 (en) | 2019-10-03 | 2022-07-06 | LPE S.p.A. | Treating arrangement with transfer chamber and epitaxial reactor |
| US11901222B2 (en) | 2020-02-17 | 2024-02-13 | Applied Materials, Inc. | Multi-step process for flowable gap-fill film |
| US11557496B2 (en) * | 2020-03-23 | 2023-01-17 | Applied Materials, Inc. | Load lock with integrated features |
| CN113829377B (zh) * | 2020-06-24 | 2023-08-18 | 拓荆科技股份有限公司 | 一种衬底的装载和拾取装置及衬底的装载和拾取方法 |
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| US11817331B2 (en) | 2020-07-27 | 2023-11-14 | Applied Materials, Inc. | Substrate holder replacement with protective disk during pasting process |
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| KR102431679B1 (ko) * | 2022-02-15 | 2022-08-12 | (주) 티로보틱스 | 진공 챔버에서 기판을 이송하기 위한 기판 이송 로봇 |
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| US9190306B2 (en) * | 2012-11-30 | 2015-11-17 | Lam Research Corporation | Dual arm vacuum robot |
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-
2014
- 2014-03-14 CN CN202010154972.1A patent/CN111489987A/zh not_active Withdrawn
- 2014-03-14 KR KR1020157028049A patent/KR102214394B1/ko active Active
- 2014-03-14 TW TW103109720A patent/TWI614102B/zh active
- 2014-03-14 CN CN201480025132.8A patent/CN105164799B/zh active Active
- 2014-03-14 JP JP2016502480A patent/JP6703937B2/ja active Active
- 2014-03-14 WO PCT/US2014/027567 patent/WO2014143662A1/en not_active Ceased
- 2014-03-14 US US14/211,049 patent/US10427303B2/en active Active
- 2014-03-14 KR KR1020217003363A patent/KR20210014778A/ko not_active Ceased
-
2019
- 2019-08-21 US US16/547,437 patent/US20190375105A1/en not_active Abandoned
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