JP2014528015A5 - - Google Patents
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- JP2014528015A5 JP2014528015A5 JP2014531329A JP2014531329A JP2014528015A5 JP 2014528015 A5 JP2014528015 A5 JP 2014528015A5 JP 2014531329 A JP2014531329 A JP 2014531329A JP 2014531329 A JP2014531329 A JP 2014531329A JP 2014528015 A5 JP2014528015 A5 JP 2014528015A5
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- polymer
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- neutral
- resist
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- 229920000642 polymer Polymers 0.000 description 12
- 230000007935 neutral effect Effects 0.000 description 8
- OZAIFHULBGXAKX-UHFFFAOYSA-N 2-(2-cyanopropan-2-yldiazenyl)-2-methylpropanenitrile Chemical compound N#CC(C)(C)N=NC(C)(C)C#N OZAIFHULBGXAKX-UHFFFAOYSA-N 0.000 description 6
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 6
- 229920001400 block copolymer Polymers 0.000 description 5
- 238000006116 polymerization reaction Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 2
- DTGDMPJDZKDHEP-UHFFFAOYSA-N 4-ethenylbicyclo[4.2.0]octa-1(6),2,4-triene Chemical compound C=CC1=CC=C2CCC2=C1 DTGDMPJDZKDHEP-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- VVQNEPGJFQJSBK-UHFFFAOYSA-N Methyl methacrylate Chemical compound COC(=O)C(C)=C VVQNEPGJFQJSBK-UHFFFAOYSA-N 0.000 description 2
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 2
- 239000003999 initiator Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000003960 organic solvent Substances 0.000 description 2
- 150000003254 radicals Chemical class 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 238000003756 stirring Methods 0.000 description 2
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 2
- 239000004342 Benzoyl peroxide Substances 0.000 description 1
- OMPJBNCRMGITSC-UHFFFAOYSA-N Benzoylperoxide Chemical compound C=1C=CC=CC=1C(=O)OOC(=O)C1=CC=CC=C1 OMPJBNCRMGITSC-UHFFFAOYSA-N 0.000 description 1
- ODLMAHJVESYWTB-UHFFFAOYSA-N CCCc1ccccc1 Chemical compound CCCc1ccccc1 ODLMAHJVESYWTB-UHFFFAOYSA-N 0.000 description 1
- MGLHIFKMPOBWCV-UHFFFAOYSA-N CCc1ccc(C=C2)c2c1 Chemical compound CCc1ccc(C=C2)c2c1 MGLHIFKMPOBWCV-UHFFFAOYSA-N 0.000 description 1
- AVXURJPOCDRRFD-UHFFFAOYSA-N Hydroxylamine Chemical class ON AVXURJPOCDRRFD-UHFFFAOYSA-N 0.000 description 1
- 150000001336 alkenes Chemical class 0.000 description 1
- 150000001450 anions Chemical class 0.000 description 1
- 235000019400 benzoyl peroxide Nutrition 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 150000001768 cations Chemical class 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 239000000178 monomer Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000000379 polymerizing effect Effects 0.000 description 1
- 230000001376 precipitating effect Effects 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
- 238000010526 radical polymerization reaction Methods 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US13/243,640 US8691925B2 (en) | 2011-09-23 | 2011-09-23 | Compositions of neutral layer for directed self assembly block copolymers and processes thereof |
| US13/243,640 | 2011-09-23 | ||
| PCT/IB2012/001905 WO2013041958A1 (en) | 2011-09-23 | 2012-09-21 | Compositions of neutral layer for directed self assembly block copolymers and processes thereof |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2014528015A JP2014528015A (ja) | 2014-10-23 |
| JP2014528015A5 true JP2014528015A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 2016-01-21 |
| JP6077547B2 JP6077547B2 (ja) | 2017-02-08 |
Family
ID=47911640
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014531329A Active JP6077547B2 (ja) | 2011-09-23 | 2012-09-21 | 誘導自己組織化ブロックコポリマーのための中性層の組成物及びそれの方法 |
Country Status (9)
Families Citing this family (114)
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- 2012-09-21 CN CN201280044486.8A patent/CN103797066B/zh active Active
- 2012-09-21 KR KR1020147009536A patent/KR101829955B1/ko active Active
- 2012-09-21 WO PCT/IB2012/001905 patent/WO2013041958A1/en active Application Filing
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