FR3102295B1 - Procédé de lithographie par auto-assemblage dirigé - Google Patents

Procédé de lithographie par auto-assemblage dirigé Download PDF

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Publication number
FR3102295B1
FR3102295B1 FR1911521A FR1911521A FR3102295B1 FR 3102295 B1 FR3102295 B1 FR 3102295B1 FR 1911521 A FR1911521 A FR 1911521A FR 1911521 A FR1911521 A FR 1911521A FR 3102295 B1 FR3102295 B1 FR 3102295B1
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FR
France
Prior art keywords
block copolymer
layer
film
neutral
nano
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR1911521A
Other languages
English (en)
Other versions
FR3102295A1 (fr
Inventor
Xavier Chevalier
Matthieu Serege
Correia Cindy Gomes
Marc Zelsmann
Guillaume Fleury
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National de la Recherche Scientifique CNRS
Arkema France SA
Universite de Bordeaux
Institut Polytechnique de Bordeaux
Universite Grenoble Alpes
Original Assignee
Centre National de la Recherche Scientifique CNRS
Arkema France SA
Universite de Bordeaux
Institut Polytechnique de Bordeaux
Universite Grenoble Alpes
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to FR1911521A priority Critical patent/FR3102295B1/fr
Application filed by Centre National de la Recherche Scientifique CNRS, Arkema France SA, Universite de Bordeaux, Institut Polytechnique de Bordeaux, Universite Grenoble Alpes filed Critical Centre National de la Recherche Scientifique CNRS
Priority to EP20799784.2A priority patent/EP4042471A1/fr
Priority to CN202080072309.5A priority patent/CN114600044A/zh
Priority to PCT/FR2020/051847 priority patent/WO2021074540A1/fr
Priority to JP2022522016A priority patent/JP2022552518A/ja
Priority to US17/768,522 priority patent/US20240111217A1/en
Priority to KR1020227011868A priority patent/KR20220083694A/ko
Priority to TW109135934A priority patent/TWI834925B/zh
Publication of FR3102295A1 publication Critical patent/FR3102295A1/fr
Application granted granted Critical
Publication of FR3102295B1 publication Critical patent/FR3102295B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70383—Direct write, i.e. pattern is written directly without the use of a mask by one or multiple beams
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Materials For Photolithography (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Drying Of Semiconductors (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)

Abstract

L’invention porte sur un procédé de lithographie par auto-assemblage dirigé, ledit procédé comprenant une étape de dépôt d’un film de copolymère à blocs sur une couche neutre (20) vis-à-vis du copolymère à blocs, ledit film de copolymère à blocs étant destiné à être utilisé en tant que masque de lithographie, ledit procédé étant caractérisé en ce qu’il comprend les étapes suivantes : - déposer ladite couche neutre (20) sur une surface d’un substrat (10), ladite couche neutre (20) étant une couche de type carbonée ou fluoro-carbonée et déposée sur une épaisseur supérieure à 1,5 fois l’épaisseur du film (40) de copolymère à blocs, - réticuler ladite couche neutre,- déposer ledit film de copolymère à blocs, comprenant au moins un bloc silylé, sur ladite couche neutre réticulée (30), - soumettre l’empilement à une température d’assemblage afin de nano-structurer ledit copolymère à blocs,- retirer (G1) au moins un des nano-domaines (41,42) du film (40) de copolymère à blocs nano-structuré, afin de créer un motif destiné à être transféré par gravure(s) (G2, G3, G4) dans l’épaisseur du substrat (10). Figure à publier avec l’abrégé : FIGURE 2
FR1911521A 2019-10-16 2019-10-16 Procédé de lithographie par auto-assemblage dirigé Active FR3102295B1 (fr)

Priority Applications (8)

Application Number Priority Date Filing Date Title
FR1911521A FR3102295B1 (fr) 2019-10-16 2019-10-16 Procédé de lithographie par auto-assemblage dirigé
CN202080072309.5A CN114600044A (zh) 2019-10-16 2020-10-15 定向自组装光刻方法
PCT/FR2020/051847 WO2021074540A1 (fr) 2019-10-16 2020-10-15 Procede de lithographie par auto-assemblage dirige
JP2022522016A JP2022552518A (ja) 2019-10-16 2020-10-15 指向性自己組織化リソグラフィ方法
EP20799784.2A EP4042471A1 (fr) 2019-10-16 2020-10-15 Procede de lithographie par auto-assemblage dirige
US17/768,522 US20240111217A1 (en) 2019-10-16 2020-10-15 Method for directed self-assembly lithography
KR1020227011868A KR20220083694A (ko) 2019-10-16 2020-10-15 방향성 자기-어셈블리 리소그래피 방법
TW109135934A TWI834925B (zh) 2019-10-16 2020-10-16 定向自組裝微影方法及利用該方法獲得之微影堆疊體

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR1911521 2019-10-16
FR1911521A FR3102295B1 (fr) 2019-10-16 2019-10-16 Procédé de lithographie par auto-assemblage dirigé

Publications (2)

Publication Number Publication Date
FR3102295A1 FR3102295A1 (fr) 2021-04-23
FR3102295B1 true FR3102295B1 (fr) 2021-11-12

Family

ID=69158107

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1911521A Active FR3102295B1 (fr) 2019-10-16 2019-10-16 Procédé de lithographie par auto-assemblage dirigé

Country Status (8)

Country Link
US (1) US20240111217A1 (fr)
EP (1) EP4042471A1 (fr)
JP (1) JP2022552518A (fr)
KR (1) KR20220083694A (fr)
CN (1) CN114600044A (fr)
FR (1) FR3102295B1 (fr)
TW (1) TWI834925B (fr)
WO (1) WO2021074540A1 (fr)

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8691925B2 (en) * 2011-09-23 2014-04-08 Az Electronic Materials (Luxembourg) S.A.R.L. Compositions of neutral layer for directed self assembly block copolymers and processes thereof
US8961918B2 (en) * 2012-02-10 2015-02-24 Rohm And Haas Electronic Materials Llc Thermal annealing process
KR20140136933A (ko) * 2012-02-10 2014-12-01 보드 오브 리전츠, 더 유니버시티 오브 텍사스 시스템 블록 공중합체 박막에서 도메인 배향을 조절하기 위해 화학 증착된 필름의 사용
US20140010990A1 (en) * 2012-07-06 2014-01-09 Wisconsin Alumni Research Foundation Directed assembly of poly (styrene-b-glycolic acid) block copolymer films
JP6027912B2 (ja) * 2013-02-22 2016-11-16 東京応化工業株式会社 相分離構造を含む構造体の製造方法、及びパターン形成方法、並びにトップコート材料
US9115255B2 (en) * 2013-03-14 2015-08-25 Wisconsin Alumni Research Foundation Crosslinked random copolymer films for block copolymer domain orientation
JP2015115599A (ja) * 2013-12-13 2015-06-22 株式会社東芝 パターン形成方法
JP6702649B2 (ja) * 2013-12-31 2020-06-03 ローム アンド ハース エレクトロニック マテリアルズ エルエルシーＲｏｈｍ ａｎｄ Ｈａａｓ Ｅｌｅｃｔｒｏｎｉｃ Ｍａｔｅｒｉａｌｓ ＬＬＣ ブロックコポリマーの性質を制御する方法及びブロックコポリマーから製造された物品
KR20150101875A (ko) * 2014-02-27 2015-09-04 삼성전자주식회사 블록 공중합체를 이용한 미세 패턴 형성 방법
US10410914B2 (en) * 2014-05-28 2019-09-10 Asml Netherlands B.V. Methods for providing lithography features on a substrate by self-assembly of block copolymers
US9396958B2 (en) * 2014-10-14 2016-07-19 Tokyo Electron Limited Self-aligned patterning using directed self-assembly of block copolymers
US9738765B2 (en) * 2015-02-19 2017-08-22 International Business Machines Corporation Hybrid topographical and chemical pre-patterns for directed self-assembly of block copolymers
CN109715746B (zh) * 2016-08-18 2021-03-26 默克专利有限公司 用于自组装应用的聚合物组合物
KR102096270B1 (ko) * 2017-07-14 2020-04-02 주식회사 엘지화학 중성층 조성물

Also Published As

Publication number Publication date
FR3102295A1 (fr) 2021-04-23
EP4042471A1 (fr) 2022-08-17
US20240111217A1 (en) 2024-04-04
TW202132910A (zh) 2021-09-01
TWI834925B (zh) 2024-03-11
CN114600044A (zh) 2022-06-07
WO2021074540A1 (fr) 2021-04-22
JP2022552518A (ja) 2022-12-16
KR20220083694A (ko) 2022-06-20

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