JP2012523693A5 - - Google Patents

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JP2012523693A5
JP2012523693A5 JP2012504713A JP2012504713A JP2012523693A5 JP 2012523693 A5 JP2012523693 A5 JP 2012523693A5 JP 2012504713 A JP2012504713 A JP 2012504713A JP 2012504713 A JP2012504713 A JP 2012504713A JP 2012523693 A5 JP2012523693 A5 JP 2012523693A5
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Prior art keywords
extreme ultraviolet
chamber
baffles
target material
collector mirror
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JP2012504713A
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JP5684786B2 (ja
JP2012523693A (ja
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Priority claimed from US12/725,167 external-priority patent/US8575575B2/en
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JP2012504713A 2009-04-09 2010-03-31 熱い壁及び冷たい集光ミラーを備えたレーザ生成プラズマ極紫外チャンバのためのシステム、方法及び装置 Active JP5684786B2 (ja)

Applications Claiming Priority (9)

Application Number Priority Date Filing Date Title
US16800009P 2009-04-09 2009-04-09
US16803309P 2009-04-09 2009-04-09
US16801209P 2009-04-09 2009-04-09
US61/168,000 2009-04-09
US61/168,033 2009-04-09
US61/168,012 2009-04-09
US12/725,167 US8575575B2 (en) 2009-04-09 2010-03-16 System, method and apparatus for laser produced plasma extreme ultraviolet chamber with hot walls and cold collector mirror
US12/725,167 2010-03-16
PCT/US2010/029441 WO2010117859A1 (en) 2009-04-09 2010-03-31 System, method and apparatus for laser produced plasma extreme ultraviolet chamber with hot walls and cold collector mirror

Publications (3)

Publication Number Publication Date
JP2012523693A JP2012523693A (ja) 2012-10-04
JP2012523693A5 true JP2012523693A5 (enExample) 2013-05-30
JP5684786B2 JP5684786B2 (ja) 2015-03-18

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JP2012504714A Active JP5695636B2 (ja) 2009-04-09 2010-03-31 最適な極紫外線出力のためにターゲット材料を位置合わせ及び同期させるシステム、方法及び装置
JP2012504712A Active JP5739411B2 (ja) 2009-04-09 2010-03-31 Ｅｕｖ生成チャンバにおけるはね返り防止のための液滴捕集器に関するシステム、方法、及び装置
JP2012504713A Active JP5684786B2 (ja) 2009-04-09 2010-03-31 熱い壁及び冷たい集光ミラーを備えたレーザ生成プラズマ極紫外チャンバのためのシステム、方法及び装置

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JP2012504714A Active JP5695636B2 (ja) 2009-04-09 2010-03-31 最適な極紫外線出力のためにターゲット材料を位置合わせ及び同期させるシステム、方法及び装置
JP2012504712A Active JP5739411B2 (ja) 2009-04-09 2010-03-31 Ｅｕｖ生成チャンバにおけるはね返り防止のための液滴捕集器に関するシステム、方法、及び装置

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US (5) US8138487B2 (enExample)
JP (3) JP5695636B2 (enExample)
KR (3) KR101702413B1 (enExample)
TW (4) TWI563880B (enExample)
WO (3) WO2010117858A1 (enExample)

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