JP2012175024A5 - - Google Patents

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Publication number
JP2012175024A5
JP2012175024A5 JP2011037969A JP2011037969A JP2012175024A5 JP 2012175024 A5 JP2012175024 A5 JP 2012175024A5 JP 2011037969 A JP2011037969 A JP 2011037969A JP 2011037969 A JP2011037969 A JP 2011037969A JP 2012175024 A5 JP2012175024 A5 JP 2012175024A5
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JP
Japan
Prior art keywords
electrode
substrate
recess
protruding
semiconductor device
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JP2011037969A
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English (en)
Japanese (ja)
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JP2012175024A (ja
JP5870493B2 (ja
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Priority to JP2011037969A priority Critical patent/JP5870493B2/ja
Priority claimed from JP2011037969A external-priority patent/JP5870493B2/ja
Priority to CN201210034217.5A priority patent/CN102651357B/zh
Priority to US13/403,338 priority patent/US9000575B2/en
Publication of JP2012175024A publication Critical patent/JP2012175024A/ja
Publication of JP2012175024A5 publication Critical patent/JP2012175024A5/ja
Priority to US14/504,957 priority patent/US9209112B2/en
Application granted granted Critical
Publication of JP5870493B2 publication Critical patent/JP5870493B2/ja
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JP2011037969A 2011-02-24 2011-02-24 半導体装置、センサーおよび電子デバイス Active JP5870493B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2011037969A JP5870493B2 (ja) 2011-02-24 2011-02-24 半導体装置、センサーおよび電子デバイス
CN201210034217.5A CN102651357B (zh) 2011-02-24 2012-02-15 半导体装置、传感器以及电子设备
US13/403,338 US9000575B2 (en) 2011-02-24 2012-02-23 Semiconductor device having stacked substrates with protruding and recessed electrode connection
US14/504,957 US9209112B2 (en) 2011-02-24 2014-10-02 Semiconductor device having stacked substrates with protruding and recessed electrode connection

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011037969A JP5870493B2 (ja) 2011-02-24 2011-02-24 半導体装置、センサーおよび電子デバイス

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2015124502A Division JP6290830B6 (ja) 2015-06-22 2015-06-22 半導体装置、センサーおよび電子デバイス

Publications (3)

Publication Number Publication Date
JP2012175024A JP2012175024A (ja) 2012-09-10
JP2012175024A5 true JP2012175024A5 (enExample) 2014-03-27
JP5870493B2 JP5870493B2 (ja) 2016-03-01

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Family Applications (1)

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JP2011037969A Active JP5870493B2 (ja) 2011-02-24 2011-02-24 半導体装置、センサーおよび電子デバイス

Country Status (3)

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US (2) US9000575B2 (enExample)
JP (1) JP5870493B2 (enExample)
CN (1) CN102651357B (enExample)

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