JP2008021993A5 - - Google Patents

Download PDF

Info

Publication number
JP2008021993A5
JP2008021993A5 JP2007171329A JP2007171329A JP2008021993A5 JP 2008021993 A5 JP2008021993 A5 JP 2008021993A5 JP 2007171329 A JP2007171329 A JP 2007171329A JP 2007171329 A JP2007171329 A JP 2007171329A JP 2008021993 A5 JP2008021993 A5 JP 2008021993A5
Authority
JP
Japan
Prior art keywords
semiconductor layer
substrate
amorphous semiconductor
amorphous
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2007171329A
Other languages
English (en)
Japanese (ja)
Other versions
JP2008021993A (ja
Filing date
Publication date
Priority claimed from US11/480,161 external-priority patent/US20080000522A1/en
Application filed filed Critical
Publication of JP2008021993A publication Critical patent/JP2008021993A/ja
Publication of JP2008021993A5 publication Critical patent/JP2008021993A5/ja
Pending legal-status Critical Current

Links

JP2007171329A 2006-06-30 2007-06-29 全背面接点構成を含む光起電力デバイス及び関連する方法 Pending JP2008021993A (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US11/480,161 US20080000522A1 (en) 2006-06-30 2006-06-30 Photovoltaic device which includes all-back-contact configuration; and related processes

Publications (2)

Publication Number Publication Date
JP2008021993A JP2008021993A (ja) 2008-01-31
JP2008021993A5 true JP2008021993A5 (enExample) 2010-07-29

Family

ID=38535964

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007171329A Pending JP2008021993A (ja) 2006-06-30 2007-06-29 全背面接点構成を含む光起電力デバイス及び関連する方法

Country Status (6)

Country Link
US (1) US20080000522A1 (enExample)
EP (1) EP1873840A1 (enExample)
JP (1) JP2008021993A (enExample)
KR (1) KR20080002657A (enExample)
CN (1) CN101097969A (enExample)
AU (1) AU2007202844A1 (enExample)

Families Citing this family (120)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7442629B2 (en) 2004-09-24 2008-10-28 President & Fellows Of Harvard College Femtosecond laser-induced formation of submicrometer spikes on a semiconductor substrate
US7057256B2 (en) 2001-05-25 2006-06-06 President & Fellows Of Harvard College Silicon-based visible and near-infrared optoelectric devices
WO2007029971A1 (en) * 2005-09-07 2007-03-15 Iferro Co., Ltd. Method of forming organic layer on semiconductor substrate
US20070169808A1 (en) * 2006-01-26 2007-07-26 Kherani Nazir P Solar cell
KR101198763B1 (ko) * 2006-03-23 2012-11-12 엘지이노텍 주식회사 기둥 구조와 이를 이용한 발광 소자 및 그 형성방법
US20080174028A1 (en) * 2007-01-23 2008-07-24 General Electric Company Method and Apparatus For A Semiconductor Structure Forming At Least One Via
US9287430B1 (en) * 2007-11-01 2016-03-15 Sandia Corporation Photovoltaic solar concentrator
JP5230222B2 (ja) * 2008-02-21 2013-07-10 三洋電機株式会社 太陽電池
KR20090091562A (ko) * 2008-02-25 2009-08-28 엘지전자 주식회사 태양전지 및 그 제조방법
KR101155343B1 (ko) * 2008-02-25 2012-06-11 엘지전자 주식회사 백 콘택 태양전지의 제조 방법
WO2009111748A2 (en) * 2008-03-06 2009-09-11 Sionyx, Inc. High fill-factor laser-treated semiconductor device on bulk material with single side contact scheme
US8212327B2 (en) 2008-03-06 2012-07-03 Sionyx, Inc. High fill-factor laser-treated semiconductor device on bulk material with single side contact scheme
US12074240B2 (en) 2008-06-12 2024-08-27 Maxeon Solar Pte. Ltd. Backside contact solar cells with separated polysilicon doped regions
US7851698B2 (en) * 2008-06-12 2010-12-14 Sunpower Corporation Trench process and structure for backside contact solar cells with polysilicon doped regions
KR101032064B1 (ko) * 2008-07-24 2011-05-02 주식회사 밀레니엄투자 태양 전지 및 이의 제조방법
FR2936905B1 (fr) * 2008-10-02 2010-10-29 Commissariat Energie Atomique Cellule photovoltaique a heterojonction a deux dopages et procede de fabrication.
US7820472B2 (en) * 2008-11-13 2010-10-26 Applied Materials, Inc. Method of forming front contacts to a silicon solar cell without patterning
KR100993511B1 (ko) * 2008-11-19 2010-11-12 엘지전자 주식회사 태양 전지 및 그 제조 방법
JP2010147324A (ja) * 2008-12-19 2010-07-01 Kyocera Corp 太陽電池素子および太陽電池素子の製造方法
KR101539047B1 (ko) * 2008-12-24 2015-07-23 인텔렉츄얼 키스톤 테크놀로지 엘엘씨 광기전력 변환 소자 및 그의 제조방법
KR101142861B1 (ko) * 2009-02-04 2012-05-08 엘지전자 주식회사 태양 전지 및 그 제조 방법
JP5518347B2 (ja) * 2009-02-26 2014-06-11 三洋電機株式会社 太陽電池の製造方法
JP2010258043A (ja) * 2009-04-21 2010-11-11 Sanyo Electric Co Ltd 太陽電池
JP2010283339A (ja) * 2009-05-02 2010-12-16 Semiconductor Energy Lab Co Ltd 光電変換装置及びその作製方法
US7927910B2 (en) * 2009-06-28 2011-04-19 Sino-American Silicon Products Inc. Manufacturing method of solar cell
KR101139443B1 (ko) * 2009-09-04 2012-04-30 엘지전자 주식회사 이종접합 태양전지와 그 제조방법
EP2293351B1 (en) * 2009-09-07 2017-04-12 Lg Electronics Inc. Solar cell
US9064999B2 (en) 2009-09-07 2015-06-23 Lg Electronics Inc. Solar cell and method for manufacturing the same
US9673243B2 (en) 2009-09-17 2017-06-06 Sionyx, Llc Photosensitive imaging devices and associated methods
US9911781B2 (en) 2009-09-17 2018-03-06 Sionyx, Llc Photosensitive imaging devices and associated methods
EP2494611A2 (en) * 2009-10-26 2012-09-05 3M Innovative Properties Company Structured film and articles made therefrom
US9012766B2 (en) 2009-11-12 2015-04-21 Silevo, Inc. Aluminum grid as backside conductor on epitaxial silicon thin film solar cells
CN102074616B (zh) * 2009-11-19 2013-03-27 北京北方微电子基地设备工艺研究中心有限责任公司 一种选择性发射极太阳能电池的制备方法
FR2953999B1 (fr) * 2009-12-14 2012-01-20 Total Sa Cellule photovoltaique heterojonction a contact arriere
KR101145357B1 (ko) * 2009-12-16 2012-05-14 (주)에스엔텍 텍스처링 모듈 및 이를 구비한 태양전지 제조장치 및 이를 이용한 태양전지 제조방법
KR20110071374A (ko) * 2009-12-21 2011-06-29 현대중공업 주식회사 후면전계형 이종접합 태양전지 및 그 제조방법
KR20110071375A (ko) * 2009-12-21 2011-06-29 현대중공업 주식회사 후면전계형 이종접합 태양전지 및 그 제조방법
NL2004066C2 (en) * 2010-01-06 2011-07-07 Stichting Energie Solar cell and method for manufacturing of such a solar cell.
DE102010007695A1 (de) 2010-02-09 2011-08-11 Helmholtz-Zentrum Berlin für Materialien und Energie GmbH, 14109 Rückseitenkontaktierte Solarzelle mit unstrukturierter Absorberschicht
US8790957B2 (en) * 2010-03-04 2014-07-29 Sunpower Corporation Method of fabricating a back-contact solar cell and device thereof
US8692198B2 (en) 2010-04-21 2014-04-08 Sionyx, Inc. Photosensitive imaging devices and associated methods
CN101866969B (zh) * 2010-05-27 2012-09-19 友达光电股份有限公司 太阳电池
US9214576B2 (en) 2010-06-09 2015-12-15 Solarcity Corporation Transparent conducting oxide for photovoltaic devices
CN106449684B (zh) 2010-06-18 2019-09-27 西奥尼克斯公司 高速光敏设备及相关方法
US8633379B2 (en) 2010-08-17 2014-01-21 Lg Electronics Inc. Solar cell
DE102010044348A1 (de) * 2010-09-03 2012-03-08 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Photovoltaische Solarzelle und Verfahren zu deren Herstellung
US9773928B2 (en) 2010-09-10 2017-09-26 Tesla, Inc. Solar cell with electroplated metal grid
JP5174114B2 (ja) * 2010-09-30 2013-04-03 三洋電機株式会社 太陽電池
US9800053B2 (en) 2010-10-08 2017-10-24 Tesla, Inc. Solar panels with integrated cell-level MPPT devices
JP5094949B2 (ja) * 2010-11-30 2012-12-12 三洋電機株式会社 太陽電池
WO2012105154A1 (ja) * 2011-01-31 2012-08-09 三洋電機株式会社 光電変換素子の製造方法
WO2012105153A1 (ja) * 2011-01-31 2012-08-09 三洋電機株式会社 光電変換素子
KR20120090449A (ko) * 2011-02-08 2012-08-17 삼성전자주식회사 태양 전지 및 이의 제조 방법
JP5879538B2 (ja) * 2011-03-25 2016-03-08 パナソニックIpマネジメント株式会社 光電変換装置及びその製造方法
JPWO2012132758A1 (ja) * 2011-03-28 2014-07-28 三洋電機株式会社 光電変換装置及び光電変換装置の製造方法
JPWO2012132766A1 (ja) * 2011-03-28 2014-07-28 三洋電機株式会社 光電変換装置及び光電変換装置の製造方法
US8816190B2 (en) * 2011-04-18 2014-08-26 First Solar, Inc. Photovoltaic devices and method of making
US8802486B2 (en) * 2011-04-25 2014-08-12 Sunpower Corporation Method of forming emitters for a back-contact solar cell
US9054256B2 (en) 2011-06-02 2015-06-09 Solarcity Corporation Tunneling-junction solar cell with copper grid for concentrated photovoltaic application
US9496308B2 (en) 2011-06-09 2016-11-15 Sionyx, Llc Process module for increasing the response of backside illuminated photosensitive imagers and associated methods
CN102214720B (zh) * 2011-06-10 2013-07-24 山东力诺太阳能电力股份有限公司 基于p型硅片的背接触异质结太阳电池
CN103946867A (zh) 2011-07-13 2014-07-23 西奥尼克斯公司 生物计量成像装置和相关方法
TWI427808B (zh) * 2011-08-11 2014-02-21 Univ Nat Yunlin Sci & Tech Production method of back electrode solar cell
US8889981B2 (en) * 2011-10-18 2014-11-18 Samsung Sdi Co., Ltd. Photoelectric device
KR20130050721A (ko) 2011-11-08 2013-05-16 삼성에스디아이 주식회사 태양 전지
JP2013115262A (ja) * 2011-11-29 2013-06-10 Sharp Corp 光電変換素子
CN102446992A (zh) * 2011-12-14 2012-05-09 杭州赛昂电力有限公司 薄膜太阳能电池及其制作方法
JP2013125890A (ja) * 2011-12-15 2013-06-24 Sharp Corp 光電変換素子およびその製造方法
JP6250552B2 (ja) * 2011-12-30 2017-12-20 ソレクセル、インコーポレイテッド マルチレベルソーラーセルメタライゼーション
JP2013187287A (ja) * 2012-03-07 2013-09-19 Sharp Corp 光電変換素子
US9064764B2 (en) 2012-03-22 2015-06-23 Sionyx, Inc. Pixel isolation elements, devices, and associated methods
JP5546616B2 (ja) * 2012-05-14 2014-07-09 セリーボ, インコーポレイテッド トンネル酸化物を有する後面接合太陽電池
KR20140019099A (ko) * 2012-08-02 2014-02-14 삼성에스디아이 주식회사 광전소자
JP6103867B2 (ja) * 2012-09-12 2017-03-29 シャープ株式会社 光電変換素子および光電変換素子の製造方法
JP6042679B2 (ja) * 2012-09-26 2016-12-14 シャープ株式会社 光電変換素子および光電変換素子の製造方法
TWI483410B (zh) * 2012-09-27 2015-05-01 Motech Ind Inc 太陽能電池、其製造方法及其模組
AU2013326971B2 (en) 2012-10-04 2016-06-30 Tesla, Inc. Photovoltaic devices with electroplated metal grids
US9865754B2 (en) 2012-10-10 2018-01-09 Tesla, Inc. Hole collectors for silicon photovoltaic cells
US10074755B2 (en) 2013-01-11 2018-09-11 Tesla, Inc. High efficiency solar panel
US9219174B2 (en) 2013-01-11 2015-12-22 Solarcity Corporation Module fabrication of solar cells with low resistivity electrodes
JP6466346B2 (ja) 2013-02-15 2019-02-06 サイオニクス、エルエルシー アンチブルーミング特性を有するハイダイナミックレンジcmos画像センサおよび関連づけられた方法
NL2010382C2 (en) * 2013-03-01 2014-09-03 Energieonderzoek Ct Nederland Photo-voltaic cell and method of manufacturing such a cell.
TWI602315B (zh) * 2013-03-08 2017-10-11 索泰克公司 具有經組構成效能更佳之低帶隙主動層之感光元件及相關方法
WO2014151093A1 (en) 2013-03-15 2014-09-25 Sionyx, Inc. Three dimensional imaging utilizing stacked imager devices and associated methods
US9624595B2 (en) 2013-05-24 2017-04-18 Solarcity Corporation Electroplating apparatus with improved throughput
US9209345B2 (en) 2013-06-29 2015-12-08 Sionyx, Inc. Shallow trench textured regions and associated methods
JP6350979B2 (ja) * 2013-09-04 2018-07-04 パナソニックIpマネジメント株式会社 太陽電池
CN103646983B (zh) * 2013-11-29 2016-09-07 常州天合光能有限公司 背发射极对称异质结太阳电池及其制备方法
US9577134B2 (en) * 2013-12-09 2017-02-21 Sunpower Corporation Solar cell emitter region fabrication using self-aligned implant and cap
TW201526252A (zh) * 2013-12-25 2015-07-01 Neo Solar Power Corp 太陽能電池及其製造方法
JP5816800B2 (ja) * 2014-03-19 2015-11-18 パナソニックIpマネジメント株式会社 太陽電池の製造方法
WO2015198978A1 (ja) * 2014-06-27 2015-12-30 シャープ株式会社 光電変換装置およびその製造方法
JP5871996B2 (ja) * 2014-06-27 2016-03-01 シャープ株式会社 光電変換装置およびその製造方法
JP5913446B2 (ja) * 2014-06-27 2016-04-27 シャープ株式会社 光電変換装置およびその製造方法
US10309012B2 (en) 2014-07-03 2019-06-04 Tesla, Inc. Wafer carrier for reducing contamination from carbon particles and outgassing
JP2017520920A (ja) * 2014-07-17 2017-07-27 ソーラーシティ コーポレーション 交差指型背面接触を有する太陽電池
CN105470322A (zh) * 2014-09-12 2016-04-06 英属开曼群岛商精曜有限公司 太阳能电池、太阳能电池模块及太阳能电池的制作方法
US10818430B2 (en) 2014-09-26 2020-10-27 Apple Inc. Transmitter for inductive power transfer system
KR102219804B1 (ko) 2014-11-04 2021-02-24 엘지전자 주식회사 태양 전지 및 그의 제조 방법
US9899546B2 (en) 2014-12-05 2018-02-20 Tesla, Inc. Photovoltaic cells with electrodes adapted to house conductive paste
JP6697824B2 (ja) * 2015-01-14 2020-05-27 シャープ株式会社 光電変換素子、それを備えた太陽電池モジュールおよび太陽光発電システム
WO2016114371A1 (ja) * 2015-01-16 2016-07-21 シャープ株式会社 光電変換素子、それを備えた太陽電池モジュールおよび太陽光発電システム
US9947822B2 (en) 2015-02-02 2018-04-17 Tesla, Inc. Bifacial photovoltaic module using heterojunction solar cells
JP6141342B2 (ja) * 2015-02-05 2017-06-07 信越化学工業株式会社 裏面接合型太陽電池
WO2016140309A1 (ja) * 2015-03-04 2016-09-09 シャープ株式会社 光電変換素子およびその製造方法
US20160284913A1 (en) * 2015-03-27 2016-09-29 Staffan WESTERBERG Solar cell emitter region fabrication using substrate-level ion implantation
DE102015112046A1 (de) * 2015-07-23 2017-01-26 Helmholtz-Zentrum Berlin Für Materialien Und Energie Gmbh Verfahren zur Herstellung einseitig angeordneter strukturierter Kontakte in einer Schichtanordnung für ein photovoltaisches Bauelement
JP2015188120A (ja) * 2015-07-31 2015-10-29 シャープ株式会社 光電変換素子
US9761744B2 (en) 2015-10-22 2017-09-12 Tesla, Inc. System and method for manufacturing photovoltaic structures with a metal seed layer
KR102600379B1 (ko) 2015-12-21 2023-11-10 상라오 징코 솔라 테크놀러지 디벨롭먼트 컴퍼니, 리미티드 태양 전지와 그 제조 방법
US9842956B2 (en) 2015-12-21 2017-12-12 Tesla, Inc. System and method for mass-production of high-efficiency photovoltaic structures
US9496429B1 (en) 2015-12-30 2016-11-15 Solarcity Corporation System and method for tin plating metal electrodes
US10115838B2 (en) 2016-04-19 2018-10-30 Tesla, Inc. Photovoltaic structures with interlocking busbars
CN106653928A (zh) * 2016-11-30 2017-05-10 上海电机学院 一种新型异质结太阳能电池结构及其制作方法
US20180295560A1 (en) 2017-04-11 2018-10-11 Global Tel*Link Corporation System and method for detecting and controlling contraband devices
US10672919B2 (en) 2017-09-19 2020-06-02 Tesla, Inc. Moisture-resistant solar cells for solar roof tiles
US11190128B2 (en) 2018-02-27 2021-11-30 Tesla, Inc. Parallel-connected solar roof tile modules
JP7043308B2 (ja) * 2018-03-23 2022-03-29 株式会社カネカ 太陽電池の製造方法、および、太陽電池
CN116741849A (zh) * 2022-06-08 2023-09-12 浙江晶科能源有限公司 一种太阳能电池及光伏组件
CN118016740B (zh) * 2024-04-02 2024-09-13 浙江晶科能源有限公司 太阳能电池及其制备方法、光伏组件

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4434318A (en) * 1981-03-25 1984-02-28 Sera Solar Corporation Solar cells and method
JPH0831413B2 (ja) * 1986-11-26 1996-03-27 キヤノン株式会社 Pin型光電変換素子の製造方法
US5213628A (en) * 1990-09-20 1993-05-25 Sanyo Electric Co., Ltd. Photovoltaic device
JP2719230B2 (ja) * 1990-11-22 1998-02-25 キヤノン株式会社 光起電力素子
US5256887A (en) * 1991-07-19 1993-10-26 Solarex Corporation Photovoltaic device including a boron doping profile in an i-type layer
ES2169078T3 (es) * 1993-07-29 2002-07-01 Gerhard Willeke Procedimiento para fabricacion de una celula solar, asi como la celula solar fabricada segun este procedimiento.
JPH0878659A (ja) * 1994-09-02 1996-03-22 Sanyo Electric Co Ltd 半導体デバイス及びその製造方法
JP3468670B2 (ja) * 1997-04-28 2003-11-17 シャープ株式会社 太陽電池セルおよびその製造方法
JP2001189478A (ja) * 1999-12-28 2001-07-10 Sanyo Electric Co Ltd 半導体素子及びその製造方法
JP2001291881A (ja) * 2000-01-31 2001-10-19 Sanyo Electric Co Ltd 太陽電池モジュール
JP3490964B2 (ja) * 2000-09-05 2004-01-26 三洋電機株式会社 光起電力装置
JP4070483B2 (ja) * 2002-03-05 2008-04-02 三洋電機株式会社 光起電力装置並びにその製造方法
JP3702240B2 (ja) * 2002-03-26 2005-10-05 三洋電機株式会社 半導体素子及びその製造方法
JP2003298078A (ja) * 2002-03-29 2003-10-17 Ebara Corp 光起電力素子
WO2003105238A1 (en) * 2002-06-11 2003-12-18 The State Of Oregon Acting By And Through The State Board Of Higher Education On Behalf Of Oregon State University Polycrystalline thin-film solar cells
US7015640B2 (en) * 2002-09-11 2006-03-21 General Electric Company Diffusion barrier coatings having graded compositions and devices incorporating the same
JP4159390B2 (ja) * 2003-03-27 2008-10-01 三洋電機株式会社 光起電力素子およびその製造方法
US7199395B2 (en) * 2003-09-24 2007-04-03 Sanyo Electric Co., Ltd. Photovoltaic cell and method of fabricating the same
JP4155899B2 (ja) * 2003-09-24 2008-09-24 三洋電機株式会社 光起電力素子の製造方法
US6998288B1 (en) * 2003-10-03 2006-02-14 Sunpower Corporation Use of doped silicon dioxide in the fabrication of solar cells
US20060130891A1 (en) * 2004-10-29 2006-06-22 Carlson David E Back-contact photovoltaic cells
FR2880989B1 (fr) * 2005-01-20 2007-03-09 Commissariat Energie Atomique Dispositif semi-conducteur a heterojonctions et a structure inter-digitee
US20070169808A1 (en) * 2006-01-26 2007-07-26 Kherani Nazir P Solar cell

Similar Documents

Publication Publication Date Title
JP2008021993A5 (enExample)
JP2012508473A5 (enExample)
JP2008182226A5 (enExample)
EP2568511A3 (en) Selective emitter solar cell and manufacturing method thereof
JP2009520369A5 (enExample)
JP2008177539A5 (enExample)
JP2014525671A5 (enExample)
JP2010177264A5 (enExample)
WO2008070266A3 (en) Methods for manufacturing three-dimensional thin-film solar cells
JP2008135740A5 (enExample)
JP2011040445A5 (enExample)
WO2008039078A3 (en) Back contacted solar cell
JP2010517271A5 (enExample)
EP1798778A3 (en) Integrated thin-film solar cell and method of manufacturing the same
JP2009152566A5 (enExample)
JP2006525677A5 (enExample)
JP2012156508A5 (enExample)
JP2011523231A5 (enExample)
JP2009530818A5 (enExample)
WO2007018934A3 (en) Compositionally-graded photovoltaic device and fabrication method, and related articles
TWI456752B (zh) 半導體影像感測裝置及半導體影像感測元件與其形成方法
JP2015513518A5 (enExample)
WO2011078521A3 (ko) 후면전계형 이종접합 태양전지 및 그 제조방법
WO2011063228A3 (en) Betavoltaic apparatus and method
EP2172981A3 (fr) Cellule photovoltaïque a hétérojonction à deux dopages et procédé de fabrication.