JPWO2012132766A1 - 光電変換装置及び光電変換装置の製造方法 - Google Patents
光電変換装置及び光電変換装置の製造方法 Download PDFInfo
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- 238000005530 etching Methods 0.000 description 18
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- 239000010949 copper Substances 0.000 description 4
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- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 4
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- 229910003437 indium oxide Inorganic materials 0.000 description 2
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 2
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- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 2
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- GPXJNWSHGFTCBW-UHFFFAOYSA-N Indium phosphide Chemical compound [In]#P GPXJNWSHGFTCBW-UHFFFAOYSA-N 0.000 description 1
- 229910021578 Iron(III) chloride Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
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- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
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- IXCSERBJSXMMFS-UHFFFAOYSA-N hcl hcl Chemical compound Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 description 1
- RBTARNINKXHZNM-UHFFFAOYSA-K iron trichloride Chemical compound Cl[Fe](Cl)Cl RBTARNINKXHZNM-UHFFFAOYSA-K 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
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- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0224—Electrodes
- H01L31/022408—Electrodes for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/022425—Electrodes for devices characterised by at least one potential jump barrier or surface barrier for solar cells
- H01L31/022441—Electrode arrangements specially adapted for back-contact solar cells
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier
- H01L31/072—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PN heterojunction type
- H01L31/0745—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PN heterojunction type comprising a AIVBIV heterojunction, e.g. Si/Ge, SiGe/Si or Si/SiC solar cells
- H01L31/0747—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PN heterojunction type comprising a AIVBIV heterojunction, e.g. Si/Ge, SiGe/Si or Si/SiC solar cells comprising a heterojunction of crystalline and amorphous materials, e.g. heterojunction with intrinsic thin layer or HIT® solar cells; solar cells
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- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/186—Particular post-treatment for the devices, e.g. annealing, impurity gettering, short-circuit elimination, recrystallisation
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- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier
- H01L31/068—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PN homojunction type, e.g. bulk silicon PN homojunction solar cells or thin film polycrystalline silicon PN homojunction solar cells
- H01L31/0682—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PN homojunction type, e.g. bulk silicon PN homojunction solar cells or thin film polycrystalline silicon PN homojunction solar cells back-junction, i.e. rearside emitter, solar cells, e.g. interdigitated base-emitter regions back-junction cells
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/547—Monocrystalline silicon PV cells
Abstract
Description
本発明の実施の形態における光電変換装置100は、図1の裏面側平面図及び図2の断面図に示すように、半導体材料からなる基板10、i型非晶質層12i、n型非晶質層12n、透明保護層14、i型非晶質層16i、n型非晶質層16n、i型非晶質層18i、p型非晶質層18p、絶縁層20、電極層22及び電極部24(24n,24p),26(26n,26p)を含んで構成される。
第1の実施の形態では、i型非晶質層16i及びn型非晶質層16nをi型非晶質層12i及びn型非晶質層12nより前に形成したが、逆の順に形成してもよい。すなわち、図9に示すように、ステップS12においてi型非晶質層12i及びn型非晶質層12nを形成し、ステップS14においてi型非晶質層16i及びn型非晶質層16nを形成するものとしてもよい。なお、特に説明のない構成及び製造方法については第1の実施の形態と同様である。
Claims (11)
- 光電変換装置であって、
半導体材料からなる基板と、
前記基板の第1表面の少なくとも一部の領域上に形成された第1パッシベーション層と、
前記基板の前記第1表面と反対の第2表面の少なくとも一部の領域上に形成された第2パッシベーション層と、
を備え、前記第1表面側には電極が設けられ、前記第2表面側には電極が設けられておらず、
前記第1パッシベーション層の単位面積当たりの電気抵抗は、前記第2パッシベーション層の単位面積当たりの電気抵抗より小さい。 - 請求項1に記載の光電変換装置であって、
前記第1パッシベーション層の膜厚は、前記第2パッシベーション層の膜厚より薄い。 - 請求項1に記載の光電変換装置であって、
前記第1パッシベーション層の水素含有率は、前記第2パッシベーション層の水素含有率より低い。 - 請求項1に記載の光電変換装置であって、
前記第1パッシベーション層及び前記第2パッシベーション層は、アモルファスシリコン層である。 - 請求項1に記載の光電変換装置であって、
前記第1パッシベーション層の一部の領域上に形成された第1の導電型のアモルファスシリコン層と、
前記第1パッシベーション層の前記一部の領域外の少なくとも一部の領域に形成された前記第1の導電型と逆導電型のアモルファスシリコン層と、
を備える。 - 光電変換装置の製造方法であって、
半導体材料からなる基板の第1表面の少なくとも一部の領域上に第1パッシベーション層を形成する第1の工程と、
前記第1の工程後、前記半導体基板の前記第1表面と反対の第2表面の少なくとも一部の領域上に第2パッシベーション層を形成する第2の工程と、
前記第2の工程後、前記第2表面側のみに電極を形成する第3の工程と、
を備える。 - 請求項6に記載の光電変換装置の製造方法であって、
前記第1パッシベーション層の光の吸収量は、前記第2パッシベーション層の光の吸収量より小さく形成する。 - 請求項6に記載の光電変換装置の製造方法であって、
前記第1パッシベーション層の膜厚は、前記第2パッシベーション層の膜厚より薄くなるように形成する。 - 請求項6に記載の光電変換装置の製造方法であって、
前記第1パッシベーション層の水素含有率は、前記第2パッシベーション層の水素含有率より高くなるように形成する。 - 請求項6に記載の光電変換装置の製造方法であって、
前記第1パッシベーション層及び前記第2パッシベーション層は、アモルファスシリコン層である。 - 請求項6に記載の光電変換装置の製造方法であって、
前記第2パッシベーション層の一部の領域上に第1の導電型のアモルファスシリコン層を形成する工程と、
前記第2パッシベーション層の前記一部の領域外の少なくとも一部の領域上に前記第1の導電型と逆導電型のアモルファスシリコン層を形成する工程と、
を備える。
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PCT/JP2012/055440 WO2012132766A1 (ja) | 2011-03-28 | 2012-03-02 | 光電変換装置及び光電変換装置の製造方法 |
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WO2014076972A1 (ja) * | 2012-11-19 | 2014-05-22 | 三洋電機株式会社 | 太陽電池セル及び太陽電池セルの抵抗算出方法 |
WO2015114903A1 (ja) * | 2014-01-28 | 2015-08-06 | パナソニックIpマネジメント株式会社 | 太陽電池及びその製造方法 |
US9859451B2 (en) | 2015-06-26 | 2018-01-02 | International Business Machines Corporation | Thin film photovoltaic cell with back contacts |
WO2017098790A1 (ja) * | 2015-12-07 | 2017-06-15 | 株式会社カネカ | 光電変換装置およびその製造方法 |
CN110634971A (zh) * | 2018-05-31 | 2019-12-31 | 福建金石能源有限公司 | 一种背接触异质结太阳能电池及其制造方法 |
CN112567535B (zh) * | 2018-08-13 | 2024-03-26 | 株式会社钟化 | 光电转换元件和光电转换元件的制造方法 |
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