JP2007522529A5 - - Google Patents

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Publication number
JP2007522529A5
JP2007522529A5 JP2006553203A JP2006553203A JP2007522529A5 JP 2007522529 A5 JP2007522529 A5 JP 2007522529A5 JP 2006553203 A JP2006553203 A JP 2006553203A JP 2006553203 A JP2006553203 A JP 2006553203A JP 2007522529 A5 JP2007522529 A5 JP 2007522529A5
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Japan
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mems device
frequency
plate
oscillation
outer plate
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JP2006553203A
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Japanese (ja)
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JP2007522529A (ja
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Priority claimed from PCT/US2005/004071 external-priority patent/WO2005078509A2/en
Publication of JP2007522529A publication Critical patent/JP2007522529A/ja
Publication of JP2007522529A5 publication Critical patent/JP2007522529A5/ja
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JP2006553203A 2004-02-09 2005-02-09 性能を改良したmems走査システム Pending JP2007522529A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US54289604P 2004-02-09 2004-02-09
US57113304P 2004-05-14 2004-05-14
PCT/US2005/004071 WO2005078509A2 (en) 2004-02-09 2005-02-09 Mems scanning system with improved performance

Publications (2)

Publication Number Publication Date
JP2007522529A JP2007522529A (ja) 2007-08-09
JP2007522529A5 true JP2007522529A5 (enExample) 2008-03-21

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ID=34864506

Family Applications (4)

Application Number Title Priority Date Filing Date
JP2006552358A Withdrawn JP2007525025A (ja) 2004-02-09 2005-02-09 Memsスキャナの製造方法および装置
JP2006553203A Pending JP2007522529A (ja) 2004-02-09 2005-02-09 性能を改良したmems走査システム
JP2006553201A Withdrawn JP2007522528A (ja) 2004-02-09 2005-02-09 高性能memスキャナ
JP2006552357A Withdrawn JP2007527551A (ja) 2004-02-09 2005-02-09 光線を走査する方法および装置

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JP2006552358A Withdrawn JP2007525025A (ja) 2004-02-09 2005-02-09 Memsスキャナの製造方法および装置

Family Applications After (2)

Application Number Title Priority Date Filing Date
JP2006553201A Withdrawn JP2007522528A (ja) 2004-02-09 2005-02-09 高性能memスキャナ
JP2006552357A Withdrawn JP2007527551A (ja) 2004-02-09 2005-02-09 光線を走査する方法および装置

Country Status (6)

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US (3) US7485485B2 (enExample)
EP (4) EP1719011A2 (enExample)
JP (4) JP2007525025A (enExample)
KR (4) KR20070012649A (enExample)
AT (1) ATE551293T1 (enExample)
WO (4) WO2005078506A2 (enExample)

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* Cited by examiner, † Cited by third party
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