JP2008191351A5 - - Google Patents

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Publication number
JP2008191351A5
JP2008191351A5 JP2007025011A JP2007025011A JP2008191351A5 JP 2008191351 A5 JP2008191351 A5 JP 2008191351A5 JP 2007025011 A JP2007025011 A JP 2007025011A JP 2007025011 A JP2007025011 A JP 2007025011A JP 2008191351 A5 JP2008191351 A5 JP 2008191351A5
Authority
JP
Japan
Prior art keywords
frame
support shaft
piezoelectric diaphragm
groove
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2007025011A
Other languages
English (en)
Japanese (ja)
Other versions
JP5076526B2 (ja
JP2008191351A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2007025011A priority Critical patent/JP5076526B2/ja
Priority claimed from JP2007025011A external-priority patent/JP5076526B2/ja
Publication of JP2008191351A publication Critical patent/JP2008191351A/ja
Publication of JP2008191351A5 publication Critical patent/JP2008191351A5/ja
Application granted granted Critical
Publication of JP5076526B2 publication Critical patent/JP5076526B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2007025011A 2007-02-05 2007-02-05 光学反射素子 Expired - Fee Related JP5076526B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007025011A JP5076526B2 (ja) 2007-02-05 2007-02-05 光学反射素子

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007025011A JP5076526B2 (ja) 2007-02-05 2007-02-05 光学反射素子

Publications (3)

Publication Number Publication Date
JP2008191351A JP2008191351A (ja) 2008-08-21
JP2008191351A5 true JP2008191351A5 (enExample) 2010-03-04
JP5076526B2 JP5076526B2 (ja) 2012-11-21

Family

ID=39751521

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007025011A Expired - Fee Related JP5076526B2 (ja) 2007-02-05 2007-02-05 光学反射素子

Country Status (1)

Country Link
JP (1) JP5076526B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5405792B2 (ja) * 2008-10-01 2014-02-05 株式会社ニデック 形状可変ミラー
JP6049364B2 (ja) * 2012-09-11 2016-12-21 スタンレー電気株式会社 光偏向器
JP5654158B1 (ja) * 2014-05-07 2015-01-14 株式会社トライフォース・マネジメント 可動反射素子および二次元走査装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4984117B2 (ja) * 2006-07-13 2012-07-25 スタンレー電気株式会社 ２次元光スキャナ、それを用いた光学装置および２次元光スキャナの製造方法

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