JP2008039810A5 - - Google Patents

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Publication number
JP2008039810A5
JP2008039810A5 JP2006209659A JP2006209659A JP2008039810A5 JP 2008039810 A5 JP2008039810 A5 JP 2008039810A5 JP 2006209659 A JP2006209659 A JP 2006209659A JP 2006209659 A JP2006209659 A JP 2006209659A JP 2008039810 A5 JP2008039810 A5 JP 2008039810A5
Authority
JP
Japan
Prior art keywords
electrode
optical reflecting
flexible substrate
optical
provided above
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2006209659A
Other languages
English (en)
Japanese (ja)
Other versions
JP2008039810A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2006209659A priority Critical patent/JP2008039810A/ja
Priority claimed from JP2006209659A external-priority patent/JP2008039810A/ja
Priority to US12/304,004 priority patent/US8054523B2/en
Priority to PCT/JP2007/064332 priority patent/WO2008015922A1/ja
Publication of JP2008039810A publication Critical patent/JP2008039810A/ja
Publication of JP2008039810A5 publication Critical patent/JP2008039810A5/ja
Pending legal-status Critical Current

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JP2006209659A 2006-08-01 2006-08-01 光学反射素子 Pending JP2008039810A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2006209659A JP2008039810A (ja) 2006-08-01 2006-08-01 光学反射素子
US12/304,004 US8054523B2 (en) 2006-08-01 2007-07-20 Optical reflection device
PCT/JP2007/064332 WO2008015922A1 (en) 2006-08-01 2007-07-20 Optical reflective device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006209659A JP2008039810A (ja) 2006-08-01 2006-08-01 光学反射素子

Publications (2)

Publication Number Publication Date
JP2008039810A JP2008039810A (ja) 2008-02-21
JP2008039810A5 true JP2008039810A5 (enExample) 2009-08-27

Family

ID=38997102

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006209659A Pending JP2008039810A (ja) 2006-08-01 2006-08-01 光学反射素子

Country Status (3)

Country Link
US (1) US8054523B2 (enExample)
JP (1) JP2008039810A (enExample)
WO (1) WO2008015922A1 (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5262613B2 (ja) * 2008-11-20 2013-08-14 パナソニック株式会社 光学反射素子
US8886206B2 (en) 2009-05-01 2014-11-11 Digimarc Corporation Methods and systems for content processing
EP2525422A1 (de) * 2011-05-16 2012-11-21 Bayer Material Science AG Verfahren zum Betreiben eines Bauteils
JP2013200337A (ja) * 2012-03-23 2013-10-03 Stanley Electric Co Ltd 光偏向器
JP5916577B2 (ja) * 2012-09-26 2016-05-11 富士フイルム株式会社 ミラー駆動装置及びその駆動方法
US11221478B2 (en) * 2019-04-15 2022-01-11 Microsoft Technology Licensing, Llc MEMS scanner

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6345525A (ja) * 1986-08-13 1988-02-26 Tohoku Electric Power Co Inc ボイラ用圧力検出管の異物付着防止装置
JPH0345525U (enExample) * 1989-09-12 1991-04-26
US5701192A (en) * 1995-05-26 1997-12-23 Daewoo Electronics Co., Ltd. Thin film actuated mirror array and method of manufacturing the same
JPH09185000A (ja) 1995-12-28 1997-07-15 Sony Corp ミラーディバイス
JPH11168246A (ja) * 1997-09-30 1999-06-22 Matsushita Electric Ind Co Ltd 圧電アクチュエータ、赤外線センサおよび圧電光偏向器
JPH11281908A (ja) 1998-03-27 1999-10-15 Toshiba Corp ポリゴンミラースキャナ用モータ
JP4552606B2 (ja) * 2004-11-10 2010-09-29 パナソニック株式会社 圧電アクチュエータおよびこれを用いた光線掃引装置
JP4574396B2 (ja) * 2005-03-02 2010-11-04 キヤノン株式会社 光偏向器
US7136215B1 (en) * 2005-05-18 2006-11-14 Avago Technologies Fiber Ip (Singapore) Pte. Ltd. Piezoelectrically-activated cantilevered spatial light modulator

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