JP2008261838A5 - - Google Patents

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Publication number
JP2008261838A5
JP2008261838A5 JP2007304936A JP2007304936A JP2008261838A5 JP 2008261838 A5 JP2008261838 A5 JP 2008261838A5 JP 2007304936 A JP2007304936 A JP 2007304936A JP 2007304936 A JP2007304936 A JP 2007304936A JP 2008261838 A5 JP2008261838 A5 JP 2008261838A5
Authority
JP
Japan
Prior art keywords
vibrator
actuator
detection sensor
sensor according
vibration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2007304936A
Other languages
English (en)
Japanese (ja)
Other versions
JP2008261838A (ja
JP5019120B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2007304936A priority Critical patent/JP5019120B2/ja
Priority claimed from JP2007304936A external-priority patent/JP5019120B2/ja
Priority to CN200880005713.XA priority patent/CN101617208B/zh
Priority to PCT/JP2008/053793 priority patent/WO2008114603A1/ja
Publication of JP2008261838A publication Critical patent/JP2008261838A/ja
Priority to US12/555,221 priority patent/US8336367B2/en
Publication of JP2008261838A5 publication Critical patent/JP2008261838A5/ja
Application granted granted Critical
Publication of JP5019120B2 publication Critical patent/JP5019120B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2007304936A 2007-03-16 2007-11-26 検出センサ Expired - Fee Related JP5019120B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2007304936A JP5019120B2 (ja) 2007-03-16 2007-11-26 検出センサ
CN200880005713.XA CN101617208B (zh) 2007-03-16 2008-03-03 检测传感器、振子
PCT/JP2008/053793 WO2008114603A1 (ja) 2007-03-16 2008-03-03 検出センサ、振動子
US12/555,221 US8336367B2 (en) 2007-03-16 2009-09-08 Detection sensor, vibrator

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2007068570 2007-03-16
JP2007068570 2007-03-16
JP2007304936A JP5019120B2 (ja) 2007-03-16 2007-11-26 検出センサ

Publications (3)

Publication Number Publication Date
JP2008261838A JP2008261838A (ja) 2008-10-30
JP2008261838A5 true JP2008261838A5 (enExample) 2010-07-01
JP5019120B2 JP5019120B2 (ja) 2012-09-05

Family

ID=39984409

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007304936A Expired - Fee Related JP5019120B2 (ja) 2007-03-16 2007-11-26 検出センサ

Country Status (3)

Country Link
US (1) US8336367B2 (enExample)
JP (1) JP5019120B2 (enExample)
CN (1) CN101617208B (enExample)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5419767B2 (ja) * 2010-03-24 2014-02-19 オリンパス株式会社 検出センサ、物質検出方法
CN102269615B (zh) * 2011-05-07 2012-11-14 大连理工大学 一种基于槽型悬臂梁结构的微质量传感器
JP5690207B2 (ja) * 2011-05-11 2015-03-25 ルネサスエレクトロニクス株式会社 半導体装置
US20130047710A1 (en) * 2011-08-26 2013-02-28 Purdue Research Foundation Nonlinear, bifurcation-based mass sensor
US9695036B1 (en) 2012-02-02 2017-07-04 Sitime Corporation Temperature insensitive resonant elements and oscillators and methods of designing and manufacturing same
JP6086347B2 (ja) * 2013-02-16 2017-03-01 国立大学法人信州大学 共振型質量センサ
US9705470B1 (en) 2014-02-09 2017-07-11 Sitime Corporation Temperature-engineered MEMS resonator
US9712128B2 (en) 2014-02-09 2017-07-18 Sitime Corporation Microelectromechanical resonator
CN104001660B (zh) * 2014-04-29 2016-05-25 国家电网公司 吸附式压电激励振子
US10676349B1 (en) 2016-08-12 2020-06-09 Sitime Corporation MEMS resonator
JP6863009B2 (ja) * 2017-03-31 2021-04-21 Ｉ−Ｐｅｘ株式会社 物質検出素子
JP6871823B2 (ja) * 2017-08-10 2021-05-12 ヤンマーパワーテクノロジー株式会社 果実生育監視システム、及び果実生育監視方法
KR102471291B1 (ko) 2018-09-27 2022-11-25 아이펙스 가부시키가이샤 물질 검출 소자
JP2023111668A (ja) * 2022-01-31 2023-08-10 太陽誘電株式会社 検出装置
KR20240029443A (ko) * 2022-08-26 2024-03-05 삼성전자주식회사 센서 장치 및 센서 장치의 작동 방법

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2849697B2 (ja) 1993-03-12 1999-01-20 工業技術院長 ２自由度振動型マイクロアクチュエータ
JPH10282130A (ja) 1997-04-01 1998-10-23 Canon Inc プローブとそれを用いた走査型プローブ顕微鏡
WO1999013518A1 (fr) 1997-09-08 1999-03-18 Ngk Insulators, Ltd. Dispositif piezoelectrique/electrostrictif
JPH11113920A (ja) * 1997-10-13 1999-04-27 Yasuto Takeuchi 多周波調和振動を用いる超音波手術装置
JP2000180250A (ja) * 1998-10-09 2000-06-30 Ngk Insulators Ltd 質量センサ及び質量検出方法
JP3744913B2 (ja) * 2003-03-20 2006-02-15 株式会社オーバル 渦流量計センサ及び渦流量計
JP2004297951A (ja) * 2003-03-27 2004-10-21 Olympus Corp 超音波振動子及び超音波モータ
JP2006071371A (ja) 2004-08-31 2006-03-16 Kyoto Univ カンチレバーおよびその利用

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