JP2012145493A5 - - Google Patents

Download PDF

Info

Publication number
JP2012145493A5
JP2012145493A5 JP2011004998A JP2011004998A JP2012145493A5 JP 2012145493 A5 JP2012145493 A5 JP 2012145493A5 JP 2011004998 A JP2011004998 A JP 2011004998A JP 2011004998 A JP2011004998 A JP 2011004998A JP 2012145493 A5 JP2012145493 A5 JP 2012145493A5
Authority
JP
Japan
Prior art keywords
axis
movable mass
movable
arm
physical quantity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2011004998A
Other languages
English (en)
Japanese (ja)
Other versions
JP5790915B2 (ja
JP2012145493A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2011004998A priority Critical patent/JP5790915B2/ja
Priority claimed from JP2011004998A external-priority patent/JP5790915B2/ja
Publication of JP2012145493A publication Critical patent/JP2012145493A/ja
Publication of JP2012145493A5 publication Critical patent/JP2012145493A5/ja
Application granted granted Critical
Publication of JP5790915B2 publication Critical patent/JP5790915B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2011004998A 2011-01-13 2011-01-13 物理量センサー及び電子機器 Active JP5790915B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2011004998A JP5790915B2 (ja) 2011-01-13 2011-01-13 物理量センサー及び電子機器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011004998A JP5790915B2 (ja) 2011-01-13 2011-01-13 物理量センサー及び電子機器

Publications (3)

Publication Number Publication Date
JP2012145493A JP2012145493A (ja) 2012-08-02
JP2012145493A5 true JP2012145493A5 (enExample) 2014-02-27
JP5790915B2 JP5790915B2 (ja) 2015-10-07

Family

ID=46789182

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011004998A Active JP5790915B2 (ja) 2011-01-13 2011-01-13 物理量センサー及び電子機器

Country Status (1)

Country Link
JP (1) JP5790915B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6176001B2 (ja) * 2012-11-29 2017-08-09 株式会社デンソー ジャイロセンサ
US10809061B2 (en) 2016-01-27 2020-10-20 Hitachi, Ltd. Vibratory gyroscope including a plurality of inertial bodies
EP3916354B1 (en) * 2020-05-25 2024-04-03 Murata Manufacturing Co., Ltd. Gyroscope with peripheral detection

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9621873D0 (en) * 1996-10-21 1996-12-11 British Tech Group A solid state,multi-axis gyroscope
US6892575B2 (en) * 2003-10-20 2005-05-17 Invensense Inc. X-Y axis dual-mass tuning fork gyroscope with vertically integrated electronics and wafer-scale hermetic packaging
KR20090052832A (ko) * 2006-03-10 2009-05-26 콘티넨탈 테베스 아게 운트 코. 오하게 커플링 바를 구비한 회전 속도 센서
EP1994363A1 (de) * 2006-03-10 2008-11-26 Contitemic Microelectronic GmbH Mikromechanischer drehratensensor
WO2009107573A1 (ja) * 2008-02-25 2009-09-03 アルプス電気株式会社 角速度センサ
DE102008002748A1 (de) * 2008-06-27 2009-12-31 Sensordynamics Ag Mikro-Gyroskop

Similar Documents

Publication Publication Date Title
JP5639087B2 (ja) ｘ，ｙおよび／またはｚ軸周りの回転運動を検出するためのＭＥＭＳジャイロスコープ
JP2012173055A5 (enExample)
JP3645141B2 (ja) 三次元コーム加振構造物及びこれを採用した慣性感知センサーとアクチュエータ
JP2011196823A5 (ja) ジャイロ素子、ジャイロセンサー、および電子機器
EP2489981A3 (en) Angular velocity sensor and electronic device
JP2013253958A5 (enExample)
JP2014182133A5 (enExample)
JP6091738B2 (ja) 回転速度センサ
JP6190587B2 (ja) マイクロメカニクスによるコリオリ式回転速度センサ
JP2014062753A5 (enExample)
JP2014138413A5 (enExample)
JP2015184124A5 (enExample)
JP2012145493A5 (enExample)
JP2011199661A5 (enExample)
JP2013192013A5 (enExample)
JP2013238437A5 (enExample)
TWI708042B (zh) 微機械旋轉速率感測器及其操作方法
JP2016176891A5 (enExample)
JP6330501B2 (ja) 振動型角速度センサ
CN102192734B (zh) 转速传感器装置和得到转速的方法
JP2011017581A5 (enExample)
CN106233091B (zh) 具有环形弹簧的三轴微陀螺仪
JP5790915B2 (ja) 物理量センサー及び電子機器
JP2012220461A5 (enExample)
WO2019017277A1 (ja) 振動型角速度センサ