JP5790915B2 - 物理量センサー及び電子機器 - Google Patents

物理量センサー及び電子機器 Download PDF

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Publication number
JP5790915B2
JP5790915B2 JP2011004998A JP2011004998A JP5790915B2 JP 5790915 B2 JP5790915 B2 JP 5790915B2 JP 2011004998 A JP2011004998 A JP 2011004998A JP 2011004998 A JP2011004998 A JP 2011004998A JP 5790915 B2 JP5790915 B2 JP 5790915B2
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Japan
Prior art keywords
axis
movable mass
movable
arm
vibration
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Expired - Fee Related
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JP2011004998A
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Japanese (ja)
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JP2012145493A5 (enExample
JP2012145493A (ja
Inventor
照夫 瀧澤
照夫 瀧澤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
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Seiko Epson Corp
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JP2011004998A 2011-01-13 2011-01-13 物理量センサー及び電子機器 Expired - Fee Related JP5790915B2 (ja)

Priority Applications (1)

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JP2011004998A JP5790915B2 (ja) 2011-01-13 2011-01-13 物理量センサー及び電子機器

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Application Number Priority Date Filing Date Title
JP2011004998A JP5790915B2 (ja) 2011-01-13 2011-01-13 物理量センサー及び電子機器

Publications (3)

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JP2012145493A JP2012145493A (ja) 2012-08-02
JP2012145493A5 JP2012145493A5 (enExample) 2014-02-27
JP5790915B2 true JP5790915B2 (ja) 2015-10-07

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JP2011004998A Expired - Fee Related JP5790915B2 (ja) 2011-01-13 2011-01-13 物理量センサー及び電子機器

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Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6176001B2 (ja) * 2012-11-29 2017-08-09 株式会社デンソー ジャイロセンサ
JP6514790B2 (ja) * 2016-01-27 2019-05-15 株式会社日立製作所 ジャイロスコープ
JP7151819B2 (ja) * 2020-05-25 2022-10-12 株式会社村田製作所 周囲検出を備えたジャイロスコープ

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9621873D0 (en) * 1996-10-21 1996-12-11 British Tech Group A solid state,multi-axis gyroscope
US6892575B2 (en) * 2003-10-20 2005-05-17 Invensense Inc. X-Y axis dual-mass tuning fork gyroscope with vertically integrated electronics and wafer-scale hermetic packaging
US8261614B2 (en) * 2006-03-10 2012-09-11 Continental Teves Ag & Co. Ohg Rotational speed sensor having a coupling bar
US8342022B2 (en) * 2006-03-10 2013-01-01 Conti Temic Microelectronic Gmbh Micromechanical rotational speed sensor
WO2009107573A1 (ja) * 2008-02-25 2009-09-03 アルプス電気株式会社 角速度センサ
DE102008002748A1 (de) * 2008-06-27 2009-12-31 Sensordynamics Ag Mikro-Gyroskop

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JP2012145493A (ja) 2012-08-02

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