JP2012220461A5 - - Google Patents

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Publication number
JP2012220461A5
JP2012220461A5 JP2011089833A JP2011089833A JP2012220461A5 JP 2012220461 A5 JP2012220461 A5 JP 2012220461A5 JP 2011089833 A JP2011089833 A JP 2011089833A JP 2011089833 A JP2011089833 A JP 2011089833A JP 2012220461 A5 JP2012220461 A5 JP 2012220461A5
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JP
Japan
Prior art keywords
acceleration detector
detector according
acceleration
movable
plan
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2011089833A
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English (en)
Japanese (ja)
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JP2012220461A (ja
JP5712755B2 (ja
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Publication date
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Priority to JP2011089833A priority Critical patent/JP5712755B2/ja
Priority claimed from JP2011089833A external-priority patent/JP5712755B2/ja
Publication of JP2012220461A publication Critical patent/JP2012220461A/ja
Publication of JP2012220461A5 publication Critical patent/JP2012220461A5/ja
Application granted granted Critical
Publication of JP5712755B2 publication Critical patent/JP5712755B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2011089833A 2011-04-14 2011-04-14 加速度検出器、加速度検出デバイス及び電子機器 Active JP5712755B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2011089833A JP5712755B2 (ja) 2011-04-14 2011-04-14 加速度検出器、加速度検出デバイス及び電子機器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011089833A JP5712755B2 (ja) 2011-04-14 2011-04-14 加速度検出器、加速度検出デバイス及び電子機器

Publications (3)

Publication Number Publication Date
JP2012220461A JP2012220461A (ja) 2012-11-12
JP2012220461A5 true JP2012220461A5 (enExample) 2014-03-20
JP5712755B2 JP5712755B2 (ja) 2015-05-07

Family

ID=47272106

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011089833A Active JP5712755B2 (ja) 2011-04-14 2011-04-14 加速度検出器、加速度検出デバイス及び電子機器

Country Status (1)

Country Link
JP (1) JP5712755B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10175092B2 (en) 2015-06-30 2019-01-08 Nikkiso Cryo Inc. Cryogenic vibration sensor and insulator pad assembly, and cryogenic pumps including the same
JP6897187B2 (ja) * 2017-03-16 2021-06-30 セイコーエプソン株式会社 物理量検出器、物理量検出デバイス、電子機器および移動体
JP6939475B2 (ja) * 2017-11-28 2021-09-22 セイコーエプソン株式会社 物理量センサー、物理量センサーデバイス、複合センサーデバイス、慣性計測装置、移動体測位装置、携帯型電子機器、電子機器および移動体

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2627592B1 (fr) * 1988-02-22 1990-07-27 Sagem Accelerometre pendulaire non asservi a poutre resonante
FR2666887A1 (fr) * 1990-09-17 1992-03-20 Asulab Sa Capteur de mesure d'une grandeur physique.
JPH05283713A (ja) * 1992-03-31 1993-10-29 Mitsubishi Electric Corp 半導体センサ
JPH06232421A (ja) * 1993-01-30 1994-08-19 Nippon Seiki Co Ltd 加速度センサ
JP3473115B2 (ja) * 1994-07-04 2003-12-02 株式会社村田製作所 加速度センサ
US6145380A (en) * 1997-12-18 2000-11-14 Alliedsignal Silicon micro-machined accelerometer using integrated electrical and mechanical packaging

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