JP2013164278A5 - - Google Patents
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- JP2013164278A5 JP2013164278A5 JP2012026082A JP2012026082A JP2013164278A5 JP 2013164278 A5 JP2013164278 A5 JP 2013164278A5 JP 2012026082 A JP2012026082 A JP 2012026082A JP 2012026082 A JP2012026082 A JP 2012026082A JP 2013164278 A5 JP2013164278 A5 JP 2013164278A5
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- JP
- Japan
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- physical quantity
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- Prior art date
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- 238000001514 detection method Methods 0.000 claims 5
- 239000000853 adhesive Substances 0.000 claims 4
- 230000001070 adhesive effect Effects 0.000 claims 4
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012026082A JP2013164278A (ja) | 2012-02-09 | 2012-02-09 | 物理量検出器、物理量検出デバイス、電子機器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012026082A JP2013164278A (ja) | 2012-02-09 | 2012-02-09 | 物理量検出器、物理量検出デバイス、電子機器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2013164278A JP2013164278A (ja) | 2013-08-22 |
| JP2013164278A5 true JP2013164278A5 (enExample) | 2015-03-26 |
Family
ID=49175713
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012026082A Withdrawn JP2013164278A (ja) | 2012-02-09 | 2012-02-09 | 物理量検出器、物理量検出デバイス、電子機器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2013164278A (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7769558B2 (ja) | 2021-05-12 | 2025-11-13 | 浜松ホトニクス株式会社 | 圧電ユニット及びアクチュエータ装置 |
| US12527227B2 (en) | 2021-05-12 | 2026-01-13 | Hamamatsu Photonics K.K. | Actuator device |
| JP7696305B2 (ja) * | 2021-05-12 | 2025-06-20 | 浜松ホトニクス株式会社 | アクチュエータ装置 |
| US12514123B2 (en) | 2021-05-12 | 2025-12-30 | Hamamatsu Photonics K.K. | Actuator device and actuator system |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002098709A (ja) * | 2000-09-26 | 2002-04-05 | Matsushita Electric Works Ltd | 半導体加速度センサ |
| JP2006153519A (ja) * | 2004-11-25 | 2006-06-15 | Matsushita Electric Works Ltd | 加速度センサ |
| JP2006250760A (ja) * | 2005-03-11 | 2006-09-21 | Omron Corp | センサ |
| JP5446175B2 (ja) * | 2008-09-02 | 2014-03-19 | セイコーエプソン株式会社 | 振動型センサ |
| JP2010181210A (ja) * | 2009-02-03 | 2010-08-19 | Epson Toyocom Corp | 加速度センサ |
| JP2010271169A (ja) * | 2009-05-21 | 2010-12-02 | Seiko Epson Corp | 物理量検出装置、手ぶれ補正装置及びカメラ |
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2012
- 2012-02-09 JP JP2012026082A patent/JP2013164278A/ja not_active Withdrawn