JP2014085233A5 - - Google Patents

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Publication number
JP2014085233A5
JP2014085233A5 JP2012234484A JP2012234484A JP2014085233A5 JP 2014085233 A5 JP2014085233 A5 JP 2014085233A5 JP 2012234484 A JP2012234484 A JP 2012234484A JP 2012234484 A JP2012234484 A JP 2012234484A JP 2014085233 A5 JP2014085233 A5 JP 2014085233A5
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Japan
Prior art keywords
physical quantity
quantity detection
base
detection device
detection element
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JP2012234484A
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English (en)
Japanese (ja)
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JP2014085233A (ja
JP6070056B2 (ja
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Priority claimed from JP2012234484A external-priority patent/JP6070056B2/ja
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Publication of JP2014085233A5 publication Critical patent/JP2014085233A5/ja
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Publication of JP6070056B2 publication Critical patent/JP6070056B2/ja
Expired - Fee Related legal-status Critical Current
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JP2012234484A 2012-10-24 2012-10-24 物理量検出デバイス、物理量検出器、電子機器、及び移動体 Expired - Fee Related JP6070056B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2012234484A JP6070056B2 (ja) 2012-10-24 2012-10-24 物理量検出デバイス、物理量検出器、電子機器、及び移動体

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012234484A JP6070056B2 (ja) 2012-10-24 2012-10-24 物理量検出デバイス、物理量検出器、電子機器、及び移動体

Publications (3)

Publication Number Publication Date
JP2014085233A JP2014085233A (ja) 2014-05-12
JP2014085233A5 true JP2014085233A5 (enExample) 2015-12-03
JP6070056B2 JP6070056B2 (ja) 2017-02-01

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JP2012234484A Expired - Fee Related JP6070056B2 (ja) 2012-10-24 2012-10-24 物理量検出デバイス、物理量検出器、電子機器、及び移動体

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JP (1) JP6070056B2 (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019145683A (ja) 2018-02-21 2019-08-29 セイコーエプソン株式会社 電子回路基板、加速度センサー、傾斜計、慣性航法装置、構造物監視装置及び移動体
JP2019158476A (ja) 2018-03-09 2019-09-19 セイコーエプソン株式会社 物理量センサーデバイス、物理量センサーデバイスを用いた傾斜計、慣性計測装置、構造物監視装置、及び移動体
JP7087479B2 (ja) 2018-03-09 2022-06-21 セイコーエプソン株式会社 物理量センサー、物理量センサーデバイス、物理量センサーデバイスを用いた傾斜計、慣性計測装置、構造物監視装置、及び移動体
JP2019184453A (ja) 2018-04-12 2019-10-24 セイコーエプソン株式会社 センサーユニットおよび構造物監視装置
JP2020067330A (ja) 2018-10-23 2020-04-30 セイコーエプソン株式会社 慣性センサーユニットの取り付け方法、および慣性センサーユニット
JP7331468B2 (ja) * 2019-05-31 2023-08-23 セイコーエプソン株式会社 慣性センサーユニットの取り付け方法、および慣性センサーユニット

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009085808A (ja) * 2007-10-01 2009-04-23 Epson Toyocom Corp 加速度センサ及び加速度測定装置
JP2010226420A (ja) * 2009-03-24 2010-10-07 Seiko Epson Corp 圧電デバイス
US8176617B2 (en) * 2010-03-31 2012-05-15 Honeywell International Inc. Methods for making a sensitive resonating beam accelerometer

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