JP2014085232A5 - - Google Patents

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Publication number
JP2014085232A5
JP2014085232A5 JP2012234483A JP2012234483A JP2014085232A5 JP 2014085232 A5 JP2014085232 A5 JP 2014085232A5 JP 2012234483 A JP2012234483 A JP 2012234483A JP 2012234483 A JP2012234483 A JP 2012234483A JP 2014085232 A5 JP2014085232 A5 JP 2014085232A5
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JP
Japan
Prior art keywords
physical quantity
quantity detection
width
plan
detection device
Prior art date
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Application number
JP2012234483A
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English (en)
Japanese (ja)
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JP2014085232A (ja
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Priority to JP2012234483A priority Critical patent/JP2014085232A/ja
Priority claimed from JP2012234483A external-priority patent/JP2014085232A/ja
Publication of JP2014085232A publication Critical patent/JP2014085232A/ja
Publication of JP2014085232A5 publication Critical patent/JP2014085232A5/ja
Withdrawn legal-status Critical Current

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JP2012234483A 2012-10-24 2012-10-24 物理量検出デバイス、物理量検出器、電子機器、及び移動体 Withdrawn JP2014085232A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2012234483A JP2014085232A (ja) 2012-10-24 2012-10-24 物理量検出デバイス、物理量検出器、電子機器、及び移動体

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012234483A JP2014085232A (ja) 2012-10-24 2012-10-24 物理量検出デバイス、物理量検出器、電子機器、及び移動体

Publications (2)

Publication Number Publication Date
JP2014085232A JP2014085232A (ja) 2014-05-12
JP2014085232A5 true JP2014085232A5 (enExample) 2015-12-03

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ID=50788416

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012234483A Withdrawn JP2014085232A (ja) 2012-10-24 2012-10-24 物理量検出デバイス、物理量検出器、電子機器、及び移動体

Country Status (1)

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JP (1) JP2014085232A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7087479B2 (ja) 2018-03-09 2022-06-21 セイコーエプソン株式会社 物理量センサー、物理量センサーデバイス、物理量センサーデバイスを用いた傾斜計、慣性計測装置、構造物監視装置、及び移動体
JP7735705B2 (ja) * 2021-07-28 2025-09-09 セイコーエプソン株式会社 物理量センサーデバイス

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4609196B2 (ja) * 2005-06-20 2011-01-12 セイコーエプソン株式会社 圧電振動片および圧電デバイスならびに電子機器および携帯電話装置
JP2011038889A (ja) * 2009-08-11 2011-02-24 Seiko Epson Corp 物理量検出装置

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