JP2013019745A5 - - Google Patents
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- Publication number
- JP2013019745A5 JP2013019745A5 JP2011152731A JP2011152731A JP2013019745A5 JP 2013019745 A5 JP2013019745 A5 JP 2013019745A5 JP 2011152731 A JP2011152731 A JP 2011152731A JP 2011152731 A JP2011152731 A JP 2011152731A JP 2013019745 A5 JP2013019745 A5 JP 2013019745A5
- Authority
- JP
- Japan
- Prior art keywords
- protrusion
- sensor
- sensor device
- mounting substrate
- pedestal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 12
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 10
- 238000001514 detection method Methods 0.000 claims description 5
- 230000001133 acceleration Effects 0.000 claims 1
- 239000000945 filler Substances 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 claims 1
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011152731A JP5845669B2 (ja) | 2011-07-11 | 2011-07-11 | センサーデバイスおよび電子機器 |
| US13/543,098 US9250260B2 (en) | 2011-07-11 | 2012-07-06 | Sensor device, and electronic apparatus |
| CN201210237741.2A CN102879597B (zh) | 2011-07-11 | 2012-07-09 | 传感器装置以及电子设备 |
| US14/982,700 US9541397B2 (en) | 2011-07-11 | 2015-12-29 | Sensor device, and electronic apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011152731A JP5845669B2 (ja) | 2011-07-11 | 2011-07-11 | センサーデバイスおよび電子機器 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015229382A Division JP6179579B2 (ja) | 2015-11-25 | 2015-11-25 | センサーデバイスおよび電子機器 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2013019745A JP2013019745A (ja) | 2013-01-31 |
| JP2013019745A5 true JP2013019745A5 (enExample) | 2014-08-21 |
| JP5845669B2 JP5845669B2 (ja) | 2016-01-20 |
Family
ID=47480995
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011152731A Expired - Fee Related JP5845669B2 (ja) | 2011-07-11 | 2011-07-11 | センサーデバイスおよび電子機器 |
Country Status (3)
| Country | Link |
|---|---|
| US (2) | US9250260B2 (enExample) |
| JP (1) | JP5845669B2 (enExample) |
| CN (1) | CN102879597B (enExample) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9551730B2 (en) * | 2014-07-02 | 2017-01-24 | Merlin Technology, Inc. | Mechanical shock resistant MEMS accelerometer arrangement, associated method, apparatus and system |
| CN106662446B (zh) | 2014-07-16 | 2019-10-25 | 精工爱普生株式会社 | 传感器单元、电子设备以及移动体 |
| JP6506034B2 (ja) * | 2015-01-29 | 2019-04-24 | 京セラ株式会社 | 電子素子実装用基板および電子装置 |
| JP2020101484A (ja) * | 2018-12-25 | 2020-07-02 | セイコーエプソン株式会社 | 慣性センサー、電子機器および移動体 |
| US11340254B2 (en) * | 2019-09-30 | 2022-05-24 | Seiko Epson Corporation | Inertial measurement unit having a sensor unit that is detachable from a substrate |
| JP7552377B2 (ja) * | 2021-01-20 | 2024-09-18 | セイコーエプソン株式会社 | センサーモジュール |
| JPWO2022239347A1 (enExample) * | 2021-05-12 | 2022-11-17 | ||
| JP2024042245A (ja) * | 2022-09-15 | 2024-03-28 | セイコーエプソン株式会社 | 慣性計測装置 |
Family Cites Families (29)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5241861A (en) * | 1991-02-08 | 1993-09-07 | Sundstrand Corporation | Micromachined rate and acceleration sensor |
| JPH05340960A (ja) | 1992-06-09 | 1993-12-24 | Hitachi Ltd | 多次元加速度センサ |
| JPH07306047A (ja) | 1994-05-10 | 1995-11-21 | Murata Mfg Co Ltd | 多軸検出型振動ジャイロ |
| JP3780086B2 (ja) | 1998-01-22 | 2006-05-31 | Ｎｅｃトーキン株式会社 | 姿勢角度検出装置 |
| JPH11289141A (ja) | 1998-04-02 | 1999-10-19 | Toshiba Corp | 回路基板及びその製造方法 |
| DE19858621C2 (de) | 1998-12-18 | 2001-02-01 | Autoflug Gmbh | Verfahren zum Verbessern der Meßwerte eines inertialen Meßsystems |
| US6216537B1 (en) * | 1999-03-31 | 2001-04-17 | Medtronic, Inc. | Accelerometer for implantable medical device |
| JP2001102746A (ja) | 1999-09-30 | 2001-04-13 | Sony Corp | 回路装置とその製造方法 |
| JP2002009228A (ja) | 2000-06-20 | 2002-01-11 | Seiko Epson Corp | 半導体装置 |
| US6545865B2 (en) * | 2001-07-13 | 2003-04-08 | International Business Machines Corporation | Shock mount for a device packaged in a portable cartridge |
| DE10134620A1 (de) * | 2001-07-17 | 2003-02-06 | Bosch Gmbh Robert | Mehraxiales Inertialsensorsystem und Verfahren zu seiner Herstellung |
| US7040922B2 (en) * | 2003-06-05 | 2006-05-09 | Analog Devices, Inc. | Multi-surface mounting member and electronic device |
| JP2005197493A (ja) | 2004-01-08 | 2005-07-21 | Ihi Aerospace Co Ltd | 回路基板組立体 |
| JP2006112856A (ja) | 2004-10-13 | 2006-04-27 | Seiko Epson Corp | センサ素子基板、センサ素子基板の製造方法、センサ |
| JP4428210B2 (ja) | 2004-11-22 | 2010-03-10 | パナソニック電工株式会社 | 物理量センサの実装構造 |
| US7778043B2 (en) * | 2005-02-28 | 2010-08-17 | Jason Rosenblatt | Flush mounted assembly for housing an ambient air abnormal condition sensor module |
| JP2006337196A (ja) * | 2005-06-02 | 2006-12-14 | Kayaba Ind Co Ltd | 多軸加速度検出装置 |
| US7536909B2 (en) | 2006-01-20 | 2009-05-26 | Memsic, Inc. | Three-dimensional multi-chips and tri-axial sensors and methods of manufacturing the same |
| JP2007285977A (ja) * | 2006-04-19 | 2007-11-01 | Fujitsu Media Device Kk | 角速度センサ |
| JP2008109378A (ja) | 2006-10-25 | 2008-05-08 | Matsushita Electric Ind Co Ltd | 光学デバイスモジュールとその製造方法および光学デバイスユニットとその製造方法 |
| JP4714665B2 (ja) * | 2006-11-20 | 2011-06-29 | パナソニック株式会社 | 光学デバイスモジュール及びその製造方法 |
| US7291023B1 (en) | 2006-11-21 | 2007-11-06 | Autoliv Asp, Inc. | Electric vehicle motion sensor |
| FR2910129B1 (fr) * | 2006-12-15 | 2009-07-10 | Skf Ab | Dispositif de palier a roulement instrumente |
| JP2008256570A (ja) * | 2007-04-05 | 2008-10-23 | Fujitsu Media Device Kk | 角速度センサ |
| CN100476358C (zh) | 2007-08-06 | 2009-04-08 | 北京航空航天大学 | 一种mems陀螺仪的精密安装基准体组件及其安装方法 |
| WO2009028680A1 (ja) * | 2007-08-30 | 2009-03-05 | Nec Corporation | 最適擬似ランダム系列決定方法、位置検出システム、位置検出方法、送信装置及び受信装置 |
| US20090056446A1 (en) * | 2007-09-05 | 2009-03-05 | Cluff Charles A | Multiple-axis sensor package and method of assembly |
| US7933128B2 (en) * | 2007-10-10 | 2011-04-26 | Epson Toyocom Corporation | Electronic device, electronic module, and methods for manufacturing the same |
| US8100010B2 (en) * | 2008-04-14 | 2012-01-24 | Honeywell International Inc. | Method and system for forming an electronic assembly having inertial sensors mounted thereto |
-
2011
- 2011-07-11 JP JP2011152731A patent/JP5845669B2/ja not_active Expired - Fee Related
-
2012
- 2012-07-06 US US13/543,098 patent/US9250260B2/en active Active
- 2012-07-09 CN CN201210237741.2A patent/CN102879597B/zh active Active
-
2015
- 2015-12-29 US US14/982,700 patent/US9541397B2/en active Active