JP2015149591A5 - - Google Patents

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Publication number
JP2015149591A5
JP2015149591A5 JP2014021140A JP2014021140A JP2015149591A5 JP 2015149591 A5 JP2015149591 A5 JP 2015149591A5 JP 2014021140 A JP2014021140 A JP 2014021140A JP 2014021140 A JP2014021140 A JP 2014021140A JP 2015149591 A5 JP2015149591 A5 JP 2015149591A5
Authority
JP
Japan
Prior art keywords
vibrating
arm
groove
outer edge
along
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2014021140A
Other languages
English (en)
Japanese (ja)
Other versions
JP2015149591A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2014021140A priority Critical patent/JP2015149591A/ja
Priority claimed from JP2014021140A external-priority patent/JP2015149591A/ja
Priority to KR1020140032680A priority patent/KR20140118792A/ko
Priority to US14/220,656 priority patent/US9257959B2/en
Priority to CN201810478898.1A priority patent/CN108768338A/zh
Priority to CN201810116361.0A priority patent/CN108183698B/zh
Priority to CN201410116475.7A priority patent/CN104079263B/zh
Publication of JP2015149591A publication Critical patent/JP2015149591A/ja
Publication of JP2015149591A5 publication Critical patent/JP2015149591A5/ja
Withdrawn legal-status Critical Current

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JP2014021140A 2013-03-29 2014-02-06 振動素子、振動子、発振器、電子機器、センサー、および移動体 Withdrawn JP2015149591A (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2014021140A JP2015149591A (ja) 2014-02-06 2014-02-06 振動素子、振動子、発振器、電子機器、センサー、および移動体
KR1020140032680A KR20140118792A (ko) 2013-03-29 2014-03-20 진동 소자, 진동자, 발진기, 전자 기기, 센서, 및 이동체
US14/220,656 US9257959B2 (en) 2013-03-29 2014-03-20 Resonator element, resonator, oscillator, electronic apparatus, sensor, and moving object
CN201810478898.1A CN108768338A (zh) 2013-03-29 2014-03-26 振动元件、振子、振荡器、电子设备、传感器以及移动体
CN201810116361.0A CN108183698B (zh) 2013-03-29 2014-03-26 振动元件、振子、振荡器、电子设备、传感器以及移动体
CN201410116475.7A CN104079263B (zh) 2013-03-29 2014-03-26 振动元件、振子、振荡器、电子设备、传感器以及移动体

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014021140A JP2015149591A (ja) 2014-02-06 2014-02-06 振動素子、振動子、発振器、電子機器、センサー、および移動体

Publications (2)

Publication Number Publication Date
JP2015149591A JP2015149591A (ja) 2015-08-20
JP2015149591A5 true JP2015149591A5 (enExample) 2017-02-16

Family

ID=53892652

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014021140A Withdrawn JP2015149591A (ja) 2013-03-29 2014-02-06 振動素子、振動子、発振器、電子機器、センサー、および移動体

Country Status (1)

Country Link
JP (1) JP2015149591A (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6409194B1 (ja) * 2017-07-18 2018-10-24 有限会社ピエデック技術研究所 圧電ユニットと圧電発振器
JP6318418B1 (ja) 2017-07-24 2018-05-09 有限会社ピエデック技術研究所 圧電振動子、圧電ユニット、圧電発振器と電子機器
WO2019240176A1 (ja) 2018-06-13 2019-12-19 京セラ株式会社 センサ素子および角速度センサ
JP2021013132A (ja) * 2019-07-09 2021-02-04 セイコーエプソン株式会社 振動素子、振動子、電子機器、及び移動体

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4301201B2 (ja) * 2005-04-27 2009-07-22 セイコーエプソン株式会社 圧電発振器
JP2009164775A (ja) * 2007-12-28 2009-07-23 Nippon Dempa Kogyo Co Ltd 圧電フレーム及び圧電デバイス
JP2012023428A (ja) * 2010-07-12 2012-02-02 Seiko Epson Corp 振動片、振動子及び発振器
JP5592812B2 (ja) * 2011-01-27 2014-09-17 エスアイアイ・クリスタルテクノロジー株式会社 圧電振動片、圧電振動子、発振器、電子機器、および電波時計
JP5910287B2 (ja) * 2012-04-25 2016-04-27 セイコーエプソン株式会社 振動片、振動子、発振器および電子機器
JP6087527B2 (ja) * 2012-07-13 2017-03-01 リバーエレテック株式会社 音叉型水晶振動子
JP6119134B2 (ja) * 2012-07-19 2017-04-26 セイコーエプソン株式会社 振動片、振動子、発振器および電子機器

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