JP2016044978A5 - - Google Patents

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Publication number
JP2016044978A5
JP2016044978A5 JP2014166925A JP2014166925A JP2016044978A5 JP 2016044978 A5 JP2016044978 A5 JP 2016044978A5 JP 2014166925 A JP2014166925 A JP 2014166925A JP 2014166925 A JP2014166925 A JP 2014166925A JP 2016044978 A5 JP2016044978 A5 JP 2016044978A5
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JP
Japan
Prior art keywords
physical quantity
quantity sensor
substrate
mass part
fixed electrode
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JP2014166925A
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English (en)
Japanese (ja)
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JP2016044978A (ja
JP6655281B2 (ja
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Priority to JP2014166925A priority Critical patent/JP6655281B2/ja
Priority claimed from JP2014166925A external-priority patent/JP6655281B2/ja
Priority to US14/816,162 priority patent/US20160054353A1/en
Priority to CN201510505681.1A priority patent/CN105371831A/zh
Publication of JP2016044978A publication Critical patent/JP2016044978A/ja
Publication of JP2016044978A5 publication Critical patent/JP2016044978A5/ja
Application granted granted Critical
Publication of JP6655281B2 publication Critical patent/JP6655281B2/ja
Active legal-status Critical Current
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JP2014166925A 2014-08-19 2014-08-19 物理量センサー、電子機器および移動体 Active JP6655281B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2014166925A JP6655281B2 (ja) 2014-08-19 2014-08-19 物理量センサー、電子機器および移動体
US14/816,162 US20160054353A1 (en) 2014-08-19 2015-08-03 Physical quantity sensor, electronic device, and mobile body
CN201510505681.1A CN105371831A (zh) 2014-08-19 2015-08-17 物理量传感器、电子设备以及移动体

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014166925A JP6655281B2 (ja) 2014-08-19 2014-08-19 物理量センサー、電子機器および移動体

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2018231194A Division JP6766861B2 (ja) 2018-12-10 2018-12-10 物理量センサー、電子機器および移動体

Publications (3)

Publication Number Publication Date
JP2016044978A JP2016044978A (ja) 2016-04-04
JP2016044978A5 true JP2016044978A5 (enExample) 2017-09-28
JP6655281B2 JP6655281B2 (ja) 2020-02-26

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ID=55348119

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JP2014166925A Active JP6655281B2 (ja) 2014-08-19 2014-08-19 物理量センサー、電子機器および移動体

Country Status (3)

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US (1) US20160054353A1 (enExample)
JP (1) JP6655281B2 (enExample)
CN (1) CN105371831A (enExample)

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JP6485260B2 (ja) * 2015-07-10 2019-03-20 セイコーエプソン株式会社 物理量センサー、物理量センサー装置、電子機器および移動体
JP2019045170A (ja) * 2017-08-30 2019-03-22 セイコーエプソン株式会社 物理量センサー、複合センサー、慣性計測ユニット、携帯型電子機器、電子機器及び移動体
JP2019045171A (ja) 2017-08-30 2019-03-22 セイコーエプソン株式会社 物理量センサー、複合センサー、慣性計測ユニット、携帯型電子機器、電子機器及び移動体
JP2019045172A (ja) 2017-08-30 2019-03-22 セイコーエプソン株式会社 物理量センサー、複合センサー、慣性計測ユニット、携帯型電子機器、電子機器及び移動体
JP7139661B2 (ja) * 2018-04-02 2022-09-21 セイコーエプソン株式会社 物理量センサー、物理量センサーデバイス、複合センサーデバイス、慣性計測装置、電子機器および移動体
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US12162747B2 (en) * 2018-12-03 2024-12-10 X-Celeprint Limited Enclosed cavity structures
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WO2020195386A1 (ja) * 2019-03-27 2020-10-01 パナソニックＩｐマネジメント株式会社 物理量センサ
JP7694182B2 (ja) * 2021-06-17 2025-06-18 セイコーエプソン株式会社 慣性センサー及び慣性計測装置

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