JP2017507106A5 - - Google Patents
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- Publication number
- JP2017507106A5 JP2017507106A5 JP2016553412A JP2016553412A JP2017507106A5 JP 2017507106 A5 JP2017507106 A5 JP 2017507106A5 JP 2016553412 A JP2016553412 A JP 2016553412A JP 2016553412 A JP2016553412 A JP 2016553412A JP 2017507106 A5 JP2017507106 A5 JP 2017507106A5
- Authority
- JP
- Japan
- Prior art keywords
- ceramic element
- glass
- case
- present
- mass
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002241 glass-ceramic Substances 0.000 description 7
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2020033238A JP6899938B2 (ja) | 2014-02-21 | 2020-02-28 | 高均一性ガラスセラミック素子 |
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102014002253.6 | 2014-02-21 | ||
| DE102014002253.6A DE102014002253A1 (de) | 2014-02-21 | 2014-02-21 | Hochhomogene Glaskeramikkomponente |
| DE102014211700.3 | 2014-06-18 | ||
| DE102014211700 | 2014-06-18 | ||
| PCT/EP2015/053576 WO2015124710A1 (en) | 2014-02-21 | 2015-02-20 | Highly homogeneous glass-ceramic component |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2020033238A Division JP6899938B2 (ja) | 2014-02-21 | 2020-02-28 | 高均一性ガラスセラミック素子 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2017507106A JP2017507106A (ja) | 2017-03-16 |
| JP2017507106A5 true JP2017507106A5 (enExample) | 2019-11-14 |
| JP7038473B2 JP7038473B2 (ja) | 2022-03-18 |
Family
ID=52544500
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016553412A Active JP7038473B2 (ja) | 2014-02-21 | 2015-02-20 | 高均一性ガラスセラミック素子 |
| JP2020033238A Active JP6899938B2 (ja) | 2014-02-21 | 2020-02-28 | 高均一性ガラスセラミック素子 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2020033238A Active JP6899938B2 (ja) | 2014-02-21 | 2020-02-28 | 高均一性ガラスセラミック素子 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US11465933B2 (enExample) |
| EP (1) | EP3107871B1 (enExample) |
| JP (2) | JP7038473B2 (enExample) |
| CN (1) | CN106029594B (enExample) |
| RU (1) | RU2681015C2 (enExample) |
| WO (1) | WO2015124710A1 (enExample) |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106029594B (zh) | 2014-02-21 | 2022-06-24 | 肖特股份有限公司 | 高均匀性玻璃陶瓷部件 |
| CN106981458B (zh) * | 2017-03-24 | 2020-05-22 | 武汉利之达科技股份有限公司 | 一种含腔体结构的三维陶瓷基板及其制备方法 |
| DE102018111144A1 (de) | 2017-05-26 | 2018-11-29 | Schott Ag | Präzisionskomponente |
| CN108181244A (zh) * | 2017-11-30 | 2018-06-19 | 彩虹(合肥)液晶玻璃有限公司 | 一种测定tft-lcd液晶基板玻璃配合料均匀度的方法 |
| US11167375B2 (en) | 2018-08-10 | 2021-11-09 | The Research Foundation For The State University Of New York | Additive manufacturing processes and additively manufactured products |
| DE102022105930A1 (de) * | 2021-03-16 | 2022-09-22 | Schott Ag | Glaskeramik mit spezifischem thermischen Ausdehnungsverhalten |
| WO2022194846A1 (de) | 2021-03-16 | 2022-09-22 | Schott Ag | Euvl-präzisionskomponente mit spezifischem thermischen ausdehnungsverhalten |
| CN113200678B (zh) * | 2021-03-18 | 2022-06-10 | 常熟佳合显示科技有限公司 | 一种玻璃材料及其制备方法和其制品 |
| DE102022122790A1 (de) | 2021-09-08 | 2023-03-09 | Schott Ag | Glaskeramik sowie Verfahren zur Herstellung einer Glaskeramik |
| DE102021125476A1 (de) | 2021-09-30 | 2023-03-30 | Schott Ag | Verfahren zum Modifizieren zumindest eines Bereichs einer Oberfläche oder eines Abschnittes eines Substrates und Substrat |
| DE102022123616A1 (de) | 2022-09-15 | 2024-03-21 | Schott Ag | Glaskeramik mit spezifischem thermischen Ausdehnungsverhalten |
| DE102024109304A1 (de) | 2024-04-03 | 2025-10-09 | Schott Ag | Isotherm langzeitstabile Glaskeramikkomponente |
| DE102024113731A1 (de) | 2024-05-16 | 2025-11-20 | Schott Ag | Glaskeramik mit spezifischem thermischen Ausdehnungsverhalten |
Family Cites Families (35)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL6808826A (enExample) | 1967-07-01 | 1969-01-03 | ||
| DE1902432B2 (de) | 1967-07-01 | 1976-10-14 | Jenaer Glaswerk Schott & Gen., 6500 Mainz | Transparente glaskeramiken mit einem thermischen ausdehnungskoeffizienten von 0 + 1,5 mal 10 hoch -7 /grad c der im bereich von -30 bis + 70 grad c wenig temperaturabhaengig ist |
| US4172712A (en) * | 1976-05-19 | 1979-10-30 | Dart Industries Inc. | Glass batch wetting and mixing apparatus |
| GB2159514B (en) | 1984-05-23 | 1987-12-02 | Zeiss Stiftung | Glass ceramic with specific thermal expansion behaviour |
| JP2516537B2 (ja) * | 1992-09-14 | 1996-07-24 | 株式会社オハラ | 低膨張透明結晶化ガラス |
| JP2668057B2 (ja) | 1994-09-13 | 1997-10-27 | 株式会社オハラ | 低膨張透明ガラスセラミックス |
| EP1296904A1 (en) * | 2000-06-20 | 2003-04-02 | Schott Glass Technologies, Inc. | Glass ceramic composites |
| US20030125184A1 (en) * | 2001-12-21 | 2003-07-03 | Schott Glas | Glass ceramic product with variably adjustable zero crossing of the CTE-T curve |
| US20050003262A1 (en) * | 2003-07-02 | 2005-01-06 | Rajiv Doshi | Solid-state fuel cell and related method of manufacture |
| JP4412952B2 (ja) * | 2003-09-19 | 2010-02-10 | 株式会社オハラ | 極低膨張透明ガラスセラミックス |
| DE102004008824B4 (de) * | 2004-02-20 | 2006-05-04 | Schott Ag | Glaskeramik mit geringer Wärmeausdehnung sowie deren Verwendung |
| JP4513486B2 (ja) * | 2004-10-01 | 2010-07-28 | 旭硝子株式会社 | TiO2を含有するシリカガラスの製造方法 |
| DE102004052514B4 (de) * | 2004-10-21 | 2009-03-26 | Schott Ag | Verfahren und Form zum Gießen von Glasblöcken |
| JP4933863B2 (ja) * | 2005-10-25 | 2012-05-16 | 株式会社オハラ | 結晶化ガラスおよび結晶化ガラスの製造方法 |
| JP4976058B2 (ja) | 2006-06-06 | 2012-07-18 | 株式会社オハラ | 結晶化ガラスおよび結晶化ガラスの製造方法 |
| JP4977406B2 (ja) | 2006-06-06 | 2012-07-18 | 株式会社オハラ | 結晶化ガラス及び結晶化ガラスの製造方法 |
| JP5428323B2 (ja) * | 2007-12-27 | 2014-02-26 | 旭硝子株式会社 | TiO2を含有するシリカガラス |
| JP5470703B2 (ja) * | 2007-12-27 | 2014-04-16 | 旭硝子株式会社 | Euvl用光学部材およびその表面処理方法 |
| FR2932897B1 (fr) * | 2008-06-20 | 2010-07-30 | Europ De Systemes Optiques Soc | Procede de faconnage d'un element optique aspherique |
| JP2010135732A (ja) * | 2008-08-01 | 2010-06-17 | Asahi Glass Co Ltd | Euvマスクブランクス用基板 |
| JP5187060B2 (ja) * | 2008-08-13 | 2013-04-24 | 旭硝子株式会社 | Euvリソグラフィ用反射型マスクの製造方法 |
| DE202008017803U1 (de) * | 2008-10-07 | 2010-08-12 | Schott Ag | Transparente, eingefärbte Kochfläche mit verbesserter farbiger Anzeigefähigkeit |
| DE102009011850B3 (de) | 2009-03-05 | 2010-11-25 | Schott Ag | Verfahren zum umweltfreundlichen Schmelzen und Läutern einer Glasschmelze für ein Ausgangsglas einer Lithium-Aluminium-Silikat(LAS)-Glaskeramik sowie deren Verwendung |
| DE102009043680A1 (de) * | 2009-09-30 | 2011-03-31 | Heraeus Quarzglas Gmbh & Co. Kg | Rohling aus Titan-dotiertem, hochkieselsäurehaltigem Glas für ein Spiegelsubstrat für den Einsatz in der EUV-Lithographie und Verfahren für seine Herstellung |
| JP5650387B2 (ja) * | 2009-09-30 | 2015-01-07 | 株式会社オハラ | 結晶化ガラス |
| JP5762677B2 (ja) * | 2009-09-30 | 2015-08-12 | 株式会社オハラ | 結晶化ガラスの製造方法 |
| EP2343586A1 (en) | 2009-12-30 | 2011-07-13 | Nederlandse Organisatie voor toegepast -natuurwetenschappelijk onderzoek TNO | Shape stabilized mirror module and method to stabilize a reflective element. |
| US8767174B2 (en) * | 2010-02-18 | 2014-07-01 | Nikon Corporation | Temperature-controlled holding devices for planar articles |
| WO2011105517A1 (ja) * | 2010-02-24 | 2011-09-01 | 国立大学法人東北大学 | 超低膨張ガラスの製造方法 |
| DE102010028488A1 (de) * | 2010-05-03 | 2011-11-03 | Carl Zeiss Smt Gmbh | Substrate für Spiegel für die EUV-Lithographie und deren Herstellung |
| DE102011008953B4 (de) | 2011-01-19 | 2020-08-20 | Schott Ag | Substrat mit Leichtgewichtsstruktur |
| FR2977010B1 (fr) * | 2011-06-27 | 2013-07-12 | Sunpartner Sas | Concentrateur solaire comprenant un heliostat et une lentille de fresnel |
| EP2881374B1 (en) | 2013-12-09 | 2017-09-27 | Schott AG | Component for low-temperature applications |
| CN106029594B (zh) | 2014-02-21 | 2022-06-24 | 肖特股份有限公司 | 高均匀性玻璃陶瓷部件 |
| US10377675B2 (en) * | 2016-05-31 | 2019-08-13 | Goodrich Corporation | High temperature oxidation protection for composites |
-
2015
- 2015-02-20 CN CN201580009500.4A patent/CN106029594B/zh active Active
- 2015-02-20 EP EP15705614.4A patent/EP3107871B1/en active Active
- 2015-02-20 RU RU2016137478A patent/RU2681015C2/ru active
- 2015-02-20 WO PCT/EP2015/053576 patent/WO2015124710A1/en not_active Ceased
- 2015-02-20 JP JP2016553412A patent/JP7038473B2/ja active Active
-
2016
- 2016-08-22 US US15/243,078 patent/US11465933B2/en active Active
-
2020
- 2020-02-28 JP JP2020033238A patent/JP6899938B2/ja active Active
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