CN106029594B - 高均匀性玻璃陶瓷部件 - Google Patents

高均匀性玻璃陶瓷部件 Download PDF

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Publication number
CN106029594B
CN106029594B CN201580009500.4A CN201580009500A CN106029594B CN 106029594 B CN106029594 B CN 106029594B CN 201580009500 A CN201580009500 A CN 201580009500A CN 106029594 B CN106029594 B CN 106029594B
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China
Prior art keywords
glass
ceramic
cte
weight
component according
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CN201580009500.4A
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English (en)
Chinese (zh)
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CN106029594A (zh
Inventor
R·让达齐克
S·戈恩
T·利夫卡
J·费德尔
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Schott AG
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Schott AG
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Priority claimed from DE102014002253.6A external-priority patent/DE102014002253A1/de
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Publication of CN106029594A publication Critical patent/CN106029594A/zh
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    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C10/00—Devitrified glass ceramics, i.e. glass ceramics having a crystalline phase dispersed in a glassy phase and constituting at least 50% by weight of the total composition
    • C03C10/0018—Devitrified glass ceramics, i.e. glass ceramics having a crystalline phase dispersed in a glassy phase and constituting at least 50% by weight of the total composition containing SiO2, Al2O3 and monovalent metal oxide as main constituents
    • C03C10/0027—Devitrified glass ceramics, i.e. glass ceramics having a crystalline phase dispersed in a glassy phase and constituting at least 50% by weight of the total composition containing SiO2, Al2O3 and monovalent metal oxide as main constituents containing SiO2, Al2O3, Li2O as main constituents
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B32/00—Thermal after-treatment of glass products not provided for in groups C03B19/00, C03B25/00 - C03B31/00 or C03B37/00, e.g. crystallisation, eliminating gas inclusions or other impurities; Hot-pressing vitrified, non-porous, shaped glass products
    • C03B32/02—Thermal crystallisation, e.g. for crystallising glass bodies into glass-ceramic articles
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C1/00—Ingredients generally applicable to manufacture of glasses, glazes, or vitreous enamels
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C3/00—Glass compositions
    • C03C3/04—Glass compositions containing silica
    • C03C3/076—Glass compositions containing silica with 40% to 90% silica, by weight
    • C03C3/097—Glass compositions containing silica with 40% to 90% silica, by weight containing phosphorus, niobium or tantalum
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/181—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/22—Masks or mask blanks for imaging by radiation of 100nm or shorter wavelength, e.g. X-ray masks, extreme ultraviolet [EUV] masks; Preparation thereof
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/60—Substrates
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2204/00—Glasses, glazes or enamels with special properties

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Ceramic Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Thermal Sciences (AREA)
  • Optics & Photonics (AREA)
  • Dispersion Chemistry (AREA)
  • Glass Compositions (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
CN201580009500.4A 2014-02-21 2015-02-20 高均匀性玻璃陶瓷部件 Active CN106029594B (zh)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
DE102014002253.6 2014-02-21
DE102014002253.6A DE102014002253A1 (de) 2014-02-21 2014-02-21 Hochhomogene Glaskeramikkomponente
DE102014211700.3 2014-06-18
DE102014211700 2014-06-18
PCT/EP2015/053576 WO2015124710A1 (en) 2014-02-21 2015-02-20 Highly homogeneous glass-ceramic component

Publications (2)

Publication Number Publication Date
CN106029594A CN106029594A (zh) 2016-10-12
CN106029594B true CN106029594B (zh) 2022-06-24

Family

ID=52544500

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201580009500.4A Active CN106029594B (zh) 2014-02-21 2015-02-20 高均匀性玻璃陶瓷部件

Country Status (6)

Country Link
US (1) US11465933B2 (enExample)
EP (1) EP3107871B1 (enExample)
JP (2) JP7038473B2 (enExample)
CN (1) CN106029594B (enExample)
RU (1) RU2681015C2 (enExample)
WO (1) WO2015124710A1 (enExample)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2681015C2 (ru) 2014-02-21 2019-03-01 Шотт Аг Высокооднородная стеклокерамическая деталь
CN106981458B (zh) * 2017-03-24 2020-05-22 武汉利之达科技股份有限公司 一种含腔体结构的三维陶瓷基板及其制备方法
DE102018111144A1 (de) 2017-05-26 2018-11-29 Schott Ag Präzisionskomponente
CN108181244A (zh) * 2017-11-30 2018-06-19 彩虹（合肥）液晶玻璃有限公司 一种测定tft-lcd液晶基板玻璃配合料均匀度的方法
US11167375B2 (en) 2018-08-10 2021-11-09 The Research Foundation For The State University Of New York Additive manufacturing processes and additively manufactured products
EP4059903B1 (en) 2021-03-16 2023-08-30 Schott Ag Glass ceramic having specific thermal expansion characteristics
JP2024511361A (ja) 2021-03-16 2024-03-13 ショット アクチエンゲゼルシャフト 特定の熱膨張挙動を示す精密部品
CN113200678B (zh) * 2021-03-18 2022-06-10 常熟佳合显示科技有限公司 一种玻璃材料及其制备方法和其制品
DE102022122790A1 (de) 2021-09-08 2023-03-09 Schott Ag Glaskeramik sowie Verfahren zur Herstellung einer Glaskeramik
DE102021125476A1 (de) 2021-09-30 2023-03-30 Schott Ag Verfahren zum Modifizieren zumindest eines Bereichs einer Oberfläche oder eines Abschnittes eines Substrates und Substrat
DE102022123616A1 (de) 2022-09-15 2024-03-21 Schott Ag Glaskeramik mit spezifischem thermischen Ausdehnungsverhalten
DE102024109304A1 (de) 2024-04-03 2025-10-09 Schott Ag Isotherm langzeitstabile Glaskeramikkomponente
DE102024113731A1 (de) 2024-05-16 2025-11-20 Schott Ag Glaskeramik mit spezifischem thermischen Ausdehnungsverhalten

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1657462A (zh) * 2004-02-20 2005-08-24 肖特股份有限公司 具有低热膨胀的玻璃陶瓷
CN100482607C (zh) * 2003-09-19 2009-04-29 株式会社小原 超低热膨胀透明玻璃陶瓷

Family Cites Families (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1902432B2 (de) 1967-07-01 1976-10-14 Jenaer Glaswerk Schott & Gen., 6500 Mainz Transparente glaskeramiken mit einem thermischen ausdehnungskoeffizienten von 0 + 1,5 mal 10 hoch -7 /grad c der im bereich von -30 bis + 70 grad c wenig temperaturabhaengig ist
NL6808826A (enExample) 1967-07-01 1969-01-03
US4172712A (en) * 1976-05-19 1979-10-30 Dart Industries Inc. Glass batch wetting and mixing apparatus
GB2159514B (en) 1984-05-23 1987-12-02 Zeiss Stiftung Glass ceramic with specific thermal expansion behaviour
JP2516537B2 (ja) * 1992-09-14 1996-07-24 株式会社オハラ 低膨張透明結晶化ガラス
JP2668057B2 (ja) 1994-09-13 1997-10-27 株式会社オハラ 低膨張透明ガラスセラミックス
JP2003535807A (ja) * 2000-06-20 2003-12-02 ショット、グラス、テクノロジーズ、インコーポレイテッド ガラスセラミック複合材
US20030125184A1 (en) * 2001-12-21 2003-07-03 Schott Glas Glass ceramic product with variably adjustable zero crossing of the CTE-T curve
US20050003262A1 (en) * 2003-07-02 2005-01-06 Rajiv Doshi Solid-state fuel cell and related method of manufacture
JP4513486B2 (ja) * 2004-10-01 2010-07-28 旭硝子株式会社 ＴｉＯ２を含有するシリカガラスの製造方法
DE102004052514B4 (de) * 2004-10-21 2009-03-26 Schott Ag Verfahren und Form zum Gießen von Glasblöcken
JP4933863B2 (ja) * 2005-10-25 2012-05-16 株式会社オハラ 結晶化ガラスおよび結晶化ガラスの製造方法
JP4976058B2 (ja) 2006-06-06 2012-07-18 株式会社オハラ 結晶化ガラスおよび結晶化ガラスの製造方法
JP4977406B2 (ja) 2006-06-06 2012-07-18 株式会社オハラ 結晶化ガラス及び結晶化ガラスの製造方法
JP5428323B2 (ja) * 2007-12-27 2014-02-26 旭硝子株式会社 ＴｉＯ２を含有するシリカガラス
JP5470703B2 (ja) * 2007-12-27 2014-04-16 旭硝子株式会社 Ｅｕｖｌ用光学部材およびその表面処理方法
FR2932897B1 (fr) * 2008-06-20 2010-07-30 Europ De Systemes Optiques Soc Procede de faconnage d'un element optique aspherique
JP2010135732A (ja) 2008-08-01 2010-06-17 Asahi Glass Co Ltd Ｅｕｖマスクブランクス用基板
JP5187060B2 (ja) * 2008-08-13 2013-04-24 旭硝子株式会社 Ｅｕｖリソグラフィ用反射型マスクの製造方法
DE102008050263C5 (de) * 2008-10-07 2020-01-02 Schott Ag Transparente, eingefärbte Kochfläche mit verbesserter farbiger Anzeigefähigkeit und Verfahren zur Herstellung einer solchen Kochfläche
DE102009011850B3 (de) 2009-03-05 2010-11-25 Schott Ag Verfahren zum umweltfreundlichen Schmelzen und Läutern einer Glasschmelze für ein Ausgangsglas einer Lithium-Aluminium-Silikat(LAS)-Glaskeramik sowie deren Verwendung
DE102009043680A1 (de) * 2009-09-30 2011-03-31 Heraeus Quarzglas Gmbh & Co. Kg Rohling aus Titan-dotiertem, hochkieselsäurehaltigem Glas für ein Spiegelsubstrat für den Einsatz in der EUV-Lithographie und Verfahren für seine Herstellung
JP5650387B2 (ja) * 2009-09-30 2015-01-07 株式会社オハラ 結晶化ガラス
JP5762677B2 (ja) * 2009-09-30 2015-08-12 株式会社オハラ 結晶化ガラスの製造方法
EP2343586A1 (en) 2009-12-30 2011-07-13 Nederlandse Organisatie voor toegepast -natuurwetenschappelijk onderzoek TNO Shape stabilized mirror module and method to stabilize a reflective element.
US8767174B2 (en) * 2010-02-18 2014-07-01 Nikon Corporation Temperature-controlled holding devices for planar articles
WO2011105517A1 (ja) * 2010-02-24 2011-09-01 国立大学法人東北大学 超低膨張ガラスの製造方法
DE102010028488A1 (de) * 2010-05-03 2011-11-03 Carl Zeiss Smt Gmbh Substrate für Spiegel für die EUV-Lithographie und deren Herstellung
DE102011008953B4 (de) 2011-01-19 2020-08-20 Schott Ag Substrat mit Leichtgewichtsstruktur
FR2977010B1 (fr) * 2011-06-27 2013-07-12 Sunpartner Sas Concentrateur solaire comprenant un heliostat et une lentille de fresnel
EP2881374B1 (en) 2013-12-09 2017-09-27 Schott AG Component for low-temperature applications
RU2681015C2 (ru) 2014-02-21 2019-03-01 Шотт Аг Высокооднородная стеклокерамическая деталь
US10377675B2 (en) * 2016-05-31 2019-08-13 Goodrich Corporation High temperature oxidation protection for composites

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100482607C (zh) * 2003-09-19 2009-04-29 株式会社小原 超低热膨胀透明玻璃陶瓷
CN1657462A (zh) * 2004-02-20 2005-08-24 肖特股份有限公司 具有低热膨胀的玻璃陶瓷

Also Published As

Publication number Publication date
JP2017507106A (ja) 2017-03-16
RU2016137478A (ru) 2018-03-28
CN106029594A (zh) 2016-10-12
WO2015124710A1 (en) 2015-08-27
JP7038473B2 (ja) 2022-03-18
EP3107871B1 (en) 2023-08-30
JP6899938B2 (ja) 2021-07-07
US11465933B2 (en) 2022-10-11
RU2016137478A3 (enExample) 2018-09-14
JP2020111502A (ja) 2020-07-27
EP3107871A1 (en) 2016-12-28
RU2681015C2 (ru) 2019-03-01
US20160355433A1 (en) 2016-12-08

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