JP2014092500A5 - - Google Patents

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Publication number
JP2014092500A5
JP2014092500A5 JP2012244182A JP2012244182A JP2014092500A5 JP 2014092500 A5 JP2014092500 A5 JP 2014092500A5 JP 2012244182 A JP2012244182 A JP 2012244182A JP 2012244182 A JP2012244182 A JP 2012244182A JP 2014092500 A5 JP2014092500 A5 JP 2014092500A5
Authority
JP
Japan
Prior art keywords
resonator element
element according
adjustment film
vibrating
vibration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2012244182A
Other languages
English (en)
Japanese (ja)
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JP2014092500A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2012244182A priority Critical patent/JP2014092500A/ja
Priority claimed from JP2012244182A external-priority patent/JP2014092500A/ja
Publication of JP2014092500A publication Critical patent/JP2014092500A/ja
Publication of JP2014092500A5 publication Critical patent/JP2014092500A5/ja
Withdrawn legal-status Critical Current

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JP2012244182A 2012-11-06 2012-11-06 振動片、振動子、電子デバイス、電子機器、および移動体 Withdrawn JP2014092500A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2012244182A JP2014092500A (ja) 2012-11-06 2012-11-06 振動片、振動子、電子デバイス、電子機器、および移動体

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012244182A JP2014092500A (ja) 2012-11-06 2012-11-06 振動片、振動子、電子デバイス、電子機器、および移動体

Publications (2)

Publication Number Publication Date
JP2014092500A JP2014092500A (ja) 2014-05-19
JP2014092500A5 true JP2014092500A5 (enExample) 2015-11-12

Family

ID=50936655

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012244182A Withdrawn JP2014092500A (ja) 2012-11-06 2012-11-06 振動片、振動子、電子デバイス、電子機器、および移動体

Country Status (1)

Country Link
JP (1) JP2014092500A (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2558392B (en) * 2016-12-27 2021-08-04 Honeywell Int Inc MEMS Sensors with selectively adjusted damping of suspension
US10822225B2 (en) 2016-12-27 2020-11-03 Honeywell International Inc. MEMS sensors with selectively adjusted damping of suspension
JP6848589B2 (ja) * 2017-03-28 2021-03-24 セイコーエプソン株式会社 振動素子の周波数調整方法、振動素子の製造方法および振動素子

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE9800194D0 (sv) * 1998-01-23 1998-01-23 Gert Andersson Anordning för mätning av vinkelhastighet
JP4062335B2 (ja) * 2004-01-27 2008-03-19 株式会社村田製作所 圧電共振部品の周波数調整方法
JP2006105614A (ja) * 2004-09-30 2006-04-20 Seiko Epson Corp 振動型ジャイロスコープ、及び振動型ジャイロスコープの製造方法
JP5528337B2 (ja) * 2008-10-16 2014-06-25 シチズンホールディングス株式会社 水晶振動子の製造方法

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