SE9800194D0 - Anordning för mätning av vinkelhastighet - Google Patents

Anordning för mätning av vinkelhastighet

Info

Publication number
SE9800194D0
SE9800194D0 SE9800194A SE9800194A SE9800194D0 SE 9800194 D0 SE9800194 D0 SE 9800194D0 SE 9800194 A SE9800194 A SE 9800194A SE 9800194 A SE9800194 A SE 9800194A SE 9800194 D0 SE9800194 D0 SE 9800194D0
Authority
SE
Sweden
Prior art keywords
connecting bar
inertia mass
angular velocity
arms
plane
Prior art date
Application number
SE9800194A
Other languages
English (en)
Inventor
Nils Hedenstierna
Gert Andersson
Per Svensson
Original Assignee
Gert Andersson
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=20409965&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=SE9800194(D0) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Gert Andersson filed Critical Gert Andersson
Priority to SE9800194A priority Critical patent/SE9800194D0/sv
Publication of SE9800194D0 publication Critical patent/SE9800194D0/sv
Priority to EP04016795A priority patent/EP1467179B1/en
Priority to EP99904007A priority patent/EP1049936B1/en
Priority to JP2000528873A priority patent/JP4223191B2/ja
Priority to US09/600,919 priority patent/US6467349B1/en
Priority to PCT/SE1999/000096 priority patent/WO1999038016A1/en
Priority to AU24469/99A priority patent/AU737306B2/en
Priority to DE69924235T priority patent/DE69924235T2/de
Priority to JP2008261218A priority patent/JP4577671B2/ja

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
    • G01C19/5656—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams the devices involving a micromechanical structure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/574—Structural details or topology the devices having two sensing masses in anti-phase motion
SE9800194A 1998-01-23 1998-01-23 Anordning för mätning av vinkelhastighet SE9800194D0 (sv)

Priority Applications (9)

Application Number Priority Date Filing Date Title
SE9800194A SE9800194D0 (sv) 1998-01-23 1998-01-23 Anordning för mätning av vinkelhastighet
EP04016795A EP1467179B1 (en) 1998-01-23 1999-01-22 An arrangement for measuring angular velocity
EP99904007A EP1049936B1 (en) 1998-01-23 1999-01-22 An arrangement for measuring angular velocity
JP2000528873A JP4223191B2 (ja) 1998-01-23 1999-01-22 角速度測定のための構成
US09/600,919 US6467349B1 (en) 1998-01-23 1999-01-22 Arrangement for measuring angular velocity
PCT/SE1999/000096 WO1999038016A1 (en) 1998-01-23 1999-01-22 An arrangement for measuring angular velocity
AU24469/99A AU737306B2 (en) 1998-01-23 1999-01-22 An arrangement for measuring angular velocity
DE69924235T DE69924235T2 (de) 1998-01-23 1999-01-22 Anordnung zur messung der winkelgeschwindigkeit
JP2008261218A JP4577671B2 (ja) 1998-01-23 2008-10-08 角速度測定のための構成

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE9800194A SE9800194D0 (sv) 1998-01-23 1998-01-23 Anordning för mätning av vinkelhastighet

Publications (1)

Publication Number Publication Date
SE9800194D0 true SE9800194D0 (sv) 1998-01-23

Family

ID=20409965

Family Applications (1)

Application Number Title Priority Date Filing Date
SE9800194A SE9800194D0 (sv) 1998-01-23 1998-01-23 Anordning för mätning av vinkelhastighet

Country Status (7)

Country Link
US (1) US6467349B1 (sv)
EP (2) EP1049936B1 (sv)
JP (2) JP4223191B2 (sv)
AU (1) AU737306B2 (sv)
DE (1) DE69924235T2 (sv)
SE (1) SE9800194D0 (sv)
WO (1) WO1999038016A1 (sv)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6445195B1 (en) * 2000-08-02 2002-09-03 The Charles Stark Draper Laboratory, Inc. Drive feedthrough nulling system
GB2377494B (en) 2001-07-09 2004-07-28 Autoliv Dev "Improvements in or relating to an off-set elimination system for a vibrating gyroscope"
JP2003166999A (ja) * 2001-12-03 2003-06-13 Denso Corp 半導体力学量センサ
US7640803B1 (en) * 2004-05-26 2010-01-05 Siimpel Corporation Micro-electromechanical system inertial sensor
FI116543B (sv) * 2004-12-31 2005-12-15 Vti Technologies Oy En vibrerande mikromekanisk vinkelhastighetssensor
EP1783094A1 (en) * 2005-11-04 2007-05-09 Infineon Technologies SensoNor AS Excitation in micromechanical devices
US20090064783A1 (en) * 2006-01-24 2009-03-12 Matsushita Electric Industrial Co., Ltd. Inertial force sensor
US7975545B2 (en) * 2006-12-08 2011-07-12 Tdk Corporation Angular velocity sensor and angular velocity sensor device
US7813851B2 (en) * 2007-02-21 2010-10-12 Autoliv Asp, Inc. Sensing misalignment detection and estimation system
US7950281B2 (en) * 2007-02-28 2011-05-31 Infineon Technologies Ag Sensor and method for sensing linear acceleration and angular velocity
DE102007011816B4 (de) * 2007-03-12 2013-10-02 Infineon Technologies Ag Sensor und Verfahren zum Erfassen einer Linearbeschleunigung und einer Winkelgeschwindigkeit
CN100439864C (zh) * 2007-06-01 2008-12-03 北京沃尔康科技有限责任公司 一种新型硅微机械陀螺
EP2378246A1 (en) 2010-04-16 2011-10-19 SensoNor Technologies AS MEMS Structure for an Angular Rate Sensor
WO2012081457A1 (ja) * 2010-12-15 2012-06-21 株式会社村田製作所 振動ジャイロ
CN102520203B (zh) * 2011-12-22 2013-06-12 中北大学 基于飞蛾触角导航的仿生三维角速度传感器及其制备方法
JP2014092500A (ja) * 2012-11-06 2014-05-19 Seiko Epson Corp 振動片、振動子、電子デバイス、電子機器、および移動体
DE102012224081A1 (de) * 2012-12-20 2014-06-26 Continental Teves Ag & Co. Ohg Sensor zum Erfassen einer Drehrate eines Objektes
JP6248576B2 (ja) 2013-11-25 2017-12-20 セイコーエプソン株式会社 機能素子、電子機器、および移動体
WO2016097127A1 (en) 2014-12-18 2016-06-23 Acreo Swedish Ict Ab A quadrature compensation method for mems gyroscopes and a gyroscope sensor
EP3034997B1 (en) 2014-12-18 2020-12-16 RISE Research Institutes of Sweden AB Mems gyro
WO2016201413A1 (en) * 2015-06-11 2016-12-15 Georgia Tech Research Corporation Mems inertial measurement apparatus having slanted electrodes for quadrature tuning
US10696541B2 (en) * 2016-05-26 2020-06-30 Honeywell International Inc. Systems and methods for bias suppression in a non-degenerate MEMS sensor
TWI669267B (zh) 2017-04-04 2019-08-21 日商村田製作所股份有限公司 用於角速度的微機械感測器元件

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3744322A (en) * 1970-12-07 1973-07-10 Space Res Corp Angular velocity sensors
US4538461A (en) 1984-01-23 1985-09-03 Piezoelectric Technology Investors, Inc. Vibratory angular rate sensing system
US4598585A (en) 1984-03-19 1986-07-08 The Charles Stark Draper Laboratory, Inc. Planar inertial sensor
GB2198231B (en) * 1986-11-28 1990-06-06 Stc Plc Rotational motion sensor
US5189913A (en) * 1989-03-14 1993-03-02 The State Of Israel, Ministry Of Defence, Rafael Armament Development Authority Apparatus and method for determining the rate of rotation of a moving body
US5329815A (en) 1991-12-19 1994-07-19 Motorola, Inc. Vibration monolithic gyroscope
SE500615C2 (sv) * 1992-12-03 1994-07-25 Gert Andersson Anordning för mätning av kraftkomponenter, förfarande för framställning av dylik samt användning därav.
JPH07159180A (ja) * 1993-12-10 1995-06-23 Japan Aviation Electron Ind Ltd 振動型角速度センサ
GB9416683D0 (en) * 1994-08-18 1994-10-19 British Tech Group Accelerometer
SE9500729L (sv) * 1995-02-27 1996-08-28 Gert Andersson Anordning för mätning av vinkelhastighet i enkristallint material samt förfarande för framställning av sådan
JPH09196682A (ja) * 1996-01-19 1997-07-31 Matsushita Electric Ind Co Ltd 角速度センサと加速度センサ

Also Published As

Publication number Publication date
EP1467179A2 (en) 2004-10-13
JP2009075115A (ja) 2009-04-09
EP1467179B1 (en) 2012-10-10
JP4223191B2 (ja) 2009-02-12
EP1467179A3 (en) 2006-08-16
US6467349B1 (en) 2002-10-22
AU737306B2 (en) 2001-08-16
EP1049936A1 (en) 2000-11-08
JP2002501202A (ja) 2002-01-15
JP4577671B2 (ja) 2010-11-10
WO1999038016A8 (en) 1999-10-21
AU2446999A (en) 1999-08-09
WO1999038016A1 (en) 1999-07-29
DE69924235T2 (de) 2005-09-22
EP1049936B1 (en) 2005-03-16
DE69924235D1 (de) 2005-04-21

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