SE9500729L - Anordning för mätning av vinkelhastighet i enkristallint material samt förfarande för framställning av sådan - Google Patents

Anordning för mätning av vinkelhastighet i enkristallint material samt förfarande för framställning av sådan

Info

Publication number
SE9500729L
SE9500729L SE9500729A SE9500729A SE9500729L SE 9500729 L SE9500729 L SE 9500729L SE 9500729 A SE9500729 A SE 9500729A SE 9500729 A SE9500729 A SE 9500729A SE 9500729 L SE9500729 L SE 9500729L
Authority
SE
Sweden
Prior art keywords
semiconductor substrate
monocrystalline
cantilever beam
monocrystalline semiconductor
making
Prior art date
Application number
SE9500729A
Other languages
English (en)
Other versions
SE9500729D0 (sv
Inventor
Gert Andersson
Original Assignee
Gert Andersson
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Gert Andersson filed Critical Gert Andersson
Priority to SE9500729A priority Critical patent/SE9500729L/sv
Publication of SE9500729D0 publication Critical patent/SE9500729D0/sv
Priority to US08/460,488 priority patent/US5723790A/en
Priority to JP8526196A priority patent/JPH11502614A/ja
Priority to EP96905100A priority patent/EP0812424A1/en
Priority to PCT/SE1996/000249 priority patent/WO1996027135A1/en
Priority to AU48939/96A priority patent/AU4893996A/en
Publication of SE9500729L publication Critical patent/SE9500729L/sv

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
    • G01C19/5656—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams the devices involving a micromechanical structure

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Pressure Sensors (AREA)
  • Gyroscopes (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
SE9500729A 1995-02-27 1995-02-27 Anordning för mätning av vinkelhastighet i enkristallint material samt förfarande för framställning av sådan SE9500729L (sv)

Priority Applications (6)

Application Number Priority Date Filing Date Title
SE9500729A SE9500729L (sv) 1995-02-27 1995-02-27 Anordning för mätning av vinkelhastighet i enkristallint material samt förfarande för framställning av sådan
US08/460,488 US5723790A (en) 1995-02-27 1995-06-02 Monocrystalline accelerometer and angular rate sensor and methods for making and using same
JP8526196A JPH11502614A (ja) 1995-02-27 1996-02-26 単結晶材料における角速度を測定するための装置
EP96905100A EP0812424A1 (en) 1995-02-27 1996-02-26 A device for the measurement of angular rate in monocrystalline material
PCT/SE1996/000249 WO1996027135A1 (en) 1995-02-27 1996-02-26 A device for the measurement of angular rate in monocrystalline material
AU48939/96A AU4893996A (en) 1995-02-27 1996-02-26 A device for the measurement of angular rate in monocrystalline material

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE9500729A SE9500729L (sv) 1995-02-27 1995-02-27 Anordning för mätning av vinkelhastighet i enkristallint material samt förfarande för framställning av sådan

Publications (2)

Publication Number Publication Date
SE9500729D0 SE9500729D0 (sv) 1995-02-27
SE9500729L true SE9500729L (sv) 1996-08-28

Family

ID=20397388

Family Applications (1)

Application Number Title Priority Date Filing Date
SE9500729A SE9500729L (sv) 1995-02-27 1995-02-27 Anordning för mätning av vinkelhastighet i enkristallint material samt förfarande för framställning av sådan

Country Status (6)

Country Link
US (1) US5723790A (sv)
EP (1) EP0812424A1 (sv)
JP (1) JPH11502614A (sv)
AU (1) AU4893996A (sv)
SE (1) SE9500729L (sv)
WO (1) WO1996027135A1 (sv)

Families Citing this family (72)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19649715C2 (de) * 1996-11-30 2001-07-12 Telefunken Microelectron Anordnung zur Messung von Beschleunigungen
JP3311633B2 (ja) * 1997-04-04 2002-08-05 日本碍子株式会社 センサユニット
US6281619B1 (en) * 1997-05-09 2001-08-28 Citizen Watch Co., Ltd. Vibration gyro
SE9800194D0 (sv) 1998-01-23 1998-01-23 Gert Andersson Anordning för mätning av vinkelhastighet
JP3498209B2 (ja) * 1999-10-25 2004-02-16 株式会社村田製作所 外力検知センサ装置
GB0001775D0 (en) * 2000-01-27 2000-03-22 British Aerospace Improvements relating to angular rate sensor devices
DE10004964B4 (de) * 2000-02-04 2010-07-29 Robert Bosch Gmbh Mikromechanische Kappenstruktur
US6571628B1 (en) 2000-10-16 2003-06-03 Institute Of Microelectronics Z-axis accelerometer
FI119159B (sv) * 2003-02-11 2008-08-15 Vti Technologies Oy Kapacitiv accelerationsgivarkonstruktion
WO2005125006A1 (ja) * 2004-06-21 2005-12-29 Citizen Watch Co., Ltd. 水晶デバイス及び水晶デバイスの製造方法
KR100741875B1 (ko) * 2004-09-06 2007-07-23 동부일렉트로닉스 주식회사 Ｃｍｏｓ 이미지 센서 및 그의 제조 방법
US20080276706A1 (en) * 2004-09-27 2008-11-13 Conti Temic Microelectronic Gmbh Rotation Speed Sensor
JP5135683B2 (ja) * 2005-02-28 2013-02-06 ソニー株式会社 振動型ジャイロセンサ及び振動素子の製造方法
WO2006106876A1 (ja) * 2005-03-31 2006-10-12 Octec Inc. 微小構造体のプローブカード、微小構造体の検査装置、検査方法およびコンピュータプログラム
US20070220973A1 (en) * 2005-08-12 2007-09-27 Cenk Acar Multi-axis micromachined accelerometer and rate sensor
EP1783094A1 (en) * 2005-11-04 2007-05-09 Infineon Technologies SensoNor AS Excitation in micromechanical devices
EP1783095A1 (en) * 2005-11-04 2007-05-09 Infineon Technologies SensoNor AS Excitation in micromechanical devices
EP1947420B1 (en) * 2006-01-24 2018-03-07 Panasonic Intellectual Property Management Co., Ltd. Inertial force sensor
US7623414B2 (en) * 2006-02-22 2009-11-24 Westerngeco L.L.C. Particle motion vector measurement in a towed, marine seismic cable
US7466625B2 (en) * 2006-06-23 2008-12-16 Westerngeco L.L.C. Noise estimation in a vector sensing streamer
JP5205725B2 (ja) * 2006-08-21 2013-06-05 パナソニック株式会社 角速度センサ
WO2008023566A1 (fr) * 2006-08-21 2008-02-28 Panasonic Corporation Capteur de vitesse angulaire
TW200827286A (en) * 2006-12-28 2008-07-01 Sunonwealth Electr Mach Ind Co Component layout design for micro scratch drive actuator
US8462109B2 (en) 2007-01-05 2013-06-11 Invensense, Inc. Controlling and accessing content using motion processing on mobile devices
US7934423B2 (en) 2007-12-10 2011-05-03 Invensense, Inc. Vertically integrated 3-axis MEMS angular accelerometer with integrated electronics
US8952832B2 (en) 2008-01-18 2015-02-10 Invensense, Inc. Interfacing application programs and motion sensors of a device
US20090265671A1 (en) * 2008-04-21 2009-10-22 Invensense Mobile devices with motion gesture recognition
US8250921B2 (en) 2007-07-06 2012-08-28 Invensense, Inc. Integrated motion processing unit (MPU) with MEMS inertial sensing and embedded digital electronics
JP2008190931A (ja) * 2007-02-02 2008-08-21 Wacoh Corp 加速度と角速度との双方を検出するセンサ
US7779689B2 (en) * 2007-02-21 2010-08-24 Freescale Semiconductor, Inc. Multiple axis transducer with multiple sensing range capability
US8593907B2 (en) * 2007-03-08 2013-11-26 Westerngeco L.L.C. Technique and system to cancel noise from measurements obtained from a multi-component streamer
US8077543B2 (en) * 2007-04-17 2011-12-13 Dirk-Jan Van Manen Mitigation of noise in marine multicomponent seismic data through the relationship between wavefield components at the free surface
US7676327B2 (en) 2007-04-26 2010-03-09 Westerngeco L.L.C. Method for optimal wave field separation
US8006557B2 (en) * 2007-05-16 2011-08-30 Intellisense Software Corporation Multi-axis sensor
US8397570B2 (en) * 2007-07-24 2013-03-19 Nxp B.V. Multi-axial linear and rotational displacement sensor
US9229128B2 (en) * 2008-08-17 2016-01-05 Westerngeco L.L.C. Estimating and correcting perturbations on seismic particle motion sensors employing seismic source signals
DE102008043796B4 (de) * 2008-11-17 2023-12-21 Robert Bosch Gmbh Drehratensensor
US9304216B2 (en) 2009-02-05 2016-04-05 Westerngeco L.L.C. Seismic acquisition system and technique
US8664951B2 (en) * 2009-03-30 2014-03-04 Honeywell International Inc. MEMS gyroscope magnetic sensitivity reduction
US8710599B2 (en) * 2009-08-04 2014-04-29 Fairchild Semiconductor Corporation Micromachined devices and fabricating the same
US8227879B2 (en) * 2010-07-29 2012-07-24 Honeywell International Inc. Systems and methods for mounting inertial sensors
DE112011103124T5 (de) 2010-09-18 2013-12-19 Fairchild Semiconductor Corporation Biegelager zum Verringern von Quadratur für mitschwingende mikromechanische Vorrichtungen
WO2012037538A2 (en) 2010-09-18 2012-03-22 Fairchild Semiconductor Corporation Micromachined monolithic 6-axis inertial sensor
US9156673B2 (en) 2010-09-18 2015-10-13 Fairchild Semiconductor Corporation Packaging to reduce stress on microelectromechanical systems
US9278845B2 (en) 2010-09-18 2016-03-08 Fairchild Semiconductor Corporation MEMS multi-axis gyroscope Z-axis electrode structure
US9455354B2 (en) 2010-09-18 2016-09-27 Fairchild Semiconductor Corporation Micromachined 3-axis accelerometer with a single proof-mass
CN103221333B (zh) 2010-09-18 2017-05-31 快捷半导体公司 多晶片mems封装
KR101332701B1 (ko) 2010-09-20 2013-11-25 페어차일드 세미컨덕터 코포레이션 기준 커패시터를 포함하는 미소 전자기계 압력 센서
WO2012040245A2 (en) 2010-09-20 2012-03-29 Fairchild Semiconductor Corporation Through silicon via with reduced shunt capacitance
US8539832B2 (en) * 2010-10-25 2013-09-24 Rosemount Aerospace Inc. MEMS gyros with quadrature reducing springs
US20130247662A1 (en) * 2010-12-08 2013-09-26 Microfine Materials Technologies Pte Ltd High-performance bending accelerometer
US10139505B2 (en) 2011-08-09 2018-11-27 Pgs Geophysical As Digital sensor streamers and applications thereof
US8650963B2 (en) 2011-08-15 2014-02-18 Pgs Geophysical As Electrostatically coupled pressure sensor
US8717845B2 (en) 2011-08-24 2014-05-06 Pgs Geophysical As Quality-based steering methods and systems for 4D geophysical surveys
US9062972B2 (en) 2012-01-31 2015-06-23 Fairchild Semiconductor Corporation MEMS multi-axis accelerometer electrode structure
US8978475B2 (en) 2012-02-01 2015-03-17 Fairchild Semiconductor Corporation MEMS proof mass with split z-axis portions
JP2013195212A (ja) * 2012-03-19 2013-09-30 Ngk Insulators Ltd 薄板振動素子およびその製造方法
US8754694B2 (en) 2012-04-03 2014-06-17 Fairchild Semiconductor Corporation Accurate ninety-degree phase shifter
US9488693B2 (en) 2012-04-04 2016-11-08 Fairchild Semiconductor Corporation Self test of MEMS accelerometer with ASICS integrated capacitors
US8742964B2 (en) 2012-04-04 2014-06-03 Fairchild Semiconductor Corporation Noise reduction method with chopping for a merged MEMS accelerometer sensor
US9069006B2 (en) 2012-04-05 2015-06-30 Fairchild Semiconductor Corporation Self test of MEMS gyroscope with ASICs integrated capacitors
KR102058489B1 (ko) 2012-04-05 2019-12-23 페어차일드 세미컨덕터 코포레이션 멤스 장치 프론트 엔드 전하 증폭기
EP2647952B1 (en) 2012-04-05 2017-11-15 Fairchild Semiconductor Corporation Mems device automatic-gain control loop for mechanical amplitude drive
EP2647955B8 (en) 2012-04-05 2018-12-19 Fairchild Semiconductor Corporation MEMS device quadrature phase shift cancellation
US9625272B2 (en) 2012-04-12 2017-04-18 Fairchild Semiconductor Corporation MEMS quadrature cancellation and signal demodulation
KR101999745B1 (ko) 2012-04-12 2019-10-01 페어차일드 세미컨덕터 코포레이션 미세 전자 기계 시스템 구동기
DE102013014881B4 (de) 2012-09-12 2023-05-04 Fairchild Semiconductor Corporation Verbesserte Silizium-Durchkontaktierung mit einer Füllung aus mehreren Materialien
EP2711720B1 (en) * 2012-09-25 2019-05-22 RISE Acreo AB Device for measuring force components, and method for its production
EP3034997B1 (en) * 2014-12-18 2020-12-16 RISE Research Institutes of Sweden AB Mems gyro
WO2016201413A1 (en) * 2015-06-11 2016-12-15 Georgia Tech Research Corporation Mems inertial measurement apparatus having slanted electrodes for quadrature tuning
US10697994B2 (en) 2017-02-22 2020-06-30 Semiconductor Components Industries, Llc Accelerometer techniques to compensate package stress
CN111024983B (zh) * 2019-12-18 2023-12-29 青岛航天半导体研究所有限公司 高温石英挠性加速度计伺服电路的实现方法

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4381672A (en) * 1981-03-04 1983-05-03 The Bendix Corporation Vibrating beam rotation sensor
US4590801A (en) * 1983-09-02 1986-05-27 Sundstrand Data Control, Inc. Apparatus for measuring inertial specific force and angular rate of a moving body
US4538461A (en) * 1984-01-23 1985-09-03 Piezoelectric Technology Investors, Inc. Vibratory angular rate sensing system
JPH0821722B2 (ja) * 1985-10-08 1996-03-04 日本電装株式会社 半導体振動・加速度検出装置
JPS6293668A (ja) * 1985-10-21 1987-04-30 Hitachi Ltd 角速度・加速度検出器
DE3623792C1 (de) * 1986-07-15 1987-12-10 Messerschmitt Boelkow Blohm Einrichtung zur Feststellung der Personenzahl und Richtung innerhalb eines zu ueberwachenden Raumes oder einer Durchgangsschleuse
GB2198231B (en) * 1986-11-28 1990-06-06 Stc Plc Rotational motion sensor
GB8718004D0 (en) * 1987-07-29 1987-12-16 Marconi Co Ltd Accelerometer
GB8722405D0 (en) * 1987-09-23 1987-10-28 Secretary Trade Ind Brit Automatic vehicle guiding systems
US5195371A (en) * 1988-01-13 1993-03-23 The Charles Stark Draper Laboratory, Inc. Semiconductor chip transducer
US4930351A (en) * 1988-03-24 1990-06-05 Wjm Corporation Vibratory linear acceleration and angular rate sensing system
US5083466A (en) * 1988-07-14 1992-01-28 University Of Hawaii Multidimensional force sensor
US5095762A (en) * 1988-07-14 1992-03-17 University Of Hawaii Multidimensional force sensor
US4969359A (en) * 1989-04-06 1990-11-13 Ford Motor Company Silicon accelerometer responsive to three orthogonal force components and method for fabricating
DE4003473A1 (de) * 1990-02-06 1991-08-08 Bosch Gmbh Robert Kristallorientierter bewegungssensor und verfahren zu dessen herstellung
JP2575939B2 (ja) * 1990-09-21 1997-01-29 日産自動車株式会社 半導体加速度センサ
US5331852A (en) * 1991-09-11 1994-07-26 The Charles Stark Draper Laboratory, Inc. Electromagnetic rebalanced micromechanical transducer
SE500615C2 (sv) * 1992-12-03 1994-07-25 Gert Andersson Anordning för mätning av kraftkomponenter, förfarande för framställning av dylik samt användning därav.
US5383363A (en) * 1993-02-10 1995-01-24 Ford Motor Company Inertial measurement unit providing linear and angular outputs using only fixed linear accelerometer sensors
US5425750A (en) * 1993-07-14 1995-06-20 Pacesetter, Inc. Accelerometer-based multi-axis physical activity sensor for a rate-responsive pacemaker and method of fabrication
US5488862A (en) * 1993-10-18 1996-02-06 Armand P. Neukermans Monolithic silicon rate-gyro with integrated sensors

Also Published As

Publication number Publication date
US5723790A (en) 1998-03-03
EP0812424A1 (en) 1997-12-17
AU4893996A (en) 1996-09-18
WO1996027135A1 (en) 1996-09-06
SE9500729D0 (sv) 1995-02-27
JPH11502614A (ja) 1999-03-02

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