CA2195667A1 - Two axis navigation grade micromachined rotation sensor system - Google Patents

Two axis navigation grade micromachined rotation sensor system

Info

Publication number
CA2195667A1
CA2195667A1 CA002195667A CA2195667A CA2195667A1 CA 2195667 A1 CA2195667 A1 CA 2195667A1 CA 002195667 A CA002195667 A CA 002195667A CA 2195667 A CA2195667 A CA 2195667A CA 2195667 A1 CA2195667 A1 CA 2195667A1
Authority
CA
Canada
Prior art keywords
sensing
drive
central portion
drive member
axis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CA002195667A
Other languages
French (fr)
Other versions
CA2195667C (en
Inventor
Robert E. Stewart
Stanley F. Wyse
Samuel H. Fersht
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Northrop Grumman Guidance and Electronics Co Inc
Original Assignee
Robert E. Stewart
Stanley F. Wyse
Samuel H. Fersht
Litton Systems, Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert E. Stewart, Stanley F. Wyse, Samuel H. Fersht, Litton Systems, Inc. filed Critical Robert E. Stewart
Publication of CA2195667A1 publication Critical patent/CA2195667A1/en
Application granted granted Critical
Publication of CA2195667C publication Critical patent/CA2195667C/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5705—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis
    • G01C19/5712—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis the devices involving a micromechanical structure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/084—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/084—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass
    • G01P2015/0842—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass the mass being suspended at more than one of its sides, e.g. membrane-type suspension, so as to permit multi-axis movement of the mass the mass being of clover leaf shape

Abstract

A two axis closed loop angular rate sensor which provides a digital delta theta output signal. A drive member is formed of a single, silicon wafer having a pair of oppositely-facing planar surfaces. The drive member includes a frame and a drive member central portion connected to the frame and arranged to have rotational compliance between the frame and the central portion about an axis perpendicular to the planar surfaces of the silicon wafer. Drive signals are applied to a plurality of electrodes on the central portion to cause rotational oscillation of the drive member central portion about a drive axis perpendicular to the planar surfaces of the silicon wafer. A silicon sensing member is connected to the drive member.
The sensing member has a central support member connected to the drive member central portion such that rotational oscillations of the drive member central portion are transmitted to the sensing member central portion. A
sensing portion is connected to the sensing member central support member to allow the sensing portion to oscillate about the drive axis and to allow an input rotation rate about an axis perpendicular to the drive axis to produce out-of-plane oscillations of the sensing portions. Signal processing apparatus is connected to the sensing portion for producing a signal indicative of the input rotational rate as a function of the amplitude of the out-of-plane oscillations of the sensing portion.
CA002195667A 1994-07-29 1995-07-28 Two axis navigation grade micromachined rotation sensor system Expired - Fee Related CA2195667C (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US28275794A 1994-07-29 1994-07-29
US08/282,757 1994-07-29
PCT/US1995/009533 WO1996004525A2 (en) 1994-07-29 1995-07-28 Two axis navigation grade micromachined rotation sensor system

Publications (2)

Publication Number Publication Date
CA2195667A1 true CA2195667A1 (en) 1996-02-15
CA2195667C CA2195667C (en) 2001-05-29

Family

ID=23082991

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002195667A Expired - Fee Related CA2195667C (en) 1994-07-29 1995-07-28 Two axis navigation grade micromachined rotation sensor system

Country Status (6)

Country Link
EP (1) EP0772762A2 (en)
JP (1) JP3078331B2 (en)
KR (1) KR100203315B1 (en)
AU (1) AU3715795A (en)
CA (1) CA2195667C (en)
WO (1) WO1996004525A2 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5987986A (en) * 1994-07-29 1999-11-23 Litton Systems, Inc. Navigation grade micromachined rotation sensor system
US5834864A (en) * 1995-09-13 1998-11-10 Hewlett Packard Company Magnetic micro-mover
AU5241599A (en) * 1998-07-31 2000-02-21 Litton Systems, Incorporated Micromachined rotation sensor with modular sensor elements
US6817244B2 (en) * 2003-01-06 2004-11-16 Honeywell International Inc. Methods and systems for actively controlling movement within MEMS structures
US7188522B2 (en) 2003-07-04 2007-03-13 Siemens Aktiengesellschaft Method for aligning a rotation rate sensor
DE10360963B4 (en) * 2003-12-23 2007-05-16 Litef Gmbh Method for measuring rotation rates / accelerations using a yaw rate Coriolis gyro and suitable Coriolis gyro
US9312814B2 (en) 2012-03-28 2016-04-12 Korea Basic Science Institute Demodulation device, and demodulation integrated device and modulation and demodulation integrated device using the same

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2113842B (en) * 1982-01-27 1985-07-24 Marconi Co Ltd A sensor for detecting rotational movement
US5313835A (en) * 1991-12-19 1994-05-24 Motorola, Inc. Integrated monolithic gyroscopes/accelerometers with logic circuits

Also Published As

Publication number Publication date
JP3078331B2 (en) 2000-08-21
WO1996004525A3 (en) 1996-05-02
CA2195667C (en) 2001-05-29
EP0772762A2 (en) 1997-05-14
AU3715795A (en) 1996-03-04
KR100203315B1 (en) 1999-06-15
WO1996004525A2 (en) 1996-02-15

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