GB9416683D0 - Accelerometer - Google Patents

Accelerometer

Info

Publication number
GB9416683D0
GB9416683D0 GB9416683A GB9416683A GB9416683D0 GB 9416683 D0 GB9416683 D0 GB 9416683D0 GB 9416683 A GB9416683 A GB 9416683A GB 9416683 A GB9416683 A GB 9416683A GB 9416683 D0 GB9416683 D0 GB 9416683D0
Authority
GB
United Kingdom
Prior art keywords
accelerometer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
GB9416683A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BTG International Ltd
Original Assignee
British Technology Group Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by British Technology Group Ltd filed Critical British Technology Group Ltd
Priority to GB9416683A priority Critical patent/GB9416683D0/en
Publication of GB9416683D0 publication Critical patent/GB9416683D0/en
Priority to PCT/GB1995/001966 priority patent/WO1996006358A1/en
Priority to EP95928591A priority patent/EP0776475A1/en
Priority to KR1019970701018A priority patent/KR970705755A/en
Priority to GB9516992A priority patent/GB2292462A/en
Priority to JP8507867A priority patent/JPH10504649A/en
Priority to TW084108671A priority patent/TW297909B/zh
Priority to US08/791,731 priority patent/US5962788A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
    • G01P15/131—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electrostatic counterbalancing means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Micromachines (AREA)
GB9416683A 1994-08-18 1994-08-18 Accelerometer Pending GB9416683D0 (en)

Priority Applications (8)

Application Number Priority Date Filing Date Title
GB9416683A GB9416683D0 (en) 1994-08-18 1994-08-18 Accelerometer
PCT/GB1995/001966 WO1996006358A1 (en) 1994-08-18 1995-08-18 Transducer
EP95928591A EP0776475A1 (en) 1994-08-18 1995-08-18 Transducer
KR1019970701018A KR970705755A (en) 1994-08-18 1995-08-18 TRANSDUCER
GB9516992A GB2292462A (en) 1994-08-18 1995-08-18 Transducer
JP8507867A JPH10504649A (en) 1994-08-18 1995-08-18 Transducer
TW084108671A TW297909B (en) 1994-08-18 1995-08-19
US08/791,731 US5962788A (en) 1994-08-18 1997-01-31 Transducer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB9416683A GB9416683D0 (en) 1994-08-18 1994-08-18 Accelerometer

Publications (1)

Publication Number Publication Date
GB9416683D0 true GB9416683D0 (en) 1994-10-19

Family

ID=10760018

Family Applications (2)

Application Number Title Priority Date Filing Date
GB9416683A Pending GB9416683D0 (en) 1994-08-18 1994-08-18 Accelerometer
GB9516992A Withdrawn GB2292462A (en) 1994-08-18 1995-08-18 Transducer

Family Applications After (1)

Application Number Title Priority Date Filing Date
GB9516992A Withdrawn GB2292462A (en) 1994-08-18 1995-08-18 Transducer

Country Status (6)

Country Link
EP (1) EP0776475A1 (en)
JP (1) JPH10504649A (en)
KR (1) KR970705755A (en)
GB (2) GB9416683D0 (en)
TW (1) TW297909B (en)
WO (1) WO1996006358A1 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19506401A1 (en) * 1995-02-23 1996-08-29 Siemens Ag Acceleration sensor
SE9800194D0 (en) * 1998-01-23 1998-01-23 Gert Andersson Device for measuring angular velocity
FR2810976B1 (en) * 2000-06-29 2003-08-29 Planhead Silmag P H S ELECTRONIC MICRO-COMPONENT, SENSOR AND ACTUATOR INCORPORATING SUCH A MICRO-COMPONENT
GB2498520A (en) 2012-01-13 2013-07-24 Secr Defence Accelerometer
JP6893179B2 (en) * 2015-06-11 2021-06-23 ジョージア テック リサーチ コーポレイション MEMS inertial measuring device with tilted electrodes for orthogonal tuning
CN114323395B (en) * 2021-12-23 2022-11-11 西安交通大学 MEMS six-axis force sensor chip based on SOI technology and preparation method thereof

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5000817A (en) * 1984-10-24 1991-03-19 Aine Harry E Batch method of making miniature structures assembled in wafer form
US4922756A (en) * 1988-06-20 1990-05-08 Triton Technologies, Inc. Micro-machined accelerometer
GB8718004D0 (en) * 1987-07-29 1987-12-16 Marconi Co Ltd Accelerometer
US4812199A (en) * 1987-12-21 1989-03-14 Ford Motor Company Rectilinearly deflectable element fabricated from a single wafer
US4879914A (en) * 1989-02-27 1989-11-14 Sundstrand Data Control, Inc. Unitary push-pull force transducer
US4919993A (en) * 1989-02-27 1990-04-24 Sundstrand Data Control, Inc. Flexures and method for creating flexures in a wafer
US5045152A (en) * 1989-03-06 1991-09-03 Ford Motor Company Force transducer etched from silicon
SE500615C2 (en) * 1992-12-03 1994-07-25 Gert Andersson Apparatus for measuring power components, method for making such and use thereof.

Also Published As

Publication number Publication date
GB9516992D0 (en) 1995-10-18
WO1996006358A1 (en) 1996-02-29
EP0776475A1 (en) 1997-06-04
GB2292462A (en) 1996-02-21
TW297909B (en) 1997-02-11
JPH10504649A (en) 1998-05-06
KR970705755A (en) 1997-10-09

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