GB9516992D0 - Transducer - Google Patents

Transducer

Info

Publication number
GB9516992D0
GB9516992D0 GBGB9516992.6A GB9516992A GB9516992D0 GB 9516992 D0 GB9516992 D0 GB 9516992D0 GB 9516992 A GB9516992 A GB 9516992A GB 9516992 D0 GB9516992 D0 GB 9516992D0
Authority
GB
United Kingdom
Prior art keywords
transducer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GBGB9516992.6A
Other versions
GB2292462A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BTG International Ltd
Original Assignee
British Technology Group Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by British Technology Group Ltd filed Critical British Technology Group Ltd
Publication of GB9516992D0 publication Critical patent/GB9516992D0/en
Publication of GB2292462A publication Critical patent/GB2292462A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
    • G01P15/131—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electrostatic counterbalancing means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Micromachines (AREA)
GB9516992A 1994-08-18 1995-08-18 Transducer Withdrawn GB2292462A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB9416683A GB9416683D0 (en) 1994-08-18 1994-08-18 Accelerometer

Publications (2)

Publication Number Publication Date
GB9516992D0 true GB9516992D0 (en) 1995-10-18
GB2292462A GB2292462A (en) 1996-02-21

Family

ID=10760018

Family Applications (2)

Application Number Title Priority Date Filing Date
GB9416683A Pending GB9416683D0 (en) 1994-08-18 1994-08-18 Accelerometer
GB9516992A Withdrawn GB2292462A (en) 1994-08-18 1995-08-18 Transducer

Family Applications Before (1)

Application Number Title Priority Date Filing Date
GB9416683A Pending GB9416683D0 (en) 1994-08-18 1994-08-18 Accelerometer

Country Status (6)

Country Link
EP (1) EP0776475A1 (en)
JP (1) JPH10504649A (en)
KR (1) KR970705755A (en)
GB (2) GB9416683D0 (en)
TW (1) TW297909B (en)
WO (1) WO1996006358A1 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19506401A1 (en) * 1995-02-23 1996-08-29 Siemens Ag Acceleration sensor
SE9800194D0 (en) * 1998-01-23 1998-01-23 Gert Andersson Device for measuring angular velocity
FR2810976B1 (en) * 2000-06-29 2003-08-29 Planhead Silmag P H S ELECTRONIC MICRO-COMPONENT, SENSOR AND ACTUATOR INCORPORATING SUCH A MICRO-COMPONENT
GB2498520A (en) 2012-01-13 2013-07-24 Secr Defence Accelerometer
WO2016201413A1 (en) * 2015-06-11 2016-12-15 Georgia Tech Research Corporation Mems inertial measurement apparatus having slanted electrodes for quadrature tuning
CN114323395B (en) * 2021-12-23 2022-11-11 西安交通大学 MEMS six-axis force sensor chip based on SOI technology and preparation method thereof

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5000817A (en) * 1984-10-24 1991-03-19 Aine Harry E Batch method of making miniature structures assembled in wafer form
US4922756A (en) * 1988-06-20 1990-05-08 Triton Technologies, Inc. Micro-machined accelerometer
GB8718004D0 (en) * 1987-07-29 1987-12-16 Marconi Co Ltd Accelerometer
US4812199A (en) * 1987-12-21 1989-03-14 Ford Motor Company Rectilinearly deflectable element fabricated from a single wafer
US4879914A (en) * 1989-02-27 1989-11-14 Sundstrand Data Control, Inc. Unitary push-pull force transducer
US4919993A (en) * 1989-02-27 1990-04-24 Sundstrand Data Control, Inc. Flexures and method for creating flexures in a wafer
US5045152A (en) * 1989-03-06 1991-09-03 Ford Motor Company Force transducer etched from silicon
SE500615C2 (en) * 1992-12-03 1994-07-25 Gert Andersson Apparatus for measuring power components, method for making such and use thereof.

Also Published As

Publication number Publication date
GB9416683D0 (en) 1994-10-19
JPH10504649A (en) 1998-05-06
KR970705755A (en) 1997-10-09
EP0776475A1 (en) 1997-06-04
GB2292462A (en) 1996-02-21
TW297909B (en) 1997-02-11
WO1996006358A1 (en) 1996-02-29

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Legal Events

Date Code Title Description
WAP Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1)