JP2012168161A5 - - Google Patents

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Publication number
JP2012168161A5
JP2012168161A5 JP2011216171A JP2011216171A JP2012168161A5 JP 2012168161 A5 JP2012168161 A5 JP 2012168161A5 JP 2011216171 A JP2011216171 A JP 2011216171A JP 2011216171 A JP2011216171 A JP 2011216171A JP 2012168161 A5 JP2012168161 A5 JP 2012168161A5
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JP
Japan
Prior art keywords
electrode
plate
excitation electrode
state
vibration
Prior art date
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Granted
Application number
JP2011216171A
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English (en)
Japanese (ja)
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JP2012168161A (ja
JP5852390B2 (ja
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Publication date
Application filed filed Critical
Priority claimed from JP2011216171A external-priority patent/JP5852390B2/ja
Priority to JP2011216171A priority Critical patent/JP5852390B2/ja
Priority to TW100148590A priority patent/TWI429884B/zh
Priority to EP11196152A priority patent/EP2479544A2/en
Priority to US13/374,627 priority patent/US8677828B2/en
Priority to CN201210019944.4A priority patent/CN102620812B/zh
Publication of JP2012168161A publication Critical patent/JP2012168161A/ja
Publication of JP2012168161A5 publication Critical patent/JP2012168161A5/ja
Publication of JP5852390B2 publication Critical patent/JP5852390B2/ja
Application granted granted Critical
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2011216171A 2011-01-25 2011-09-30 振動検出装置 Active JP5852390B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2011216171A JP5852390B2 (ja) 2011-01-25 2011-09-30 振動検出装置
TW100148590A TWI429884B (zh) 2011-01-25 2011-12-26 振動檢測裝置
EP11196152A EP2479544A2 (en) 2011-01-25 2011-12-30 Vibration detecting device
US13/374,627 US8677828B2 (en) 2011-01-25 2012-01-03 Vibration detecting device
CN201210019944.4A CN102620812B (zh) 2011-01-25 2012-01-20 振动检测装置

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2011013106 2011-01-25
JP2011013106 2011-01-25
JP2011216171A JP5852390B2 (ja) 2011-01-25 2011-09-30 振動検出装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2014232525A Division JP2015042995A (ja) 2011-01-25 2014-11-17 振動検出装置

Publications (3)

Publication Number Publication Date
JP2012168161A JP2012168161A (ja) 2012-09-06
JP2012168161A5 true JP2012168161A5 (enExample) 2014-12-25
JP5852390B2 JP5852390B2 (ja) 2016-02-03

Family

ID=45495692

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011216171A Active JP5852390B2 (ja) 2011-01-25 2011-09-30 振動検出装置

Country Status (5)

Country Link
US (1) US8677828B2 (enExample)
EP (1) EP2479544A2 (enExample)
JP (1) JP5852390B2 (enExample)
CN (1) CN102620812B (enExample)
TW (1) TWI429884B (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012255669A (ja) * 2011-06-07 2012-12-27 Nippon Dempa Kogyo Co Ltd 加速度計測装置
JP2014052263A (ja) * 2012-09-06 2014-03-20 Nippon Dempa Kogyo Co Ltd 外力検出装置及び外力検出センサー
JP6398137B2 (ja) * 2013-12-20 2018-10-03 ホーチキ株式会社 地震計
JP6489943B2 (ja) * 2015-06-01 2019-03-27 日本電波工業株式会社 センサ素子、物理センサ、及びセンサ素子の製造方法
GB201813492D0 (en) * 2018-08-19 2018-10-03 Reactec Ltd Vibration monitors
JP2020176984A (ja) * 2019-04-22 2020-10-29 日本電波工業株式会社 外力検出センサ
CN114689165B (zh) * 2020-12-28 2024-10-25 财团法人工业技术研究院 具预压元件的感测装置
CN115855233B (zh) * 2022-11-30 2025-11-11 深蓝汽车科技有限公司 冲击振动测量总成及装置

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4004166A (en) * 1975-03-12 1977-01-18 Nihon Dempa Kogyo Co., Ltd. Method for stabilizing the vibration frequency of a tuning fork-type quartz crystal oscillator
US4788466A (en) * 1987-11-09 1988-11-29 University Of Arkansas Piezoelectric sensor Q-loss compensation
JPH0360035U (enExample) * 1989-10-14 1991-06-13
US5069071A (en) * 1990-08-27 1991-12-03 United Technologies Corporation Vibration monitoring in the frequency domain with a capacitive accelerometer
JPH07131279A (ja) 1993-10-29 1995-05-19 Nippon Dempa Kogyo Co Ltd 表面実装型の水晶振動子
US5455475A (en) * 1993-11-01 1995-10-03 Marquette University Piezoelectric resonant sensor using the acoustoelectric effect
JPH0835893A (ja) * 1994-07-21 1996-02-06 Omron Corp 物理量センサ装置及び当該センサ装置を用いた機器
JPH08221542A (ja) * 1995-02-09 1996-08-30 Omron Corp 振動センサ
JPH09133575A (ja) * 1995-09-08 1997-05-20 Omron Corp 感震装置
US5734098A (en) * 1996-03-25 1998-03-31 Nalco/Exxon Energy Chemicals, L.P. Method to monitor and control chemical treatment of petroleum, petrochemical and processes with on-line quartz crystal microbalance sensors
US5987987A (en) * 1997-04-14 1999-11-23 Denso Corporation Angular velocity sensor, related method for manufacturing the sensor, and piezoelectric vibrator element used in this sensor
JPH116732A (ja) * 1997-06-14 1999-01-12 Makoto Haneda 傾斜振動センサ、傾斜振動感知装置及び携帯警報装置
JP2004198310A (ja) * 2002-12-19 2004-07-15 Tamagawa Seiki Co Ltd 加速度計の制御方法
JP2005098726A (ja) * 2003-09-22 2005-04-14 Hosiden Corp 振動センサ
US20060108995A1 (en) * 2004-11-09 2006-05-25 Lg Electronics Inc. Low power and proximity AC current sensor
JP4690146B2 (ja) * 2005-08-26 2011-06-01 セイコーインスツル株式会社 水晶振動子、発振器及び電子機器
JP2007101223A (ja) * 2005-09-30 2007-04-19 Seiko Epson Corp 静電容量型センサ用容量検出回路
JP2007093526A (ja) * 2005-09-30 2007-04-12 Seiko Epson Corp 圧力センサ
JP2008039626A (ja) * 2006-08-08 2008-02-21 Epson Toyocom Corp 圧力検出装置

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