JP2011228980A5 - - Google Patents
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- Publication number
- JP2011228980A5 JP2011228980A5 JP2010097619A JP2010097619A JP2011228980A5 JP 2011228980 A5 JP2011228980 A5 JP 2011228980A5 JP 2010097619 A JP2010097619 A JP 2010097619A JP 2010097619 A JP2010097619 A JP 2010097619A JP 2011228980 A5 JP2011228980 A5 JP 2011228980A5
- Authority
- JP
- Japan
- Prior art keywords
- region
- resonator element
- vibration
- piece
- element according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000000463 material Substances 0.000 claims 4
- 239000012811 non-conductive material Substances 0.000 claims 2
- 230000006835 compression Effects 0.000 claims 1
- 238000007906 compression Methods 0.000 claims 1
- 239000013078 crystal Substances 0.000 claims 1
- 229910003460 diamond Inorganic materials 0.000 claims 1
- 239000010432 diamond Substances 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 230000010355 oscillation Effects 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010097619A JP2011228980A (ja) | 2010-04-21 | 2010-04-21 | 振動片、振動子、発振器、および電子機器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010097619A JP2011228980A (ja) | 2010-04-21 | 2010-04-21 | 振動片、振動子、発振器、および電子機器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2011228980A JP2011228980A (ja) | 2011-11-10 |
| JP2011228980A5 true JP2011228980A5 (enExample) | 2013-04-18 |
Family
ID=45043819
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010097619A Withdrawn JP2011228980A (ja) | 2010-04-21 | 2010-04-21 | 振動片、振動子、発振器、および電子機器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2011228980A (enExample) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5685962B2 (ja) | 2011-02-02 | 2015-03-18 | セイコーエプソン株式会社 | 振動片、振動子、発振器及び電子機器 |
| US8581669B2 (en) | 2011-02-02 | 2013-11-12 | Seiko Epson Corporation | Vibrator element, vibrator, oscillator, and electronic apparatus |
| JP6482169B2 (ja) | 2013-07-19 | 2019-03-13 | セイコーエプソン株式会社 | 振動片、振動子、発振器、電子機器及び移動体 |
| CN107560787A (zh) * | 2017-08-25 | 2018-01-09 | 中国电子科技集团公司第四十九研究所 | 具有无电极谐振音叉的石英真空传感器 |
| JP7258760B2 (ja) * | 2017-09-21 | 2023-04-17 | 住友精密工業株式会社 | 角速度センサ |
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2010
- 2010-04-21 JP JP2010097619A patent/JP2011228980A/ja not_active Withdrawn