JP2011228980A5 - - Google Patents

Claims (9)

The base,
A vibration arm extending from one end of the base and provided with a drive electrode on the first surface;
A first region in which compressive stress or tensile stress acts on the first surface by vibration of the vibrating arm;
When compressive stress is applied to the first region on the second surface connected to the first surface by the side surface orthogonal to the first surface, tensile stress is applied to the first region, and tensile stress is applied to the first region. Has a second region in which compression stress acts,
The side surface connecting the first region and the second region, and the first region and the second region is made of a material having a lower thermal resistivity than a material forming at least the base and the vibrating arm. A vibrating piece having a member. The resonator element according to claim 1,
The member consists of one layer or a plurality of layers,
A vibrating piece, wherein at least a part or all of the member in contact with the first surface, the second surface, and the side surface is made of a non-conductive material. The resonator element according to claim 2,
The resonator element, wherein the non-conductive material is diamond. The resonator element according to claim 2,
The vibration characterized in that the member includes an insulating underlayer formed on the first surface, the second surface, and the side surface, and a metal layer formed on the underlayer. Piece. 5. The resonator element according to claim 1, wherein the base and the vibration arm are
Is formed using a piezoelectric material. The resonator element according to claim 5,
A resonator element, wherein crystal is used as the piezoelectric material.   A vibrator comprising: the resonator element according to claim 1; and a package that accommodates the resonator element.   A vibration piece according to any one of claims 1 to 6, a circuit element including an oscillation circuit that oscillates the vibration piece, and a package that houses the vibration piece and the circuit element. Oscillator.   An electronic device equipped with the vibrator according to claim 7 or the oscillator according to claim 8.