JP2010226609A5 - - Google Patents

Download PDF

Info

Publication number
JP2010226609A5
JP2010226609A5 JP2009073741A JP2009073741A JP2010226609A5 JP 2010226609 A5 JP2010226609 A5 JP 2010226609A5 JP 2009073741 A JP2009073741 A JP 2009073741A JP 2009073741 A JP2009073741 A JP 2009073741A JP 2010226609 A5 JP2010226609 A5 JP 2010226609A5
Authority
JP
Japan
Prior art keywords
resonator element
dielectric layer
arm portion
base
element according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2009073741A
Other languages
English (en)
Japanese (ja)
Other versions
JP2010226609A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2009073741A priority Critical patent/JP2010226609A/ja
Priority claimed from JP2009073741A external-priority patent/JP2010226609A/ja
Publication of JP2010226609A publication Critical patent/JP2010226609A/ja
Publication of JP2010226609A5 publication Critical patent/JP2010226609A5/ja
Withdrawn legal-status Critical Current

Links

JP2009073741A 2009-03-25 2009-03-25 振動片および振動子 Withdrawn JP2010226609A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009073741A JP2010226609A (ja) 2009-03-25 2009-03-25 振動片および振動子

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009073741A JP2010226609A (ja) 2009-03-25 2009-03-25 振動片および振動子

Publications (2)

Publication Number Publication Date
JP2010226609A JP2010226609A (ja) 2010-10-07
JP2010226609A5 true JP2010226609A5 (enExample) 2012-03-29

Family

ID=43043281

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009073741A Withdrawn JP2010226609A (ja) 2009-03-25 2009-03-25 振動片および振動子

Country Status (1)

Country Link
JP (1) JP2010226609A (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011004035A (ja) 2009-06-17 2011-01-06 Seiko Epson Corp 屈曲振動片および屈曲振動片の製造方法
JP5685962B2 (ja) 2011-02-02 2015-03-18 セイコーエプソン株式会社 振動片、振動子、発振器及び電子機器
US8581669B2 (en) 2011-02-02 2013-11-12 Seiko Epson Corporation Vibrator element, vibrator, oscillator, and electronic apparatus
JP6482169B2 (ja) 2013-07-19 2019-03-13 セイコーエプソン株式会社 振動片、振動子、発振器、電子機器及び移動体

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56136016A (en) * 1980-03-26 1981-10-23 Seiko Instr & Electronics Ltd Tuning fork type piezoelectric oscillator
JPH10173477A (ja) * 1996-12-06 1998-06-26 Riken Corp 音叉型圧電振動子
JP2001102904A (ja) * 2000-10-16 2001-04-13 Seiko Epson Corp 水晶振動子
JP4042766B2 (ja) * 2001-08-08 2008-02-06 セイコーエプソン株式会社 光学装置、およびプロジェクタ
JP3972790B2 (ja) * 2001-11-27 2007-09-05 松下電器産業株式会社 薄膜微小機械式共振子および薄膜微小機械式共振子ジャイロ
JP4281451B2 (ja) * 2003-07-17 2009-06-17 株式会社大真空 圧電振動片および圧電振動子
JP2006086726A (ja) * 2004-09-15 2006-03-30 Seiko Epson Corp 圧電振動片と圧電デバイスおよび圧電デバイスの製造方法
JP4715652B2 (ja) * 2006-06-30 2011-07-06 セイコーエプソン株式会社 圧電振動片
JP2008051999A (ja) * 2006-08-24 2008-03-06 Seiko Epson Corp 光学素子の製造方法及びプロジェクタ
JP5067033B2 (ja) * 2007-06-20 2012-11-07 セイコーエプソン株式会社 音叉型振動子、発振器
JP2009027097A (ja) * 2007-07-23 2009-02-05 Sumitomo Electric Ind Ltd 絶縁コイル及び絶縁コイルの製造方法
JP2009036917A (ja) * 2007-07-31 2009-02-19 Sharp Corp 液晶表示装置
JP2009059821A (ja) * 2007-08-30 2009-03-19 Toyota Motor Corp 半導体装置
JP4918663B2 (ja) * 2008-09-12 2012-04-18 株式会社東芝 回路基板の製造方法

Similar Documents

Publication Publication Date Title
ES2390604T3 (es) Actuador piezocerámico plano y procedimiento para fabricar el mismo
JP2015537439A5 (enExample)
JP2011004035A5 (enExample)
FR2951014B1 (fr) Structure d'actionnement piezoelectrique comportant une jauge de contrainte piezoresistive integree et son procede de realisation
JP2013068616A5 (enExample)
ATE517752T1 (de) Piezoelektrischer aktuator und herstellungsverfahren dafür
WO2015088708A3 (en) Flexible micromachined transducer device and method for fabricating same
JP2006270177A5 (enExample)
JP2011223489A5 (enExample)
JP2017203656A5 (enExample)
JP2011114587A5 (enExample)
JP2010226609A5 (enExample)
WO2008106555A3 (en) Piezoelectric package with improved lead structure
JPWO2015060132A1 (ja) 積層セラミック構造体及びその製造方法並びに圧電アクチュエータの製造方法
EP2073284A3 (en) Piezoelectric/electrostrictive membrane element
JP2010226608A5 (enExample)
JP2010159997A5 (ja) コンタクトプローブ
JP2010233204A5 (enExample)
JP2009124791A5 (enExample)
JP2013165753A5 (enExample)
JP2013171981A5 (enExample)
TW200642017A (en) Semiconductor element and manufacturing method thereof
JP2011228980A5 (enExample)
WO2007104301A3 (de) Elektrisches vielschichtbauelement
JP2010028535A5 (enExample)