JP2013171981A5 - - Google Patents

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Publication number
JP2013171981A5
JP2013171981A5 JP2012034937A JP2012034937A JP2013171981A5 JP 2013171981 A5 JP2013171981 A5 JP 2013171981A5 JP 2012034937 A JP2012034937 A JP 2012034937A JP 2012034937 A JP2012034937 A JP 2012034937A JP 2013171981 A5 JP2013171981 A5 JP 2013171981A5
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JP
Japan
Prior art keywords
groove
piezoelectric element
electrode
ceramic substrate
element according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2012034937A
Other languages
English (en)
Japanese (ja)
Other versions
JP5905292B2 (ja
JP2013171981A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2012034937A priority Critical patent/JP5905292B2/ja
Priority claimed from JP2012034937A external-priority patent/JP5905292B2/ja
Priority to US13/770,261 priority patent/US9142750B2/en
Priority to EP13155729.0A priority patent/EP2631959A3/en
Priority to CN201310054960.1A priority patent/CN103258951B/zh
Publication of JP2013171981A publication Critical patent/JP2013171981A/ja
Publication of JP2013171981A5 publication Critical patent/JP2013171981A5/ja
Application granted granted Critical
Publication of JP5905292B2 publication Critical patent/JP5905292B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2012034937A 2012-02-21 2012-02-21 圧電素子及び圧電素子の製造方法 Active JP5905292B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2012034937A JP5905292B2 (ja) 2012-02-21 2012-02-21 圧電素子及び圧電素子の製造方法
US13/770,261 US9142750B2 (en) 2012-02-21 2013-02-19 Piezoelectric element with electrodes allowing substrate strain and method for manufacturing the same
EP13155729.0A EP2631959A3 (en) 2012-02-21 2013-02-19 Piezoelectric element and method for manufacturing the same
CN201310054960.1A CN103258951B (zh) 2012-02-21 2013-02-20 压电元件及压电元件的制造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012034937A JP5905292B2 (ja) 2012-02-21 2012-02-21 圧電素子及び圧電素子の製造方法

Publications (3)

Publication Number Publication Date
JP2013171981A JP2013171981A (ja) 2013-09-02
JP2013171981A5 true JP2013171981A5 (enExample) 2014-12-25
JP5905292B2 JP5905292B2 (ja) 2016-04-20

Family

ID=47722141

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012034937A Active JP5905292B2 (ja) 2012-02-21 2012-02-21 圧電素子及び圧電素子の製造方法

Country Status (4)

Country Link
US (1) US9142750B2 (enExample)
EP (1) EP2631959A3 (enExample)
JP (1) JP5905292B2 (enExample)
CN (1) CN103258951B (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9972767B2 (en) * 2013-02-07 2018-05-15 Danfoss A/S All compliant electrode
US10707404B2 (en) * 2016-07-07 2020-07-07 Tdk Corporation Piezoelectric element
US11296272B2 (en) * 2017-07-20 2022-04-05 Taiyo Yuden Co., Ltd. Multilayer piezoelectric element, piezoelectric vibration apparatus, and electronic device
FR3097668B1 (fr) 2019-06-24 2021-07-02 Commissariat Energie Atomique Dispositif a surface tactile
CN114008804A (zh) * 2019-06-28 2022-02-01 富士胶片株式会社 压电薄膜
JP6725049B1 (ja) * 2019-12-16 2020-07-15 Tdk株式会社 積層圧電素子
CN117044238A (zh) * 2021-03-30 2023-11-10 富士胶片株式会社 压电薄膜
US20230099440A1 (en) * 2021-09-28 2023-03-30 Skyworks Global Pte. Ltd. Piezoelectric mems device with thermal compensation from different material properties

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05335861A (ja) * 1992-05-29 1993-12-17 Tokin Corp 圧電振動子の製造方法
US5755909A (en) * 1996-06-26 1998-05-26 Spectra, Inc. Electroding of ceramic piezoelectric transducers
JPH11179905A (ja) * 1997-12-22 1999-07-06 Nec Corp インクジェットヘッドとその製造方法
US7548015B2 (en) * 2000-11-02 2009-06-16 Danfoss A/S Multilayer composite and a method of making such
DE60238599D1 (de) * 2001-03-12 2011-01-27 Ngk Insulators Ltd Betätigungsglied des typs mit piezoelektischem/elektrostriktivem film und verfahren zu seiner herstellung
JP4473529B2 (ja) * 2002-07-12 2010-06-02 日本碍子株式会社 圧電／電歪膜型素子、及びその製造方法
EP1570415B1 (en) * 2002-12-12 2009-08-19 Danfoss A/S Tactile sensor element and sensor array
JP4344554B2 (ja) * 2003-07-29 2009-10-14 京セラ株式会社 圧電アクチュエータの製造方法及び印刷ヘッドの製造方法
JP4359915B2 (ja) * 2003-08-21 2009-11-11 京セラ株式会社 圧電磁器振動体及び圧電共振装置
JP4480371B2 (ja) 2003-08-26 2010-06-16 京セラ株式会社 積層型圧電素子及び噴射装置
JP4593912B2 (ja) * 2003-12-24 2010-12-08 京セラ株式会社 積層型圧電素子およびその製法、並びに噴射装置
US8378554B2 (en) * 2005-10-28 2013-02-19 Kyocera Corporation Multi-layer piezoelectric element and injection apparatus using the same
JP5004484B2 (ja) * 2006-03-23 2012-08-22 日本碍子株式会社 誘電体デバイス
JP5032791B2 (ja) * 2006-05-15 2012-09-26 アルプス電気株式会社 電子部品の製造方法
WO2008053569A1 (en) * 2006-10-31 2008-05-08 Kyocera Corporation Multi-layer piezoelectric element and injection apparatus employing the same
EP2124268B1 (en) * 2006-11-29 2015-04-15 Kyocera Corporation Laminated piezoelectric element, jetting device provided with the laminated piezoelectric element and fuel jetting system
EP2800158B1 (en) * 2007-08-29 2016-01-06 Kyocera Corporation Multi-layer piezoelectric element, and ejection apparatus and fuel ejection system that employ the same
JP2011041136A (ja) * 2009-08-17 2011-02-24 Taiyo Yuden Co Ltd 弾性波デバイスおよびその製造方法
WO2011027879A1 (ja) * 2009-09-07 2011-03-10 日本碍子株式会社 圧電／電歪膜型素子の製造方法
JPWO2011089746A1 (ja) * 2010-01-20 2013-05-20 株式会社村田製作所 分波器
JP5714361B2 (ja) * 2011-03-01 2015-05-07 日本碍子株式会社 端子電極形成方法及びそれを用いた圧電／電歪素子の製造方法
US8891222B2 (en) * 2012-02-14 2014-11-18 Danfoss A/S Capacitive transducer and a method for manufacturing a transducer
WO2013171913A1 (ja) * 2012-05-12 2013-11-21 京セラ株式会社 圧電アクチュエータ、圧電振動装置および携帯端末

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