JP2022085834A5 - - Google Patents

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Publication number
JP2022085834A5
JP2022085834A5 JP2021132598A JP2021132598A JP2022085834A5 JP 2022085834 A5 JP2022085834 A5 JP 2022085834A5 JP 2021132598 A JP2021132598 A JP 2021132598A JP 2021132598 A JP2021132598 A JP 2021132598A JP 2022085834 A5 JP2022085834 A5 JP 2022085834A5
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JP
Japan
Prior art keywords
elastic modulus
base
vibration
low elastic
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2021132598A
Other languages
English (en)
Japanese (ja)
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JP2022085834A (ja
JP7775594B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to US17/456,237 priority Critical patent/US12009801B2/en
Publication of JP2022085834A publication Critical patent/JP2022085834A/ja
Priority to US18/651,849 priority patent/US12273092B2/en
Publication of JP2022085834A5 publication Critical patent/JP2022085834A5/ja
Priority to JP2025154835A priority patent/JP2025172194A/ja
Application granted granted Critical
Publication of JP7775594B2 publication Critical patent/JP7775594B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2021132598A 2020-11-27 2021-08-17 振動デバイス Active JP7775594B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
US17/456,237 US12009801B2 (en) 2020-11-27 2021-11-23 Resonator device
US18/651,849 US12273092B2 (en) 2020-11-27 2024-05-01 Resonator device
JP2025154835A JP2025172194A (ja) 2020-11-27 2025-09-18 振動デバイス

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2020197300 2020-11-27
JP2020197300 2020-11-27

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2025154835A Division JP2025172194A (ja) 2020-11-27 2025-09-18 振動デバイス

Publications (3)

Publication Number Publication Date
JP2022085834A JP2022085834A (ja) 2022-06-08
JP2022085834A5 true JP2022085834A5 (enExample) 2024-07-18
JP7775594B2 JP7775594B2 (ja) 2025-11-26

Family

ID=81892256

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021132598A Active JP7775594B2 (ja) 2020-11-27 2021-08-17 振動デバイス

Country Status (1)

Country Link
JP (1) JP7775594B2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2024108394A (ja) 2023-01-31 2024-08-13 セイコーエプソン株式会社 振動デバイス
JP2024108397A (ja) 2023-01-31 2024-08-13 セイコーエプソン株式会社 振動デバイス

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH118526A (ja) * 1997-04-25 1999-01-12 Murata Mfg Co Ltd 圧電共振子およびそれを用いた電子部品
JP2002064355A (ja) 2000-06-09 2002-02-28 Murata Mfg Co Ltd 圧電共振部品
JP5466537B2 (ja) 2009-09-30 2014-04-09 エスアイアイ・クリスタルテクノロジー株式会社 圧電振動子、発振器及び発振器パッケージ
JP6458621B2 (ja) 2015-04-20 2019-01-30 株式会社大真空 圧電振動デバイス
JP6834289B2 (ja) 2016-09-21 2021-02-24 セイコーエプソン株式会社 実装構造体、超音波デバイス、超音波探触子、超音波装置、及び電子機器

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