CN102620812B - 振动检测装置 - Google Patents

振动检测装置 Download PDF

Info

Publication number
CN102620812B
CN102620812B CN201210019944.4A CN201210019944A CN102620812B CN 102620812 B CN102620812 B CN 102620812B CN 201210019944 A CN201210019944 A CN 201210019944A CN 102620812 B CN102620812 B CN 102620812B
Authority
CN
China
Prior art keywords
plate
electrode
shaped member
vibration
state
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201210019944.4A
Other languages
English (en)
Chinese (zh)
Other versions
CN102620812A (zh
Inventor
小山光明
武藤猛
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nihon Dempa Kogyo Co Ltd
Original Assignee
Nihon Dempa Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Dempa Kogyo Co Ltd filed Critical Nihon Dempa Kogyo Co Ltd
Publication of CN102620812A publication Critical patent/CN102620812A/zh
Application granted granted Critical
Publication of CN102620812B publication Critical patent/CN102620812B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H11/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
    • G01H11/06—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means
    • G01H11/08—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means using piezoelectric devices

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Geophysics And Detection Of Objects (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
CN201210019944.4A 2011-01-25 2012-01-20 振动检测装置 Expired - Fee Related CN102620812B (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2011013106 2011-01-25
JP2011-013106 2011-01-25
JP2011216171A JP5852390B2 (ja) 2011-01-25 2011-09-30 振動検出装置
JP2011-216171 2011-09-30

Publications (2)

Publication Number Publication Date
CN102620812A CN102620812A (zh) 2012-08-01
CN102620812B true CN102620812B (zh) 2014-05-07

Family

ID=45495692

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201210019944.4A Expired - Fee Related CN102620812B (zh) 2011-01-25 2012-01-20 振动检测装置

Country Status (5)

Country Link
US (1) US8677828B2 (enExample)
EP (1) EP2479544A2 (enExample)
JP (1) JP5852390B2 (enExample)
CN (1) CN102620812B (enExample)
TW (1) TWI429884B (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012255669A (ja) * 2011-06-07 2012-12-27 Nippon Dempa Kogyo Co Ltd 加速度計測装置
JP2014052263A (ja) * 2012-09-06 2014-03-20 Nippon Dempa Kogyo Co Ltd 外力検出装置及び外力検出センサー
JP6398137B2 (ja) * 2013-12-20 2018-10-03 ホーチキ株式会社 地震計
JP6489943B2 (ja) * 2015-06-01 2019-03-27 日本電波工業株式会社 センサ素子、物理センサ、及びセンサ素子の製造方法
GB201813492D0 (en) * 2018-08-19 2018-10-03 Reactec Ltd Vibration monitors
JP2020176984A (ja) * 2019-04-22 2020-10-29 日本電波工業株式会社 外力検出センサ
CN114689165B (zh) * 2020-12-28 2024-10-25 财团法人工业技术研究院 具预压元件的感测装置
CN115855233B (zh) * 2022-11-30 2025-11-11 深蓝汽车科技有限公司 冲击振动测量总成及装置

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4004166A (en) * 1975-03-12 1977-01-18 Nihon Dempa Kogyo Co., Ltd. Method for stabilizing the vibration frequency of a tuning fork-type quartz crystal oscillator
US4788466A (en) * 1987-11-09 1988-11-29 University Of Arkansas Piezoelectric sensor Q-loss compensation
JPH0360035U (enExample) * 1989-10-14 1991-06-13
US5069071A (en) * 1990-08-27 1991-12-03 United Technologies Corporation Vibration monitoring in the frequency domain with a capacitive accelerometer
JPH07131279A (ja) 1993-10-29 1995-05-19 Nippon Dempa Kogyo Co Ltd 表面実装型の水晶振動子
US5455475A (en) * 1993-11-01 1995-10-03 Marquette University Piezoelectric resonant sensor using the acoustoelectric effect
JPH0835893A (ja) * 1994-07-21 1996-02-06 Omron Corp 物理量センサ装置及び当該センサ装置を用いた機器
JPH08221542A (ja) * 1995-02-09 1996-08-30 Omron Corp 振動センサ
JPH09133575A (ja) * 1995-09-08 1997-05-20 Omron Corp 感震装置
US5734098A (en) * 1996-03-25 1998-03-31 Nalco/Exxon Energy Chemicals, L.P. Method to monitor and control chemical treatment of petroleum, petrochemical and processes with on-line quartz crystal microbalance sensors
US5987987A (en) * 1997-04-14 1999-11-23 Denso Corporation Angular velocity sensor, related method for manufacturing the sensor, and piezoelectric vibrator element used in this sensor
JPH116732A (ja) * 1997-06-14 1999-01-12 Makoto Haneda 傾斜振動センサ、傾斜振動感知装置及び携帯警報装置
JP2004198310A (ja) * 2002-12-19 2004-07-15 Tamagawa Seiki Co Ltd 加速度計の制御方法
JP2005098726A (ja) * 2003-09-22 2005-04-14 Hosiden Corp 振動センサ
EP1655613A3 (en) * 2004-11-09 2006-05-17 LG Electronics Inc. Low power and proximity AC current sensor
JP4690146B2 (ja) * 2005-08-26 2011-06-01 セイコーインスツル株式会社 水晶振動子、発振器及び電子機器
JP2007101223A (ja) * 2005-09-30 2007-04-19 Seiko Epson Corp 静電容量型センサ用容量検出回路
JP2007093526A (ja) * 2005-09-30 2007-04-12 Seiko Epson Corp 圧力センサ
JP2008039626A (ja) * 2006-08-08 2008-02-21 Epson Toyocom Corp 圧力検出装置

Non-Patent Citations (4)

* Cited by examiner, † Cited by third party
Title
JP特开2004-198310A 2004.07.15
JP特开2006-138852A 2006.06.01
JP特开2008-39626A 2008.02.21
JP特开平7-131279A 1995.05.19

Also Published As

Publication number Publication date
JP2012168161A (ja) 2012-09-06
US8677828B2 (en) 2014-03-25
JP5852390B2 (ja) 2016-02-03
EP2479544A2 (en) 2012-07-25
TWI429884B (zh) 2014-03-11
US20120186351A1 (en) 2012-07-26
TW201237374A (en) 2012-09-16
CN102620812A (zh) 2012-08-01

Similar Documents

Publication Publication Date Title
CN102620812B (zh) 振动检测装置
CN102589758B (zh) 外力检测装置和外力检测传感器
CN102840937A (zh) 外力检测装置和外力检测传感器
CN105934651B (zh) 改进的陀螺仪结构和陀螺仪
CN102607746B (zh) 外力检测方法和外力检测装置
CN104350359B (zh) 物理量传感器
CN102818915A (zh) 加速度测量装置
US20140062258A1 (en) External force detection equipment and external force detection sensor
JP2013007734A (ja) 外力検出装置及び外力検出センサー
JP2015042995A (ja) 振動検出装置
JP2010223666A (ja) 力センサー素子、及び力センサー装置
JP2013011532A (ja) 外力検出装置
TWI526703B (zh) 共振型磁力計
Liang et al. Design and fabrication of quartz micro-electro-mechanical system-based double-ended tuning fork with variable sections
JP2014032128A (ja) 外力検出装置
JP2014238373A (ja) 外力検出装置
JP2020176984A (ja) 外力検出センサ
JP2012002562A (ja) 振動型力検出センサー素子、振動型力検出センサー、および、振動型力検出センサー装置
JP2007298321A (ja) 加速度センサ

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20140507

Termination date: 20170120