JP2008039626A5 - - Google Patents

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Publication number
JP2008039626A5
JP2008039626A5 JP2006215383A JP2006215383A JP2008039626A5 JP 2008039626 A5 JP2008039626 A5 JP 2008039626A5 JP 2006215383 A JP2006215383 A JP 2006215383A JP 2006215383 A JP2006215383 A JP 2006215383A JP 2008039626 A5 JP2008039626 A5 JP 2008039626A5
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JP
Japan
Prior art keywords
accommodated
cavity
piezoelectric vibrator
pressure sensor
package
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2006215383A
Other languages
English (en)
Japanese (ja)
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JP2008039626A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2006215383A priority Critical patent/JP2008039626A/ja
Priority claimed from JP2006215383A external-priority patent/JP2008039626A/ja
Publication of JP2008039626A publication Critical patent/JP2008039626A/ja
Publication of JP2008039626A5 publication Critical patent/JP2008039626A5/ja
Pending legal-status Critical Current

Links

JP2006215383A 2006-08-08 2006-08-08 圧力検出装置 Pending JP2008039626A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006215383A JP2008039626A (ja) 2006-08-08 2006-08-08 圧力検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006215383A JP2008039626A (ja) 2006-08-08 2006-08-08 圧力検出装置

Publications (2)

Publication Number Publication Date
JP2008039626A JP2008039626A (ja) 2008-02-21
JP2008039626A5 true JP2008039626A5 (enExample) 2009-08-27

Family

ID=39174800

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006215383A Pending JP2008039626A (ja) 2006-08-08 2006-08-08 圧力検出装置

Country Status (1)

Country Link
JP (1) JP2008039626A (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011203140A (ja) * 2010-03-25 2011-10-13 Seiko Epson Corp 圧力センサー
TWI484149B (zh) 2011-01-17 2015-05-11 Nihon Dempa Kogyo Co 外力檢測裝置及外力檢測感測器
JP5912510B2 (ja) 2011-01-17 2016-04-27 日本電波工業株式会社 外力検出方法及び外力検出装置
JP5852390B2 (ja) * 2011-01-25 2016-02-03 日本電波工業株式会社 振動検出装置
JP5936374B2 (ja) 2011-02-15 2016-06-22 キヤノン株式会社 圧電振動型力センサ及びロボットハンド並びにロボットアーム
JP2013007653A (ja) 2011-06-24 2013-01-10 Nippon Dempa Kogyo Co Ltd 外力検出装置及び外力検出センサー
CN104807486B (zh) * 2015-02-06 2017-05-10 纳米新能源（唐山）有限责任公司 气动传感器
RU2623182C1 (ru) * 2016-05-17 2017-06-22 Общество с ограниченной ответственностью "Специальное конструкторское техническое бюро электроники, приборостроения и автоматизации", ООО "СКТБ ЭлПА" Пьезорезонансный чувствительный элемент абсолютного давления

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61105436A (ja) * 1984-10-30 1986-05-23 Matsushita Electric Ind Co Ltd 圧力検出装置
JPH038739U (enExample) * 1989-06-12 1991-01-28
JPH04130670A (ja) * 1990-09-20 1992-05-01 Seiko Instr Inc 静電容量型圧力センサ
JPH0682469A (ja) * 1992-09-04 1994-03-22 Japan Aviation Electron Ind Ltd 加速度計
JPH06102123A (ja) * 1992-09-18 1994-04-15 Fujitsu Ltd 圧力センサ
JP3024575B2 (ja) * 1996-12-06 2000-03-21 松下電器産業株式会社 圧力・振動検知装置
JP2004191128A (ja) * 2002-12-10 2004-07-08 Pacific Ind Co Ltd 半導体センサ及びタイヤ状態監視装置の送信機
JP3841304B2 (ja) * 2004-02-17 2006-11-01 セイコーエプソン株式会社 圧電発振器、及びその製造方法
JP2005318330A (ja) * 2004-04-28 2005-11-10 Kyocera Kinseki Corp 圧電振動子
JP2005318436A (ja) * 2004-04-30 2005-11-10 Toyo Commun Equip Co Ltd 発振回路用ｉｃ部品、及び圧電発振器

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