WO2011148778A8 - 音響トランスデューサ、および該音響トランスデューサを利用したマイクロフォン - Google Patents

音響トランスデューサ、および該音響トランスデューサを利用したマイクロフォン Download PDF

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Publication number
WO2011148778A8
WO2011148778A8 PCT/JP2011/060714 JP2011060714W WO2011148778A8 WO 2011148778 A8 WO2011148778 A8 WO 2011148778A8 JP 2011060714 W JP2011060714 W JP 2011060714W WO 2011148778 A8 WO2011148778 A8 WO 2011148778A8
Authority
WO
WIPO (PCT)
Prior art keywords
acoustic transducer
membrane
fixed
microphone
electrode
Prior art date
Application number
PCT/JP2011/060714
Other languages
English (en)
French (fr)
Other versions
WO2011148778A1 (ja
Inventor
隆 笠井
雄喜 内田
恭弘 堀本
セバスチアーノ コンティ
Original Assignee
オムロン株式会社
エスティーマイクロエレクトロニクス エス．アール．エル．
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by オムロン株式会社, エスティーマイクロエレクトロニクス エス．アール．エル． filed Critical オムロン株式会社
Priority to US13/699,932 priority Critical patent/US8861753B2/en
Priority to EP11786478.5A priority patent/EP2579617B1/en
Priority to KR1020127030981A priority patent/KR101431370B1/ko
Priority to CN201180026170.1A priority patent/CN102918874B/zh
Publication of WO2011148778A1 publication Critical patent/WO2011148778A1/ja
Publication of WO2011148778A8 publication Critical patent/WO2011148778A8/ja

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Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/04—Microphones
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R3/00—Circuits for transducers, loudspeakers or microphones
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/01—Electrostatic transducers characterised by the use of electrets
    • H04R19/016—Electrostatic transducers characterised by the use of electrets for microphones

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
  • Pressure Sensors (AREA)

Abstract

　音響センサ（１１）は、半導体基板の上面に振動膜（２２）および固定膜（２３）が形成され、振動膜（２２）における振動電極（２２ａ）と固定膜（２３）における固定電極（２３ａ）との間の静電容量の変化により音波を検出する。固定膜（２３）には、音波を外部から振動膜（２２）に到達させるために複数の音孔部（３２）が形成されており、固定電極（２３ａ）は、縁部（４０）の境界が音孔部（３２）と交わらないように形成されている。
PCT/JP2011/060714 2010-05-27 2011-05-10 音響トランスデューサ、および該音響トランスデューサを利用したマイクロフォン WO2011148778A1 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
US13/699,932 US8861753B2 (en) 2010-05-27 2011-05-10 Acoustic transducer, and microphone using the acoustic transducer
EP11786478.5A EP2579617B1 (en) 2010-05-27 2011-05-10 Acoustic transducer, and microphone using the acoustic transducer
KR1020127030981A KR101431370B1 (ko) 2010-05-27 2011-05-10 음향 트랜스듀서, 및 그 음향 트랜스듀서를 이용한 마이크로폰
CN201180026170.1A CN102918874B (zh) 2010-05-27 2011-05-10 音响转换器、及利用该音响转换器的传声器

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2010121680A JP5588745B2 (ja) 2010-05-27 2010-05-27 音響トランスデューサ、および該音響トランスデューサを利用したマイクロフォン
JP2010-121680 2010-05-27

Publications (2)

Publication Number Publication Date
WO2011148778A1 WO2011148778A1 (ja) 2011-12-01
WO2011148778A8 true WO2011148778A8 (ja) 2012-02-23

Family

ID=45003770

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2011/060714 WO2011148778A1 (ja) 2010-05-27 2011-05-10 音響トランスデューサ、および該音響トランスデューサを利用したマイクロフォン

Country Status (6)

Country Link
US (1) US8861753B2 (ja)
EP (1) EP2579617B1 (ja)
JP (1) JP5588745B2 (ja)
KR (1) KR101431370B1 (ja)
CN (1) CN102918874B (ja)
WO (1) WO2011148778A1 (ja)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5872163B2 (ja) 2011-01-07 2016-03-01 オムロン株式会社 音響トランスデューサ、および該音響トランスデューサを利用したマイクロフォン
US9380380B2 (en) 2011-01-07 2016-06-28 Stmicroelectronics S.R.L. Acoustic transducer and interface circuit
DE102011076430A1 (de) * 2011-05-25 2012-11-29 Robert Bosch Gmbh Schallwellenbasierter Sensor
US8767512B2 (en) 2012-05-01 2014-07-01 Fujifilm Dimatix, Inc. Multi-frequency ultra wide bandwidth transducer
US9454954B2 (en) * 2012-05-01 2016-09-27 Fujifilm Dimatix, Inc. Ultra wide bandwidth transducer with dual electrode
US9660170B2 (en) 2012-10-26 2017-05-23 Fujifilm Dimatix, Inc. Micromachined ultrasonic transducer arrays with multiple harmonic modes
KR101500130B1 (ko) * 2013-09-02 2015-03-06 현대자동차주식회사 스티어링 휠에 설치된 차량용 제어장치
US10672365B2 (en) 2017-08-17 2020-06-02 JERS Tech, LLC Address location assistance system and associated methods
CN207665147U (zh) * 2017-12-08 2018-07-27 歌尔科技有限公司 一种麦克风模组
US11119532B2 (en) * 2019-06-28 2021-09-14 Intel Corporation Methods and apparatus to implement microphones in thin form factor electronic devices

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5870482A (en) * 1997-02-25 1999-02-09 Knowles Electronics, Inc. Miniature silicon condenser microphone
CN1926918B (zh) 2004-03-05 2011-06-01 松下电器产业株式会社 驻极体电容器
WO2005086535A1 (ja) * 2004-03-09 2005-09-15 Matsushita Electric Industrial Co., Ltd. エレクトレットコンデンサーマイクロホン
JP4036866B2 (ja) 2004-07-30 2008-01-23 三洋電機株式会社 音響センサ
JP2008113057A (ja) * 2004-09-01 2008-05-15 Matsushita Electric Ind Co Ltd エレクトレットコンデンサー
JP4567643B2 (ja) * 2006-08-24 2010-10-20 パナソニック株式会社 コンデンサ及びその製造方法
JP2009038732A (ja) 2007-08-03 2009-02-19 Panasonic Corp 電子部品とその製造方法及び該電子部品を備える電子装置
CN101785325B (zh) * 2008-02-20 2013-07-17 欧姆龙株式会社 静电电容式振动传感器
JP4419103B1 (ja) 2008-08-27 2010-02-24 オムロン株式会社 静電容量型振動センサ
US9162876B2 (en) * 2011-03-18 2015-10-20 Stmicroelectronics S.R.L. Process for manufacturing a membrane microelectromechanical device, and membrane microelectromechanical device

Also Published As

Publication number Publication date
WO2011148778A1 (ja) 2011-12-01
KR101431370B1 (ko) 2014-08-19
KR20130012587A (ko) 2013-02-04
US8861753B2 (en) 2014-10-14
EP2579617A4 (en) 2013-04-17
EP2579617B1 (en) 2017-04-12
EP2579617A1 (en) 2013-04-10
US20130070942A1 (en) 2013-03-21
JP2011250169A (ja) 2011-12-08
CN102918874B (zh) 2015-12-02
CN102918874A (zh) 2013-02-06
JP5588745B2 (ja) 2014-09-10

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