WO2011142637A3 - 그라핀 맴브레인을 이용한 mems 마이크로폰과 그 제조방법 - Google Patents

그라핀 맴브레인을 이용한 mems 마이크로폰과 그 제조방법 Download PDF

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Publication number
WO2011142637A3
WO2011142637A3 PCT/KR2011/003584 KR2011003584W WO2011142637A3 WO 2011142637 A3 WO2011142637 A3 WO 2011142637A3 KR 2011003584 W KR2011003584 W KR 2011003584W WO 2011142637 A3 WO2011142637 A3 WO 2011142637A3
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WO
WIPO (PCT)
Prior art keywords
mems microphone
graphene membrane
frequency domain
manufacturing same
present
Prior art date
Application number
PCT/KR2011/003584
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English (en)
French (fr)
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WO2011142637A2 (ko
Inventor
허신
이영화
최홍수
Original Assignee
한국기계연구원
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 한국기계연구원 filed Critical 한국기계연구원
Publication of WO2011142637A2 publication Critical patent/WO2011142637A2/ko
Publication of WO2011142637A3 publication Critical patent/WO2011142637A3/ko

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Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/04—Microphones

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
  • Pressure Sensors (AREA)

Abstract

본 발명은 그라핀 맴브레인을 이용한 MEMS 마이크로폰과 그 제조방법에 관한 것으로, 그라핀 맴브레인부, 그라핀 맴브레인부에 대향하여 이격 배치되어, 그라핀 맴브레인부와 에어 갭을 형성하는 백 플레이트부를 포함한다. 이로써, 고민감도 및 적은 전압에서 작동할 수 있고, 주파수 영역이 넓어 가청주파수 및 그 이하 및 이상의 주파수 영역에서 음파를 측정할 수 있으며, 구조가 간단하고 대량 생산이 가능하게 된다.
PCT/KR2011/003584 2010-05-14 2011-05-16 그라핀 맴브레인을 이용한 mems 마이크로폰과 그 제조방법 WO2011142637A2 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020100045403A KR101058475B1 (ko) 2010-05-14 2010-05-14 그라핀 맴브레인을 이용한 ｍｅｍｓ 마이크로폰과 그 제조방법
KR10-2010-0045403 2010-05-14

Publications (2)

Publication Number Publication Date
WO2011142637A2 WO2011142637A2 (ko) 2011-11-17
WO2011142637A3 true WO2011142637A3 (ko) 2012-02-02

Family

ID=44914862

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2011/003584 WO2011142637A2 (ko) 2010-05-14 2011-05-16 그라핀 맴브레인을 이용한 mems 마이크로폰과 그 제조방법

Country Status (2)

Country Link
KR (1) KR101058475B1 (ko)
WO (1) WO2011142637A2 (ko)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014100012A1 (en) * 2012-12-20 2014-06-26 The Regents Of The University Of California Electrostatic graphene speaker
US9516428B2 (en) 2013-03-14 2016-12-06 Infineon Technologies Ag MEMS acoustic transducer, MEMS microphone, MEMS microspeaker, array of speakers and method for manufacturing an acoustic transducer
KR20150050829A (ko) * 2013-11-01 2015-05-11 엘지전자 주식회사 음향 발생 장치
US9641949B2 (en) 2014-06-30 2017-05-02 Infineon Technologies Ag MEMS device and method for manufacturing the MEMS device
KR102374090B1 (ko) * 2014-10-06 2022-03-14 더 로얄 인스티튜션 포 디 어드밴스먼트 오브 러닝/맥길 유니버시티 그래핀 산화물 기반 음향 트랜스듀서 형성 방법 및 소자
KR102175410B1 (ko) * 2014-11-26 2020-11-06 현대자동차 주식회사 마이크로폰 및 그 제조방법
US9544672B2 (en) * 2014-12-15 2017-01-10 Piotr Nawrocki Condenser microphone
GB201519620D0 (en) 2015-11-06 2015-12-23 Univ Manchester Device and method of fabricating such a device
KR101688954B1 (ko) * 2016-01-15 2016-12-22 (주)글로벌센싱테크놀로지 멤브레인 지지 구조가 개선된 마이크로폰 및 마이크로폰 제조 방법
EP3296028A1 (en) 2016-09-15 2018-03-21 Paul Scherrer Institut Transducer for electromagnetic and thermo-acoustic wave based on three dimensional graphene structure
KR101811413B1 (ko) * 2016-12-20 2017-12-21 주식회사 리딩유아이 2세대 전류 컨베이어를 이용한 오디오 수신 장치
GB2569810A (en) 2017-12-27 2019-07-03 Nokia Technologies Oy An apparatus for sensing comprising a microphone arrangement
KR102200437B1 (ko) * 2018-09-12 2021-01-08 주식회사 이피지 관통형 전극 제조 방법
NL2026284B1 (en) 2020-08-18 2022-04-14 Univ Delft Tech MEMS-based microphone and microphone assembly

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20040063964A (ko) * 2001-11-20 2004-07-15 노우레스 일렉트로닉스, 엘엘시 실리콘 마이크로폰
KR20060099627A (ko) * 2005-03-14 2006-09-20 주식회사 케이이씨 Ｍｅｍｓ 공정을 이용한 마이크로폰 및 그 제조 방법
WO2007147643A2 (de) * 2006-06-23 2007-12-27 Universität Bielefeld Nanomikrofon bzw. -drucksensor
JP2009524368A (ja) * 2006-01-20 2009-06-25 アナログ デバイシス， インコーポレイテッド コンデンサマイクロホン振動板の支持装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007329559A (ja) 2006-06-06 2007-12-20 Hosiden Corp コンデンサ型マイクロホンの製造方法及びコンデンサ型マイクロホン

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20040063964A (ko) * 2001-11-20 2004-07-15 노우레스 일렉트로닉스, 엘엘시 실리콘 마이크로폰
KR20060099627A (ko) * 2005-03-14 2006-09-20 주식회사 케이이씨 Ｍｅｍｓ 공정을 이용한 마이크로폰 및 그 제조 방법
JP2009524368A (ja) * 2006-01-20 2009-06-25 アナログ デバイシス， インコーポレイテッド コンデンサマイクロホン振動板の支持装置
WO2007147643A2 (de) * 2006-06-23 2007-12-27 Universität Bielefeld Nanomikrofon bzw. -drucksensor

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Publication number Publication date
WO2011142637A2 (ko) 2011-11-17
KR101058475B1 (ko) 2011-08-24

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