WO2013185737A3 - 一种温度补偿能力可调节的压电声波谐振器 - Google Patents

一种温度补偿能力可调节的压电声波谐振器 Download PDF

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Publication number
WO2013185737A3
WO2013185737A3 PCT/CN2013/081943 CN2013081943W WO2013185737A3 WO 2013185737 A3 WO2013185737 A3 WO 2013185737A3 CN 2013081943 W CN2013081943 W CN 2013081943W WO 2013185737 A3 WO2013185737 A3 WO 2013185737A3
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WO
WIPO (PCT)
Prior art keywords
temperature compensation
electrode
acoustic resonator
piezoelectric acoustic
piezoelectric
Prior art date
Application number
PCT/CN2013/081943
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English (en)
French (fr)
Other versions
WO2013185737A2 (zh
Inventor
张�浩
杜良桢
庞慰
李建邦
胡念楚
康凯
Original Assignee
中兴通讯股份有限公司
天津大学
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Publication date
Application filed by 中兴通讯股份有限公司, 天津大学 filed Critical 中兴通讯股份有限公司
Priority to EP13804060.5A priority Critical patent/EP2892153B1/en
Priority to US14/425,076 priority patent/US9991867B2/en
Priority to JP2015528855A priority patent/JP2015528667A/ja
Publication of WO2013185737A2 publication Critical patent/WO2013185737A2/zh
Publication of WO2013185737A3 publication Critical patent/WO2013185737A3/zh

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Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02086—Means for compensation or elimination of undesirable effects
    • H03H9/02102—Means for compensation or elimination of undesirable effects of temperature influence
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H10N30/852—Composite materials, e.g. having 1-3 or 2-2 type connectivity
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/877—Conductive materials

Abstract

一种温度补偿能力可调节的压电声波谐振器。所述压电声波谐振器包括：压电声波反射结构、第一电极、第二电极、位于第一电极和第二电极之间的压电层、以及温度补偿层；其中，所述温度补偿层采用由SixOy材料构成的单层温度补偿层，或者，采用由正声速温度系数材料和负声速温度系数材料叠层构成的复合温度补偿层；所述温度补偿层设置成：对所述压电声波谐振器中第一电极、压电层和第二电极引起的温度频率偏移进行逆向补偿；其中，x：y不等于1：2。
PCT/CN2013/081943 2012-08-30 2013-08-21 一种温度补偿能力可调节的压电声波谐振器 WO2013185737A2 (zh)

Priority Applications (3)

Application Number Priority Date Filing Date Title
EP13804060.5A EP2892153B1 (en) 2012-08-30 2013-08-21 Piezoelectric acoustic resonator with adjustable temperature compensation capability
US14/425,076 US9991867B2 (en) 2012-08-30 2013-08-21 Piezoelectric acoustic resonator with adjustable temperature compensation capability
JP2015528855A JP2015528667A (ja) 2012-08-30 2013-08-21 温度補償能力を調整できる圧電音響共振器

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN201210314229.3A CN102904546B (zh) 2012-08-30 2012-08-30 一种温度补偿能力可调节的压电声波谐振器
CN201210314229.3 2012-08-30

Publications (2)

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WO2013185737A2 WO2013185737A2 (zh) 2013-12-19
WO2013185737A3 true WO2013185737A3 (zh) 2014-02-06

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Country Link
US (1) US9991867B2 (zh)
EP (1) EP2892153B1 (zh)
JP (1) JP2015528667A (zh)
CN (1) CN102904546B (zh)
WO (1) WO2013185737A2 (zh)

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CN111327288B (zh) * 2020-01-14 2021-04-16 诺思(天津)微系统有限责任公司 一种体声波谐振器、超窄带滤波器、双工器及多工器
CN112532206A (zh) * 2020-12-16 2021-03-19 武汉大学 一种双工器
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Also Published As

Publication number Publication date
WO2013185737A2 (zh) 2013-12-19
CN102904546A (zh) 2013-01-30
JP2015528667A (ja) 2015-09-28
EP2892153B1 (en) 2020-08-05
CN102904546B (zh) 2016-04-13
EP2892153A4 (en) 2016-02-24
EP2892153A2 (en) 2015-07-08
US9991867B2 (en) 2018-06-05
US20150263697A1 (en) 2015-09-17

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