CN1801613A - 具有改进的温度补偿的压电晶体谐振器及其制造方法 - Google Patents
具有改进的温度补偿的压电晶体谐振器及其制造方法 Download PDFInfo
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- CN1801613A CN1801613A CNA2005101047415A CN200510104741A CN1801613A CN 1801613 A CN1801613 A CN 1801613A CN A2005101047415 A CNA2005101047415 A CN A2005101047415A CN 200510104741 A CN200510104741 A CN 200510104741A CN 1801613 A CN1801613 A CN 1801613A
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- piezoelectric resonator
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Images
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02007—Details of bulk acoustic wave devices
- H03H9/02086—Means for compensation or elimination of undesirable effects
- H03H9/02102—Means for compensation or elimination of undesirable effects of temperature influence
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
- H03H3/04—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
- H03H3/04—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient
- H03H2003/0407—Temperature coefficient
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/42—Piezoelectric device making
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
- Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
- Y10T29/49128—Assembling formed circuit to base
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
- Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
- Y10T29/49155—Manufacturing circuit on or in base
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
Description
Claims (22)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102004062312A DE102004062312B3 (de) | 2004-12-23 | 2004-12-23 | Piezoelektrischer Resonator mit verbesserter Temperaturkompensation und Verfahren zum Herstellen desselben |
DE102004062312.0 | 2004-12-23 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1801613A true CN1801613A (zh) | 2006-07-12 |
CN100530954C CN100530954C (zh) | 2009-08-19 |
Family
ID=36371661
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2005101047415A Expired - Fee Related CN100530954C (zh) | 2004-12-23 | 2005-12-23 | 具有改进的温度补偿的压电晶体谐振器及其制造方法 |
Country Status (3)
Country | Link |
---|---|
US (2) | US7486006B2 (zh) |
CN (1) | CN100530954C (zh) |
DE (1) | DE102004062312B3 (zh) |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2013185737A3 (zh) * | 2012-08-30 | 2014-02-06 | 中兴通讯股份有限公司 | 一种温度补偿能力可调节的压电声波谐振器 |
CN103795369A (zh) * | 2012-10-26 | 2014-05-14 | 安华高科技通用Ip(新加坡)公司 | 具有低微调敏感度的温度补偿谐振器装置及制造所述装置的方法 |
CN103975525A (zh) * | 2011-09-30 | 2014-08-06 | 高通Mems科技公司 | 横截面扩张模式共振器 |
CN104167955A (zh) * | 2013-05-16 | 2014-11-26 | 香港理工大学 | 压电元件和压电能量收集系统 |
CN106595829A (zh) * | 2016-12-22 | 2017-04-26 | 东南大学 | 具有温度补偿功能的车辆动态称重传感器及其制备方法 |
CN111006801A (zh) * | 2019-12-17 | 2020-04-14 | 华中科技大学 | 用于生理信息监测的柔性变模态传感器、应用及制备方法 |
CN112054777A (zh) * | 2020-05-09 | 2020-12-08 | 诺思(天津)微系统有限责任公司 | 体声波谐振器组件及制造方法、滤波器及电子设备 |
CN112154605A (zh) * | 2018-04-11 | 2020-12-29 | Rf360欧洲有限责任公司 | 具有改善的功率耐久性和耐热性的saw谐振器以及包括saw谐振器的rf滤波器 |
Families Citing this family (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1821351B1 (de) * | 2006-02-16 | 2008-04-16 | Delphi Technologies, Inc. | Verfahren zum Herstellen eines piezoelektrischen Bauteils |
DE102006046278B4 (de) * | 2006-09-29 | 2010-04-08 | Epcos Ag | Mit akustischen Volumenwellen arbeitender Resonator |
US8689426B2 (en) | 2008-12-17 | 2014-04-08 | Sand 9, Inc. | Method of manufacturing a resonating structure |
WO2010077313A1 (en) | 2008-12-17 | 2010-07-08 | Sand9, Inc. | Mechanical resonating structures including a temperature compensation structure |
US8030823B2 (en) | 2009-01-26 | 2011-10-04 | Resonance Semiconductor Corporation | Protected resonator |
US9735338B2 (en) | 2009-01-26 | 2017-08-15 | Cymatics Laboratories Corp. | Protected resonator |
US8253513B2 (en) * | 2010-03-16 | 2012-08-28 | Hao Zhang | Temperature compensated thin film acoustic wave resonator |
EP2403139A1 (en) * | 2010-07-02 | 2012-01-04 | Nxp B.V. | Resonator |
FR2977947B1 (fr) * | 2011-07-11 | 2013-07-05 | Photomeca France | Exposeuse uv pour plaques d'impression |
KR101853740B1 (ko) * | 2011-07-27 | 2018-06-14 | 삼성전자주식회사 | 체적 음향 공진기 및 체적 음향 공진기를 이용한 듀플렉서 |
EP2754176A4 (en) | 2011-09-08 | 2015-04-15 | Univ California | SENSOR FOR DETECTING LOW NOISE IN LIQUIDS |
US9219517B2 (en) | 2013-10-02 | 2015-12-22 | Triquint Semiconductor, Inc. | Temperature compensated bulk acoustic wave devices using over-moded acoustic reflector layers |
US10800649B2 (en) | 2016-11-28 | 2020-10-13 | Analog Devices International Unlimited Company | Planar processing of suspended microelectromechanical systems (MEMS) devices |
US10843920B2 (en) | 2019-03-08 | 2020-11-24 | Analog Devices International Unlimited Company | Suspended microelectromechanical system (MEMS) devices |
JP2020182035A (ja) * | 2019-04-23 | 2020-11-05 | 株式会社ディスコ | Sawフィルタの製造方法及びsawフィルタ |
CN112953447B (zh) * | 2021-02-09 | 2023-08-11 | 偲百创(深圳)科技有限公司 | 谐振器及电子设备 |
CN113285687B (zh) * | 2021-03-05 | 2023-02-03 | 天津大学 | 温度补偿型薄膜体声波谐振器及其形成方法、电子设备 |
CN113328724A (zh) * | 2021-07-22 | 2021-08-31 | 绍兴汉天下微电子有限公司 | 一种体声波谐振器及其制作方法 |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58137317A (ja) * | 1982-02-09 | 1983-08-15 | Nec Corp | 圧電薄膜複合振動子 |
JPH01126939A (ja) | 1987-11-12 | 1989-05-19 | Sanyo Electric Co Ltd | 電気掃除機 |
US5838089A (en) * | 1997-02-18 | 1998-11-17 | Kobe Steel Usa Inc. | Acoustic wave devices on diamond with an interlayer |
JP3880150B2 (ja) * | 1997-06-02 | 2007-02-14 | 松下電器産業株式会社 | 弾性表面波素子 |
JPH1126939A (ja) | 1997-07-07 | 1999-01-29 | Kyocera Corp | 多層配線基板 |
CN1072243C (zh) | 1998-01-14 | 2001-10-03 | 中山大学 | 用改性的导电填料制造正温度系数型导电高分子复合材料 |
US6420820B1 (en) * | 2000-08-31 | 2002-07-16 | Agilent Technologies, Inc. | Acoustic wave resonator and method of operating the same to maintain resonance when subjected to temperature variations |
DE10045090A1 (de) * | 2000-09-12 | 2002-03-28 | Infineon Technologies Ag | Akustischer Resonator |
US7040400B2 (en) * | 2001-04-24 | 2006-05-09 | Shell Oil Company | In situ thermal processing of a relatively impermeable formation using an open wellbore |
CN100397611C (zh) | 2002-10-09 | 2008-06-25 | 旺宏电子股份有限公司 | 于低介电材料层中形成导电结构的方法 |
JP3889351B2 (ja) | 2002-12-11 | 2007-03-07 | Tdk株式会社 | デュプレクサ |
JP2005117641A (ja) * | 2003-09-17 | 2005-04-28 | Matsushita Electric Ind Co Ltd | 圧電体共振器、それを用いたフィルタ及び共用器 |
US7362198B2 (en) * | 2003-10-30 | 2008-04-22 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd | Pass bandwidth control in decoupled stacked bulk acoustic resonator devices |
US7561009B2 (en) * | 2005-11-30 | 2009-07-14 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Film bulk acoustic resonator (FBAR) devices with temperature compensation |
-
2004
- 2004-12-23 DE DE102004062312A patent/DE102004062312B3/de not_active Expired - Fee Related
-
2005
- 2005-12-23 CN CNB2005101047415A patent/CN100530954C/zh not_active Expired - Fee Related
- 2005-12-23 US US11/318,342 patent/US7486006B2/en not_active Expired - Fee Related
-
2008
- 2008-12-29 US US12/344,829 patent/US8186028B2/en not_active Expired - Fee Related
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103975525A (zh) * | 2011-09-30 | 2014-08-06 | 高通Mems科技公司 | 横截面扩张模式共振器 |
WO2013185737A3 (zh) * | 2012-08-30 | 2014-02-06 | 中兴通讯股份有限公司 | 一种温度补偿能力可调节的压电声波谐振器 |
US9991867B2 (en) | 2012-08-30 | 2018-06-05 | Zte Corporation | Piezoelectric acoustic resonator with adjustable temperature compensation capability |
CN103795369A (zh) * | 2012-10-26 | 2014-05-14 | 安华高科技通用Ip(新加坡)公司 | 具有低微调敏感度的温度补偿谐振器装置及制造所述装置的方法 |
CN104167955A (zh) * | 2013-05-16 | 2014-11-26 | 香港理工大学 | 压电元件和压电能量收集系统 |
CN106595829A (zh) * | 2016-12-22 | 2017-04-26 | 东南大学 | 具有温度补偿功能的车辆动态称重传感器及其制备方法 |
CN112154605A (zh) * | 2018-04-11 | 2020-12-29 | Rf360欧洲有限责任公司 | 具有改善的功率耐久性和耐热性的saw谐振器以及包括saw谐振器的rf滤波器 |
CN111006801A (zh) * | 2019-12-17 | 2020-04-14 | 华中科技大学 | 用于生理信息监测的柔性变模态传感器、应用及制备方法 |
CN111006801B (zh) * | 2019-12-17 | 2021-02-09 | 华中科技大学 | 用于生理信息监测的柔性变模态传感器、应用及制备方法 |
CN112054777A (zh) * | 2020-05-09 | 2020-12-08 | 诺思(天津)微系统有限责任公司 | 体声波谐振器组件及制造方法、滤波器及电子设备 |
Also Published As
Publication number | Publication date |
---|---|
US20060279175A1 (en) | 2006-12-14 |
DE102004062312B3 (de) | 2006-06-01 |
US8186028B2 (en) | 2012-05-29 |
US7486006B2 (en) | 2009-02-03 |
CN100530954C (zh) | 2009-08-19 |
US20090100657A1 (en) | 2009-04-23 |
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Effective date of registration: 20081205 Address after: Singapore Singapore Applicant after: Avago Technologies Wireless IP Address before: Munich, Germany Applicant before: Infennian Technologies AG |
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