FI20106063A0 - Akustisesti kytketty laajakaistainen ohutkalvo-BAW-suodatin - Google Patents
Akustisesti kytketty laajakaistainen ohutkalvo-BAW-suodatinInfo
- Publication number
- FI20106063A0 FI20106063A0 FI20106063A FI20106063A FI20106063A0 FI 20106063 A0 FI20106063 A0 FI 20106063A0 FI 20106063 A FI20106063 A FI 20106063A FI 20106063 A FI20106063 A FI 20106063A FI 20106063 A0 FI20106063 A0 FI 20106063A0
- Authority
- FI
- Finland
- Prior art keywords
- acoustically coupled
- thin film
- baw filter
- piezoelectric layer
- film baw
- Prior art date
Links
- 239000010409 thin film Substances 0.000 title abstract 2
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
- H03H9/547—Notch filters, e.g. notch BAW or thin film resonator filters
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
- H03H9/56—Monolithic crystal filters
- H03H9/564—Monolithic crystal filters implemented with thin-film techniques
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
- H03H9/56—Monolithic crystal filters
- H03H9/566—Electric coupling means therefor
- H03H9/568—Electric coupling means therefor consisting of a ladder configuration
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (10)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FI20106063A FI20106063A (fi) | 2010-10-14 | 2010-10-14 | Akustisesti kytketty laajakaistainen ohutkalvo-BAW-suodatin |
EP11832194.2A EP2628246B1 (en) | 2010-10-14 | 2011-10-14 | Wide-band acoustically coupled thin-film baw filter |
US13/879,028 US9893712B2 (en) | 2010-10-14 | 2011-10-14 | Wide-band acoustically coupled thin-film BAW filter |
CN2011800498577A CN103222191A (zh) | 2010-10-14 | 2011-10-14 | 宽带声耦合薄膜baw滤波器 |
CN201810521377.XA CN108988819A (zh) | 2010-10-14 | 2011-10-14 | 宽带声耦合薄膜baw滤波器 |
PCT/FI2011/050891 WO2012049372A1 (en) | 2010-10-14 | 2011-10-14 | Wide-band acoustically coupled thin-film baw filter |
JP2013533251A JP5926735B2 (ja) | 2010-10-14 | 2011-10-14 | 広帯域音響結合薄膜bawフィルタ |
US15/893,717 US10778186B2 (en) | 2010-10-14 | 2018-02-12 | Wide-band acoustically coupled thin-film BAW filter |
US17/008,077 US11374551B2 (en) | 2010-10-14 | 2020-08-31 | Wide-band acoustically coupled thin-film BAW filter |
US17/849,744 US20220407500A1 (en) | 2010-10-14 | 2022-06-27 | Wide-band acoustically coupled thin-film BAW filter |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FI20106063A FI20106063A (fi) | 2010-10-14 | 2010-10-14 | Akustisesti kytketty laajakaistainen ohutkalvo-BAW-suodatin |
Publications (2)
Publication Number | Publication Date |
---|---|
FI20106063A0 true FI20106063A0 (fi) | 2010-10-14 |
FI20106063A FI20106063A (fi) | 2012-06-08 |
Family
ID=43064221
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FI20106063A FI20106063A (fi) | 2010-10-14 | 2010-10-14 | Akustisesti kytketty laajakaistainen ohutkalvo-BAW-suodatin |
Country Status (6)
Country | Link |
---|---|
US (4) | US9893712B2 (fi) |
EP (1) | EP2628246B1 (fi) |
JP (1) | JP5926735B2 (fi) |
CN (2) | CN108988819A (fi) |
FI (1) | FI20106063A (fi) |
WO (1) | WO2012049372A1 (fi) |
Cited By (1)
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---|---|---|---|---|
CN112673568A (zh) * | 2018-09-07 | 2021-04-16 | 芬兰Vtt技术研究中心有限公司 | 用于调整声波谐振器的频率响应的负荷谐振器 |
Families Citing this family (49)
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FI20106063A (fi) | 2010-10-14 | 2012-06-08 | Valtion Teknillinen | Akustisesti kytketty laajakaistainen ohutkalvo-BAW-suodatin |
FI124732B (fi) * | 2011-11-11 | 2014-12-31 | Teknologian Tutkimuskeskus Vtt | Lateraalisesti kytketty bulkkiaaltosuodatin, jolla on parannetut päästökaistan ominaisuudet |
US20140127857A1 (en) * | 2012-11-07 | 2014-05-08 | Taiwan Semiconductor Manufacturing Company, Ltd. | Carrier Wafers, Methods of Manufacture Thereof, and Packaging Methods |
DE102012111889B9 (de) * | 2012-12-06 | 2014-09-04 | Epcos Ag | Elektroakustischer Wandler |
CN103929148B (zh) * | 2013-01-11 | 2017-09-19 | 中兴通讯股份有限公司 | 一种低插损压电声波带通滤波器及实现方法 |
US9281800B2 (en) * | 2014-01-24 | 2016-03-08 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Resonator filter device having narrow pass-band |
US20160079958A1 (en) * | 2014-05-30 | 2016-03-17 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Acoustic resonator comprising vertically extended acoustic cavity |
US10084425B2 (en) | 2015-05-29 | 2018-09-25 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Acoustic resonator structure having comprising a plurality of connection-side contacts |
US10840266B2 (en) * | 2016-02-16 | 2020-11-17 | Sharp Kabushiki Kaisha | Scanning antenna |
US11228299B2 (en) * | 2017-02-02 | 2022-01-18 | Taiyo Yuden Co., Ltd. | Piezoelectric thin film resonator with insertion film, filter, and multiplexer |
WO2018187742A1 (en) * | 2017-04-06 | 2018-10-11 | Arizona Board Of Regents On Behalf Of The University Of Arizona | Systems and methods for a quantum-analogue computer |
JP7037336B2 (ja) * | 2017-11-16 | 2022-03-16 | 太陽誘電株式会社 | 弾性波デバイスおよびその製造方法、フィルタ並びにマルチプレクサ |
US10911023B2 (en) | 2018-06-15 | 2021-02-02 | Resonant Inc. | Transversely-excited film bulk acoustic resonator with etch-stop layer |
US11996827B2 (en) | 2018-06-15 | 2024-05-28 | Murata Manufacturing Co., Ltd. | Transversely-excited film bulk acoustic resonator with periodic etched holes |
US11146232B2 (en) | 2018-06-15 | 2021-10-12 | Resonant Inc. | Transversely-excited film bulk acoustic resonator with reduced spurious modes |
US10790802B2 (en) | 2018-06-15 | 2020-09-29 | Resonant Inc. | Transversely excited film bulk acoustic resonator using rotated Y-X cut lithium niobate |
US11929731B2 (en) | 2018-02-18 | 2024-03-12 | Murata Manufacturing Co., Ltd. | Transversely-excited film bulk acoustic resonator with optimized electrode mark, and pitch |
US11206009B2 (en) | 2019-08-28 | 2021-12-21 | Resonant Inc. | Transversely-excited film bulk acoustic resonator with interdigital transducer with varied mark and pitch |
US11323090B2 (en) | 2018-06-15 | 2022-05-03 | Resonant Inc. | Transversely-excited film bulk acoustic resonator using Y-X-cut lithium niobate for high power applications |
US11323089B2 (en) | 2018-06-15 | 2022-05-03 | Resonant Inc. | Filter using piezoelectric film bonded to high resistivity silicon substrate with trap-rich layer |
US20220116015A1 (en) | 2018-06-15 | 2022-04-14 | Resonant Inc. | Transversely-excited film bulk acoustic resonator with optimized electrode thickness, mark, and pitch |
US11936358B2 (en) | 2020-11-11 | 2024-03-19 | Murata Manufacturing Co., Ltd. | Transversely-excited film bulk acoustic resonator with low thermal impedance |
US11146238B2 (en) | 2018-06-15 | 2021-10-12 | Resonant Inc. | Film bulk acoustic resonator fabrication method |
US10998882B2 (en) | 2018-06-15 | 2021-05-04 | Resonant Inc. | XBAR resonators with non-rectangular diaphragms |
US11876498B2 (en) | 2018-06-15 | 2024-01-16 | Murata Manufacturing Co., Ltd. | Transversely-excited film bulk acoustic resonator with multiple diaphragm thicknesses and fabrication method |
US10826462B2 (en) | 2018-06-15 | 2020-11-03 | Resonant Inc. | Transversely-excited film bulk acoustic resonators with molybdenum conductors |
US11264966B2 (en) | 2018-06-15 | 2022-03-01 | Resonant Inc. | Solidly-mounted transversely-excited film bulk acoustic resonator with diamond layers in Bragg reflector stack |
US11870423B2 (en) | 2018-06-15 | 2024-01-09 | Murata Manufacturing Co., Ltd. | Wide bandwidth temperature-compensated transversely-excited film bulk acoustic resonator |
US11909381B2 (en) | 2018-06-15 | 2024-02-20 | Murata Manufacturing Co., Ltd. | Transversely-excited film bulk acoustic resonators with two-layer electrodes having a narrower top layer |
US11374549B2 (en) | 2018-06-15 | 2022-06-28 | Resonant Inc. | Filter using transversely-excited film bulk acoustic resonators with divided frequency-setting dielectric layers |
US11888463B2 (en) | 2018-06-15 | 2024-01-30 | Murata Manufacturing Co., Ltd. | Multi-port filter using transversely-excited film bulk acoustic resonators |
US10797675B2 (en) | 2018-06-15 | 2020-10-06 | Resonant Inc. | Transversely excited film bulk acoustic resonator using rotated z-cut lithium niobate |
US11996822B2 (en) | 2018-06-15 | 2024-05-28 | Murata Manufacturing Co., Ltd. | Wide bandwidth time division duplex transceiver |
US11901878B2 (en) | 2018-06-15 | 2024-02-13 | Murata Manufacturing Co., Ltd. | Transversely-excited film bulk acoustic resonators with two-layer electrodes with a wider top layer |
US11967945B2 (en) | 2018-06-15 | 2024-04-23 | Murata Manufacturing Co., Ltd. | Transversly-excited film bulk acoustic resonators and filters |
US11646714B2 (en) * | 2018-07-10 | 2023-05-09 | Texas Instruments Incorporated | Laterally vibrating bulk acoustic wave resonator |
US10547281B1 (en) * | 2018-07-13 | 2020-01-28 | Qualcomm Incorporated | Source impedance tuning circuit for a receive path |
CN109167638A (zh) * | 2018-07-18 | 2019-01-08 | 黑龙江工商学院 | 深海通信网络节点设备和深海通信网络系统 |
US10630256B2 (en) | 2018-09-07 | 2020-04-21 | Vtt Technical Research Centre Of Finland Ltd | Two-stage lateral bulk acoustic wave filter |
US10756696B2 (en) | 2018-09-10 | 2020-08-25 | Vtt Technical Research Centre Of Finland Ltd | Lateral bulk acoustic wave filter |
DE112019005403T5 (de) * | 2018-10-31 | 2021-07-15 | Resonant Inc. | Fest montierter transversal angeregter akustischer filmvolumenresonator |
US11146241B2 (en) | 2019-02-08 | 2021-10-12 | Vtt Technical Research Centre Of Finland Ltd | Low loss acoustic device |
WO2020186261A1 (en) | 2019-03-14 | 2020-09-17 | Resonant Inc. | Transversely-excited film bulk acoustic resonator with half-lambda dielectric layer |
US11088670B2 (en) * | 2019-09-11 | 2021-08-10 | Vtt Technical Research Centre Of Finland Ltd | Loaded series resonators for adjusting frequency response of acoustic wave resonators |
JP2022548490A (ja) * | 2019-09-18 | 2022-11-21 | フレクエンシス | 弾性波デバイス用の変換器構造体 |
US11223341B2 (en) | 2019-10-22 | 2022-01-11 | Vtt Technical Research Centre Of Finland Ltd | Suppressing parasitic sidebands in lateral bulk acoustic wave resonators |
CN111162748B (zh) * | 2019-10-23 | 2021-06-01 | 诺思(天津)微系统有限责任公司 | 电极具有空隙层的体声波谐振器、滤波器及电子设备 |
CN110931922A (zh) * | 2019-11-25 | 2020-03-27 | 武汉大学 | 一种基于压电双模态谐振器的双通带滤波器 |
CN111917392A (zh) * | 2020-04-14 | 2020-11-10 | 诺思(天津)微系统有限责任公司 | 压电滤波器及其带外抑制改善方法、多工器、通信设备 |
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US3564463A (en) * | 1966-04-11 | 1971-02-16 | Bell Telephone Labor Inc | Monolithic piezoelectric filter having mass loaded electrodes for resonation regions acoustically coupled together |
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JPH11112281A (ja) * | 1997-10-06 | 1999-04-23 | Kyocera Corp | 振動子 |
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EP1935093A2 (en) * | 2005-09-30 | 2008-06-25 | Nxp B.V. | Improvements in or relating to thin-film bulk-acoustic wave (baw) resonators |
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JP2008206139A (ja) * | 2007-01-25 | 2008-09-04 | Matsushita Electric Ind Co Ltd | 二重モード圧電フィルタ、その製造方法、およびそれを用いた高周波回路部品および通信機器 |
US8258894B2 (en) * | 2007-05-31 | 2012-09-04 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Coupled resonator filter with a filter section |
US8810108B2 (en) * | 2010-09-09 | 2014-08-19 | Georgia Tech Research Corporation | Multi-mode bulk-acoustic-wave resonators |
FI20106063A (fi) * | 2010-10-14 | 2012-06-08 | Valtion Teknillinen | Akustisesti kytketty laajakaistainen ohutkalvo-BAW-suodatin |
-
2010
- 2010-10-14 FI FI20106063A patent/FI20106063A/fi not_active IP Right Cessation
-
2011
- 2011-10-14 WO PCT/FI2011/050891 patent/WO2012049372A1/en active Application Filing
- 2011-10-14 CN CN201810521377.XA patent/CN108988819A/zh active Pending
- 2011-10-14 US US13/879,028 patent/US9893712B2/en active Active
- 2011-10-14 JP JP2013533251A patent/JP5926735B2/ja active Active
- 2011-10-14 CN CN2011800498577A patent/CN103222191A/zh active Pending
- 2011-10-14 EP EP11832194.2A patent/EP2628246B1/en active Active
-
2018
- 2018-02-12 US US15/893,717 patent/US10778186B2/en active Active
-
2020
- 2020-08-31 US US17/008,077 patent/US11374551B2/en active Active
-
2022
- 2022-06-27 US US17/849,744 patent/US20220407500A1/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112673568A (zh) * | 2018-09-07 | 2021-04-16 | 芬兰Vtt技术研究中心有限公司 | 用于调整声波谐振器的频率响应的负荷谐振器 |
CN112673568B (zh) * | 2018-09-07 | 2023-09-01 | 芬兰Vtt技术研究中心有限公司 | 用于调整声波谐振器的频率响应的负荷谐振器 |
Also Published As
Publication number | Publication date |
---|---|
US20220407500A1 (en) | 2022-12-22 |
CN103222191A (zh) | 2013-07-24 |
WO2012049372A1 (en) | 2012-04-19 |
FI20106063A (fi) | 2012-06-08 |
CN108988819A (zh) | 2018-12-11 |
US20130278356A1 (en) | 2013-10-24 |
EP2628246A1 (en) | 2013-08-21 |
JP2013539946A (ja) | 2013-10-28 |
US9893712B2 (en) | 2018-02-13 |
US11374551B2 (en) | 2022-06-28 |
US10778186B2 (en) | 2020-09-15 |
US20180212589A1 (en) | 2018-07-26 |
US20210058066A1 (en) | 2021-02-25 |
EP2628246B1 (en) | 2023-05-10 |
JP5926735B2 (ja) | 2016-05-25 |
EP2628246A4 (en) | 2014-06-18 |
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Date | Code | Title | Description |
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MM | Patent lapsed |