FI20106063A0 - Akustiskt kopplat bredbandigt tunnfilms-BAW-filter - Google Patents

Akustiskt kopplat bredbandigt tunnfilms-BAW-filter

Info

Publication number
FI20106063A0
FI20106063A0 FI20106063A FI20106063A FI20106063A0 FI 20106063 A0 FI20106063 A0 FI 20106063A0 FI 20106063 A FI20106063 A FI 20106063A FI 20106063 A FI20106063 A FI 20106063A FI 20106063 A0 FI20106063 A0 FI 20106063A0
Authority
FI
Finland
Prior art keywords
acoustically coupled
thin film
baw filter
piezoelectric layer
film baw
Prior art date
Application number
FI20106063A
Other languages
English (en)
Finnish (fi)
Other versions
FI20106063A (sv
Inventor
Johanna Meltaus
Tuomas Pensala
Original Assignee
Valtion Teknillinen
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Valtion Teknillinen filed Critical Valtion Teknillinen
Priority to FI20106063A priority Critical patent/FI20106063A/sv
Publication of FI20106063A0 publication Critical patent/FI20106063A0/sv
Priority to JP2013533251A priority patent/JP5926735B2/ja
Priority to EP11832194.2A priority patent/EP2628246B1/en
Priority to CN201810521377.XA priority patent/CN108988819A/zh
Priority to PCT/FI2011/050891 priority patent/WO2012049372A1/en
Priority to CN2011800498577A priority patent/CN103222191A/zh
Priority to US13/879,028 priority patent/US9893712B2/en
Publication of FI20106063A publication Critical patent/FI20106063A/sv
Priority to US15/893,717 priority patent/US10778186B2/en
Priority to US17/008,077 priority patent/US11374551B2/en
Priority to US17/849,744 priority patent/US20220407500A1/en

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/547—Notch filters, e.g. notch BAW or thin film resonator filters
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/56—Monolithic crystal filters
    • H03H9/564—Monolithic crystal filters implemented with thin-film techniques
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/56—Monolithic crystal filters
    • H03H9/566—Electric coupling means therefor
    • H03H9/568—Electric coupling means therefor consisting of a ladder configuration

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
FI20106063A 2010-10-14 2010-10-14 Akustiskt kopplat bredbandigt tunnfilms-BAW-filter FI20106063A (sv)

Priority Applications (10)

Application Number Priority Date Filing Date Title
FI20106063A FI20106063A (sv) 2010-10-14 2010-10-14 Akustiskt kopplat bredbandigt tunnfilms-BAW-filter
US13/879,028 US9893712B2 (en) 2010-10-14 2011-10-14 Wide-band acoustically coupled thin-film BAW filter
PCT/FI2011/050891 WO2012049372A1 (en) 2010-10-14 2011-10-14 Wide-band acoustically coupled thin-film baw filter
EP11832194.2A EP2628246B1 (en) 2010-10-14 2011-10-14 Wide-band acoustically coupled thin-film baw filter
CN201810521377.XA CN108988819A (zh) 2010-10-14 2011-10-14 宽带声耦合薄膜baw滤波器
JP2013533251A JP5926735B2 (ja) 2010-10-14 2011-10-14 広帯域音響結合薄膜ｂａｗフィルタ
CN2011800498577A CN103222191A (zh) 2010-10-14 2011-10-14 宽带声耦合薄膜baw滤波器
US15/893,717 US10778186B2 (en) 2010-10-14 2018-02-12 Wide-band acoustically coupled thin-film BAW filter
US17/008,077 US11374551B2 (en) 2010-10-14 2020-08-31 Wide-band acoustically coupled thin-film BAW filter
US17/849,744 US20220407500A1 (en) 2010-10-14 2022-06-27 Wide-band acoustically coupled thin-film BAW filter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FI20106063A FI20106063A (sv) 2010-10-14 2010-10-14 Akustiskt kopplat bredbandigt tunnfilms-BAW-filter

Publications (2)

Publication Number Publication Date
FI20106063A0 true FI20106063A0 (sv) 2010-10-14
FI20106063A FI20106063A (sv) 2012-06-08

Family

ID=43064221

Family Applications (1)

Application Number Title Priority Date Filing Date
FI20106063A FI20106063A (sv) 2010-10-14 2010-10-14 Akustiskt kopplat bredbandigt tunnfilms-BAW-filter

Country Status (6)

Country Link
US (4) US9893712B2 (sv)
EP (1) EP2628246B1 (sv)
JP (1) JP5926735B2 (sv)
CN (2) CN103222191A (sv)
FI (1) FI20106063A (sv)
WO (1) WO2012049372A1 (sv)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112673568A (zh) * 2018-09-07 2021-04-16 芬兰Vtt技术研究中心有限公司 用于调整声波谐振器的频率响应的负荷谐振器

Families Citing this family (64)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI20106063A (sv) 2010-10-14 2012-06-08 Valtion Teknillinen Akustiskt kopplat bredbandigt tunnfilms-BAW-filter
FI124732B (sv) * 2011-11-11 2014-12-31 Teknologian Tutkimuskeskus Vtt Lateralt kopplat bulkvågsfilter med förbättrade passbandsegenskaper
US20140127857A1 (en) * 2012-11-07 2014-05-08 Taiwan Semiconductor Manufacturing Company, Ltd. Carrier Wafers, Methods of Manufacture Thereof, and Packaging Methods
DE102012111889B9 (de) * 2012-12-06 2014-09-04 Epcos Ag Elektroakustischer Wandler
CN103929148B (zh) * 2013-01-11 2017-09-19 中兴通讯股份有限公司 一种低插损压电声波带通滤波器及实现方法
US9281800B2 (en) 2014-01-24 2016-03-08 Avago Technologies General Ip (Singapore) Pte. Ltd. Resonator filter device having narrow pass-band
US20160079958A1 (en) * 2014-05-30 2016-03-17 Avago Technologies General Ip (Singapore) Pte. Ltd. Acoustic resonator comprising vertically extended acoustic cavity
US10084425B2 (en) 2015-05-29 2018-09-25 Avago Technologies General Ip (Singapore) Pte. Ltd. Acoustic resonator structure having comprising a plurality of connection-side contacts
US10840266B2 (en) * 2016-02-16 2020-11-17 Sharp Kabushiki Kaisha Scanning antenna
US11228299B2 (en) * 2017-02-02 2022-01-18 Taiyo Yuden Co., Ltd. Piezoelectric thin film resonator with insertion film, filter, and multiplexer
WO2018187742A1 (en) * 2017-04-06 2018-10-11 Arizona Board Of Regents On Behalf Of The University Of Arizona Systems and methods for a quantum-analogue computer
JP7037336B2 (ja) * 2017-11-16 2022-03-16 太陽誘電株式会社 弾性波デバイスおよびその製造方法、フィルタ並びにマルチプレクサ
US11996827B2 (en) 2018-06-15 2024-05-28 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator with periodic etched holes
US11323090B2 (en) 2018-06-15 2022-05-03 Resonant Inc. Transversely-excited film bulk acoustic resonator using Y-X-cut lithium niobate for high power applications
US11323089B2 (en) 2018-06-15 2022-05-03 Resonant Inc. Filter using piezoelectric film bonded to high resistivity silicon substrate with trap-rich layer
US10790802B2 (en) 2018-06-15 2020-09-29 Resonant Inc. Transversely excited film bulk acoustic resonator using rotated Y-X cut lithium niobate
US12088281B2 (en) 2021-02-03 2024-09-10 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator with multi-mark interdigital transducer
US11936358B2 (en) 2020-11-11 2024-03-19 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator with low thermal impedance
US20220116015A1 (en) 2018-06-15 2022-04-14 Resonant Inc. Transversely-excited film bulk acoustic resonator with optimized electrode thickness, mark, and pitch
US11146232B2 (en) 2018-06-15 2021-10-12 Resonant Inc. Transversely-excited film bulk acoustic resonator with reduced spurious modes
US10637438B2 (en) 2018-06-15 2020-04-28 Resonant Inc. Transversely-excited film bulk acoustic resonators for high power applications
US12040779B2 (en) 2020-04-20 2024-07-16 Murata Manufacturing Co., Ltd. Small transversely-excited film bulk acoustic resonators with enhanced Q-factor
US10601392B2 (en) 2018-06-15 2020-03-24 Resonant Inc. Solidly-mounted transversely-excited film bulk acoustic resonator
US11509279B2 (en) 2020-07-18 2022-11-22 Resonant Inc. Acoustic resonators and filters with reduced temperature coefficient of frequency
US11206009B2 (en) 2019-08-28 2021-12-21 Resonant Inc. Transversely-excited film bulk acoustic resonator with interdigital transducer with varied mark and pitch
US10911023B2 (en) 2018-06-15 2021-02-02 Resonant Inc. Transversely-excited film bulk acoustic resonator with etch-stop layer
US11929731B2 (en) 2018-02-18 2024-03-12 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator with optimized electrode mark, and pitch
US12095441B2 (en) 2018-06-15 2024-09-17 Murata Manufacturing Co., Ltd. Transversely excited film bulk acoustic resonator with recessed interdigital transducer fingers
US11996822B2 (en) 2018-06-15 2024-05-28 Murata Manufacturing Co., Ltd. Wide bandwidth time division duplex transceiver
US12088280B2 (en) 2018-06-15 2024-09-10 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator package
US12040781B2 (en) 2018-06-15 2024-07-16 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator package
US12009798B2 (en) 2018-06-15 2024-06-11 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonators with electrodes having irregular hexagon cross-sectional shapes
US12081187B2 (en) 2018-06-15 2024-09-03 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator
US10998882B2 (en) 2018-06-15 2021-05-04 Resonant Inc. XBAR resonators with non-rectangular diaphragms
US11888463B2 (en) 2018-06-15 2024-01-30 Murata Manufacturing Co., Ltd. Multi-port filter using transversely-excited film bulk acoustic resonators
US11146238B2 (en) 2018-06-15 2021-10-12 Resonant Inc. Film bulk acoustic resonator fabrication method
US11876498B2 (en) 2018-06-15 2024-01-16 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator with multiple diaphragm thicknesses and fabrication method
US11909381B2 (en) 2018-06-15 2024-02-20 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonators with two-layer electrodes having a narrower top layer
US11323091B2 (en) 2018-06-15 2022-05-03 Resonant Inc. Transversely-excited film bulk acoustic resonator with diaphragm support pedestals
US11870423B2 (en) 2018-06-15 2024-01-09 Murata Manufacturing Co., Ltd. Wide bandwidth temperature-compensated transversely-excited film bulk acoustic resonator
US11967945B2 (en) 2018-06-15 2024-04-23 Murata Manufacturing Co., Ltd. Transversly-excited film bulk acoustic resonators and filters
US11264966B2 (en) 2018-06-15 2022-03-01 Resonant Inc. Solidly-mounted transversely-excited film bulk acoustic resonator with diamond layers in Bragg reflector stack
US11374549B2 (en) 2018-06-15 2022-06-28 Resonant Inc. Filter using transversely-excited film bulk acoustic resonators with divided frequency-setting dielectric layers
US10985728B2 (en) 2018-06-15 2021-04-20 Resonant Inc. Transversely-excited film bulk acoustic resonator and filter with a uniform-thickness dielectric overlayer
US10826462B2 (en) 2018-06-15 2020-11-03 Resonant Inc. Transversely-excited film bulk acoustic resonators with molybdenum conductors
US10797675B2 (en) 2018-06-15 2020-10-06 Resonant Inc. Transversely excited film bulk acoustic resonator using rotated z-cut lithium niobate
US11901878B2 (en) 2018-06-15 2024-02-13 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonators with two-layer electrodes with a wider top layer
US11646714B2 (en) * 2018-07-10 2023-05-09 Texas Instruments Incorporated Laterally vibrating bulk acoustic wave resonator
US10547281B1 (en) * 2018-07-13 2020-01-28 Qualcomm Incorporated Source impedance tuning circuit for a receive path
CN109167638A (zh) * 2018-07-18 2019-01-08 黑龙江工商学院 深海通信网络节点设备和深海通信网络系统
US10630256B2 (en) 2018-09-07 2020-04-21 Vtt Technical Research Centre Of Finland Ltd Two-stage lateral bulk acoustic wave filter
US10756696B2 (en) 2018-09-10 2020-08-25 Vtt Technical Research Centre Of Finland Ltd Lateral bulk acoustic wave filter
CN118523744A (zh) * 2018-10-31 2024-08-20 株式会社村田制作所 固态装配型横向激励的薄膜体声波谐振器
US11146241B2 (en) 2019-02-08 2021-10-12 Vtt Technical Research Centre Of Finland Ltd Low loss acoustic device
DE112020001227T5 (de) 2019-03-14 2022-02-10 Resonant Inc. Transversal angeregter akustischer Filmresonator mit Lambda-Halbe-Dielektrikumschicht
DE112020001765T5 (de) 2019-04-05 2021-12-23 Resonant Inc. Packung eines transversal angeregten akustischen Filmvolumenresonators und Verfahren
US11088670B2 (en) * 2019-09-11 2021-08-10 Vtt Technical Research Centre Of Finland Ltd Loaded series resonators for adjusting frequency response of acoustic wave resonators
WO2021053399A2 (en) * 2019-09-18 2021-03-25 Frec'n'sys Transducer structure for an acoustic wave device
US11223341B2 (en) 2019-10-22 2022-01-11 Vtt Technical Research Centre Of Finland Ltd Suppressing parasitic sidebands in lateral bulk acoustic wave resonators
CN111162748B (zh) * 2019-10-23 2021-06-01 诺思(天津)微系统有限责任公司 电极具有空隙层的体声波谐振器、滤波器及电子设备
CN110931922A (zh) * 2019-11-25 2020-03-27 武汉大学 一种基于压电双模态谐振器的双通带滤波器
CN111917392A (zh) * 2020-04-14 2020-11-10 诺思(天津)微系统有限责任公司 压电滤波器及其带外抑制改善方法、多工器、通信设备
US12003226B2 (en) 2020-11-11 2024-06-04 Murata Manufacturing Co., Ltd Transversely-excited film bulk acoustic resonator with low thermal impedance
US20230107820A1 (en) * 2021-10-04 2023-04-06 Skyworks Solutions, Inc. Assembly with partially embedded interdigital transducer electrode

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3564463A (en) * 1966-04-11 1971-02-16 Bell Telephone Labor Inc Monolithic piezoelectric filter having mass loaded electrodes for resonation regions acoustically coupled together
US3944951A (en) * 1974-11-21 1976-03-16 Bell Telephone Laboratories, Incorporated Monolithic crystal filter
JPS5545284A (en) * 1978-09-27 1980-03-29 Toyo Commun Equip Co Ltd Slip wave crystal vibration device
JPH11112281A (ja) * 1997-10-06 1999-04-23 Kyocera Corp 振動子
JP3303772B2 (ja) * 1998-04-20 2002-07-22 株式会社村田製作所 圧電体素子
GB0014630D0 (en) * 2000-06-16 2000-08-09 Koninkl Philips Electronics Nv Bulk accoustic wave filter
GB0014963D0 (en) * 2000-06-20 2000-08-09 Koninkl Philips Electronics Nv A bulk acoustic wave device
US6670866B2 (en) * 2002-01-09 2003-12-30 Nokia Corporation Bulk acoustic wave resonator with two piezoelectric layers as balun in filters and duplexers
EP1702407A1 (en) * 2003-10-06 2006-09-20 Philips Intellectual Property & Standards GmbH Resonator structure and method of producing it
KR101323447B1 (ko) * 2003-10-06 2013-10-29 트리퀸트 세미컨덕터 인코퍼레이티드 사다리형 필터, 무선 주파수 대역 통과 필터, 무선 주파수 수신기 및 송신기 장치, 무선 주파수 수신기 장치 및 무선 주파수 송신기 장치
US7098758B2 (en) * 2004-11-03 2006-08-29 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Acoustically coupled thin-film resonators having an electrode with a tapered edge
US8058768B2 (en) * 2005-05-27 2011-11-15 Triquint Semiconductor, Inc. Bulk acoustic wave resonator device
US8008993B2 (en) * 2005-09-30 2011-08-30 Nxp B.V. Thin-film bulk-acoustic wave (BAW) resonators
WO2007060557A1 (en) * 2005-11-25 2007-05-31 Nxp B.V. Bulk acoustic wave resonator device
DE102005061344A1 (de) * 2005-12-21 2007-06-28 Epcos Ag Mit akustischen Volumenwellen arbeitender Resonator
US7847656B2 (en) * 2006-07-27 2010-12-07 Georgia Tech Research Corporation Monolithic thin-film piezoelectric filters
US7893793B2 (en) * 2006-08-25 2011-02-22 Panasonic Corporation Film bulk acoustic wave resonator and method for manufacturing the same
JP2008079294A (ja) * 2006-08-25 2008-04-03 Matsushita Electric Ind Co Ltd 薄膜弾性波共振器およびその製造方法
JP2008206139A (ja) * 2007-01-25 2008-09-04 Matsushita Electric Ind Co Ltd 二重モード圧電フィルタ、その製造方法、およびそれを用いた高周波回路部品および通信機器
US8258894B2 (en) * 2007-05-31 2012-09-04 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Coupled resonator filter with a filter section
US8810108B2 (en) * 2010-09-09 2014-08-19 Georgia Tech Research Corporation Multi-mode bulk-acoustic-wave resonators
FI20106063A (sv) * 2010-10-14 2012-06-08 Valtion Teknillinen Akustiskt kopplat bredbandigt tunnfilms-BAW-filter

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112673568A (zh) * 2018-09-07 2021-04-16 芬兰Vtt技术研究中心有限公司 用于调整声波谐振器的频率响应的负荷谐振器
CN112673568B (zh) * 2018-09-07 2023-09-01 芬兰Vtt技术研究中心有限公司 用于调整声波谐振器的频率响应的负荷谐振器

Also Published As

Publication number Publication date
US10778186B2 (en) 2020-09-15
JP2013539946A (ja) 2013-10-28
US20130278356A1 (en) 2013-10-24
US9893712B2 (en) 2018-02-13
EP2628246A1 (en) 2013-08-21
US20180212589A1 (en) 2018-07-26
US20210058066A1 (en) 2021-02-25
US11374551B2 (en) 2022-06-28
US20220407500A1 (en) 2022-12-22
EP2628246B1 (en) 2023-05-10
CN108988819A (zh) 2018-12-11
JP5926735B2 (ja) 2016-05-25
FI20106063A (sv) 2012-06-08
WO2012049372A1 (en) 2012-04-19
EP2628246A4 (en) 2014-06-18
CN103222191A (zh) 2013-07-24

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