FI20106063A0 - Akustiskt kopplat bredbandigt tunnfilms-BAW-filter - Google Patents
Akustiskt kopplat bredbandigt tunnfilms-BAW-filterInfo
- Publication number
- FI20106063A0 FI20106063A0 FI20106063A FI20106063A FI20106063A0 FI 20106063 A0 FI20106063 A0 FI 20106063A0 FI 20106063 A FI20106063 A FI 20106063A FI 20106063 A FI20106063 A FI 20106063A FI 20106063 A0 FI20106063 A0 FI 20106063A0
- Authority
- FI
- Finland
- Prior art keywords
- acoustically coupled
- thin film
- baw filter
- piezoelectric layer
- film baw
- Prior art date
Links
- 239000010409 thin film Substances 0.000 title abstract 2
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
- H03H9/547—Notch filters, e.g. notch BAW or thin film resonator filters
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
- H03H9/56—Monolithic crystal filters
- H03H9/564—Monolithic crystal filters implemented with thin-film techniques
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
- H03H9/56—Monolithic crystal filters
- H03H9/566—Electric coupling means therefor
- H03H9/568—Electric coupling means therefor consisting of a ladder configuration
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (10)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FI20106063A FI20106063A (sv) | 2010-10-14 | 2010-10-14 | Akustiskt kopplat bredbandigt tunnfilms-BAW-filter |
US13/879,028 US9893712B2 (en) | 2010-10-14 | 2011-10-14 | Wide-band acoustically coupled thin-film BAW filter |
PCT/FI2011/050891 WO2012049372A1 (en) | 2010-10-14 | 2011-10-14 | Wide-band acoustically coupled thin-film baw filter |
EP11832194.2A EP2628246B1 (en) | 2010-10-14 | 2011-10-14 | Wide-band acoustically coupled thin-film baw filter |
CN201810521377.XA CN108988819A (zh) | 2010-10-14 | 2011-10-14 | 宽带声耦合薄膜baw滤波器 |
JP2013533251A JP5926735B2 (ja) | 2010-10-14 | 2011-10-14 | 広帯域音響結合薄膜bawフィルタ |
CN2011800498577A CN103222191A (zh) | 2010-10-14 | 2011-10-14 | 宽带声耦合薄膜baw滤波器 |
US15/893,717 US10778186B2 (en) | 2010-10-14 | 2018-02-12 | Wide-band acoustically coupled thin-film BAW filter |
US17/008,077 US11374551B2 (en) | 2010-10-14 | 2020-08-31 | Wide-band acoustically coupled thin-film BAW filter |
US17/849,744 US20220407500A1 (en) | 2010-10-14 | 2022-06-27 | Wide-band acoustically coupled thin-film BAW filter |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FI20106063A FI20106063A (sv) | 2010-10-14 | 2010-10-14 | Akustiskt kopplat bredbandigt tunnfilms-BAW-filter |
Publications (2)
Publication Number | Publication Date |
---|---|
FI20106063A0 true FI20106063A0 (sv) | 2010-10-14 |
FI20106063A FI20106063A (sv) | 2012-06-08 |
Family
ID=43064221
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FI20106063A FI20106063A (sv) | 2010-10-14 | 2010-10-14 | Akustiskt kopplat bredbandigt tunnfilms-BAW-filter |
Country Status (6)
Country | Link |
---|---|
US (4) | US9893712B2 (sv) |
EP (1) | EP2628246B1 (sv) |
JP (1) | JP5926735B2 (sv) |
CN (2) | CN103222191A (sv) |
FI (1) | FI20106063A (sv) |
WO (1) | WO2012049372A1 (sv) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112673568A (zh) * | 2018-09-07 | 2021-04-16 | 芬兰Vtt技术研究中心有限公司 | 用于调整声波谐振器的频率响应的负荷谐振器 |
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US20140127857A1 (en) * | 2012-11-07 | 2014-05-08 | Taiwan Semiconductor Manufacturing Company, Ltd. | Carrier Wafers, Methods of Manufacture Thereof, and Packaging Methods |
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US9281800B2 (en) | 2014-01-24 | 2016-03-08 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Resonator filter device having narrow pass-band |
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US10084425B2 (en) | 2015-05-29 | 2018-09-25 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Acoustic resonator structure having comprising a plurality of connection-side contacts |
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US20220116015A1 (en) | 2018-06-15 | 2022-04-14 | Resonant Inc. | Transversely-excited film bulk acoustic resonator with optimized electrode thickness, mark, and pitch |
US11146232B2 (en) | 2018-06-15 | 2021-10-12 | Resonant Inc. | Transversely-excited film bulk acoustic resonator with reduced spurious modes |
US10637438B2 (en) | 2018-06-15 | 2020-04-28 | Resonant Inc. | Transversely-excited film bulk acoustic resonators for high power applications |
US12040779B2 (en) | 2020-04-20 | 2024-07-16 | Murata Manufacturing Co., Ltd. | Small transversely-excited film bulk acoustic resonators with enhanced Q-factor |
US10601392B2 (en) | 2018-06-15 | 2020-03-24 | Resonant Inc. | Solidly-mounted transversely-excited film bulk acoustic resonator |
US11509279B2 (en) | 2020-07-18 | 2022-11-22 | Resonant Inc. | Acoustic resonators and filters with reduced temperature coefficient of frequency |
US11206009B2 (en) | 2019-08-28 | 2021-12-21 | Resonant Inc. | Transversely-excited film bulk acoustic resonator with interdigital transducer with varied mark and pitch |
US10911023B2 (en) | 2018-06-15 | 2021-02-02 | Resonant Inc. | Transversely-excited film bulk acoustic resonator with etch-stop layer |
US11929731B2 (en) | 2018-02-18 | 2024-03-12 | Murata Manufacturing Co., Ltd. | Transversely-excited film bulk acoustic resonator with optimized electrode mark, and pitch |
US12095441B2 (en) | 2018-06-15 | 2024-09-17 | Murata Manufacturing Co., Ltd. | Transversely excited film bulk acoustic resonator with recessed interdigital transducer fingers |
US11996822B2 (en) | 2018-06-15 | 2024-05-28 | Murata Manufacturing Co., Ltd. | Wide bandwidth time division duplex transceiver |
US12088280B2 (en) | 2018-06-15 | 2024-09-10 | Murata Manufacturing Co., Ltd. | Transversely-excited film bulk acoustic resonator package |
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US12009798B2 (en) | 2018-06-15 | 2024-06-11 | Murata Manufacturing Co., Ltd. | Transversely-excited film bulk acoustic resonators with electrodes having irregular hexagon cross-sectional shapes |
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US11146238B2 (en) | 2018-06-15 | 2021-10-12 | Resonant Inc. | Film bulk acoustic resonator fabrication method |
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US11967945B2 (en) | 2018-06-15 | 2024-04-23 | Murata Manufacturing Co., Ltd. | Transversly-excited film bulk acoustic resonators and filters |
US11264966B2 (en) | 2018-06-15 | 2022-03-01 | Resonant Inc. | Solidly-mounted transversely-excited film bulk acoustic resonator with diamond layers in Bragg reflector stack |
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US10826462B2 (en) | 2018-06-15 | 2020-11-03 | Resonant Inc. | Transversely-excited film bulk acoustic resonators with molybdenum conductors |
US10797675B2 (en) | 2018-06-15 | 2020-10-06 | Resonant Inc. | Transversely excited film bulk acoustic resonator using rotated z-cut lithium niobate |
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US11646714B2 (en) * | 2018-07-10 | 2023-05-09 | Texas Instruments Incorporated | Laterally vibrating bulk acoustic wave resonator |
US10547281B1 (en) * | 2018-07-13 | 2020-01-28 | Qualcomm Incorporated | Source impedance tuning circuit for a receive path |
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US10630256B2 (en) | 2018-09-07 | 2020-04-21 | Vtt Technical Research Centre Of Finland Ltd | Two-stage lateral bulk acoustic wave filter |
US10756696B2 (en) | 2018-09-10 | 2020-08-25 | Vtt Technical Research Centre Of Finland Ltd | Lateral bulk acoustic wave filter |
CN118523744A (zh) * | 2018-10-31 | 2024-08-20 | 株式会社村田制作所 | 固态装配型横向激励的薄膜体声波谐振器 |
US11146241B2 (en) | 2019-02-08 | 2021-10-12 | Vtt Technical Research Centre Of Finland Ltd | Low loss acoustic device |
DE112020001227T5 (de) | 2019-03-14 | 2022-02-10 | Resonant Inc. | Transversal angeregter akustischer Filmresonator mit Lambda-Halbe-Dielektrikumschicht |
DE112020001765T5 (de) | 2019-04-05 | 2021-12-23 | Resonant Inc. | Packung eines transversal angeregten akustischen Filmvolumenresonators und Verfahren |
US11088670B2 (en) * | 2019-09-11 | 2021-08-10 | Vtt Technical Research Centre Of Finland Ltd | Loaded series resonators for adjusting frequency response of acoustic wave resonators |
WO2021053399A2 (en) * | 2019-09-18 | 2021-03-25 | Frec'n'sys | Transducer structure for an acoustic wave device |
US11223341B2 (en) | 2019-10-22 | 2022-01-11 | Vtt Technical Research Centre Of Finland Ltd | Suppressing parasitic sidebands in lateral bulk acoustic wave resonators |
CN111162748B (zh) * | 2019-10-23 | 2021-06-01 | 诺思(天津)微系统有限责任公司 | 电极具有空隙层的体声波谐振器、滤波器及电子设备 |
CN110931922A (zh) * | 2019-11-25 | 2020-03-27 | 武汉大学 | 一种基于压电双模态谐振器的双通带滤波器 |
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US20230107820A1 (en) * | 2021-10-04 | 2023-04-06 | Skyworks Solutions, Inc. | Assembly with partially embedded interdigital transducer electrode |
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FI20106063A (sv) * | 2010-10-14 | 2012-06-08 | Valtion Teknillinen | Akustiskt kopplat bredbandigt tunnfilms-BAW-filter |
-
2010
- 2010-10-14 FI FI20106063A patent/FI20106063A/sv not_active IP Right Cessation
-
2011
- 2011-10-14 CN CN2011800498577A patent/CN103222191A/zh active Pending
- 2011-10-14 JP JP2013533251A patent/JP5926735B2/ja active Active
- 2011-10-14 EP EP11832194.2A patent/EP2628246B1/en active Active
- 2011-10-14 US US13/879,028 patent/US9893712B2/en active Active
- 2011-10-14 CN CN201810521377.XA patent/CN108988819A/zh active Pending
- 2011-10-14 WO PCT/FI2011/050891 patent/WO2012049372A1/en active Application Filing
-
2018
- 2018-02-12 US US15/893,717 patent/US10778186B2/en active Active
-
2020
- 2020-08-31 US US17/008,077 patent/US11374551B2/en active Active
-
2022
- 2022-06-27 US US17/849,744 patent/US20220407500A1/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112673568A (zh) * | 2018-09-07 | 2021-04-16 | 芬兰Vtt技术研究中心有限公司 | 用于调整声波谐振器的频率响应的负荷谐振器 |
CN112673568B (zh) * | 2018-09-07 | 2023-09-01 | 芬兰Vtt技术研究中心有限公司 | 用于调整声波谐振器的频率响应的负荷谐振器 |
Also Published As
Publication number | Publication date |
---|---|
US10778186B2 (en) | 2020-09-15 |
JP2013539946A (ja) | 2013-10-28 |
US20130278356A1 (en) | 2013-10-24 |
US9893712B2 (en) | 2018-02-13 |
EP2628246A1 (en) | 2013-08-21 |
US20180212589A1 (en) | 2018-07-26 |
US20210058066A1 (en) | 2021-02-25 |
US11374551B2 (en) | 2022-06-28 |
US20220407500A1 (en) | 2022-12-22 |
EP2628246B1 (en) | 2023-05-10 |
CN108988819A (zh) | 2018-12-11 |
JP5926735B2 (ja) | 2016-05-25 |
FI20106063A (sv) | 2012-06-08 |
WO2012049372A1 (en) | 2012-04-19 |
EP2628246A4 (en) | 2014-06-18 |
CN103222191A (zh) | 2013-07-24 |
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Legal Events
Date | Code | Title | Description |
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MM | Patent lapsed |