FI20106063A - Akustisesti kytketty laajakaistainen ohutkalvo-BAW-suodatin - Google Patents

Akustisesti kytketty laajakaistainen ohutkalvo-BAW-suodatin Download PDF

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Publication number
FI20106063A
FI20106063A FI20106063A FI20106063A FI20106063A FI 20106063 A FI20106063 A FI 20106063A FI 20106063 A FI20106063 A FI 20106063A FI 20106063 A FI20106063 A FI 20106063A FI 20106063 A FI20106063 A FI 20106063A
Authority
FI
Finland
Prior art keywords
acoustically coupled
thin film
baw filter
piezoelectric layer
film baw
Prior art date
Application number
FI20106063A
Other languages
English (en)
Swedish (sv)
Other versions
FI20106063A0 (fi
Inventor
Johanna Meltaus
Tuomas Pensala
Original Assignee
Valtion Teknillinen
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Valtion Teknillinen filed Critical Valtion Teknillinen
Priority to FI20106063A priority Critical patent/FI20106063A/fi
Publication of FI20106063A0 publication Critical patent/FI20106063A0/fi
Priority to JP2013533251A priority patent/JP5926735B2/ja
Priority to EP11832194.2A priority patent/EP2628246B1/en
Priority to CN2011800498577A priority patent/CN103222191A/zh
Priority to CN201810521377.XA priority patent/CN108988819A/zh
Priority to PCT/FI2011/050891 priority patent/WO2012049372A1/en
Priority to US13/879,028 priority patent/US9893712B2/en
Publication of FI20106063A publication Critical patent/FI20106063A/fi
Priority to US15/893,717 priority patent/US10778186B2/en
Priority to US17/008,077 priority patent/US11374551B2/en
Priority to US17/849,744 priority patent/US20220407500A1/en

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezo-electric or electrostrictive material
    • H03H9/547—Notch filters, e.g. notch BAW or thin film resonator filters
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezo-electric or electrostrictive material
    • H03H9/56—Monolithic crystal filters
    • H03H9/564—Monolithic crystal filters implemented with thin-film techniques
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezo-electric or electrostrictive material
    • H03H9/56—Monolithic crystal filters
    • H03H9/566—Electric coupling means therefor
    • H03H9/568—Electric coupling means therefor consisting of a ladder configuration
FI20106063A 2010-10-14 2010-10-14 Akustisesti kytketty laajakaistainen ohutkalvo-BAW-suodatin FI20106063A (fi)

Priority Applications (10)

Application Number Priority Date Filing Date Title
FI20106063A FI20106063A (fi) 2010-10-14 2010-10-14 Akustisesti kytketty laajakaistainen ohutkalvo-BAW-suodatin
US13/879,028 US9893712B2 (en) 2010-10-14 2011-10-14 Wide-band acoustically coupled thin-film BAW filter
CN201810521377.XA CN108988819A (zh) 2010-10-14 2011-10-14 宽带声耦合薄膜baw滤波器
EP11832194.2A EP2628246B1 (en) 2010-10-14 2011-10-14 Wide-band acoustically coupled thin-film baw filter
CN2011800498577A CN103222191A (zh) 2010-10-14 2011-10-14 宽带声耦合薄膜baw滤波器
JP2013533251A JP5926735B2 (ja) 2010-10-14 2011-10-14 広帯域音響結合薄膜ｂａｗフィルタ
PCT/FI2011/050891 WO2012049372A1 (en) 2010-10-14 2011-10-14 Wide-band acoustically coupled thin-film baw filter
US15/893,717 US10778186B2 (en) 2010-10-14 2018-02-12 Wide-band acoustically coupled thin-film BAW filter
US17/008,077 US11374551B2 (en) 2010-10-14 2020-08-31 Wide-band acoustically coupled thin-film BAW filter
US17/849,744 US20220407500A1 (en) 2010-10-14 2022-06-27 Wide-band acoustically coupled thin-film BAW filter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FI20106063A FI20106063A (fi) 2010-10-14 2010-10-14 Akustisesti kytketty laajakaistainen ohutkalvo-BAW-suodatin

Publications (2)

Publication Number Publication Date
FI20106063A0 FI20106063A0 (fi) 2010-10-14
FI20106063A true FI20106063A (fi) 2012-06-08

Family

ID=43064221

Family Applications (1)

Application Number Title Priority Date Filing Date
FI20106063A FI20106063A (fi) 2010-10-14 2010-10-14 Akustisesti kytketty laajakaistainen ohutkalvo-BAW-suodatin

Country Status (6)

Country Link
US (4) US9893712B2 (fi)
EP (1) EP2628246B1 (fi)
JP (1) JP5926735B2 (fi)
CN (2) CN108988819A (fi)
FI (1) FI20106063A (fi)
WO (1) WO2012049372A1 (fi)

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FI20106063A (fi) 2010-10-14 2012-06-08 Valtion Teknillinen Akustisesti kytketty laajakaistainen ohutkalvo-BAW-suodatin
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US20140127857A1 (en) * 2012-11-07 2014-05-08 Taiwan Semiconductor Manufacturing Company, Ltd. Carrier Wafers, Methods of Manufacture Thereof, and Packaging Methods
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CN103929148B (zh) * 2013-01-11 2017-09-19 中兴通讯股份有限公司 一种低插损压电声波带通滤波器及实现方法
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US10084425B2 (en) 2015-05-29 2018-09-25 Avago Technologies General Ip (Singapore) Pte. Ltd. Acoustic resonator structure having comprising a plurality of connection-side contacts
WO2017141874A1 (ja) * 2016-02-16 2017-08-24 シャープ株式会社 走査アンテナ
US11228299B2 (en) * 2017-02-02 2022-01-18 Taiyo Yuden Co., Ltd. Piezoelectric thin film resonator with insertion film, filter, and multiplexer
US11032011B2 (en) * 2017-04-06 2021-06-08 Arizona Board Of Regents On Behalf Of The University Of Arizona Systems and methods for a quantum-analogue computer
JP7037336B2 (ja) * 2017-11-16 2022-03-16 太陽誘電株式会社 弾性波デバイスおよびその製造方法、フィルタ並びにマルチプレクサ
US11146232B2 (en) 2018-06-15 2021-10-12 Resonant Inc. Transversely-excited film bulk acoustic resonator with reduced spurious modes
US10790802B2 (en) 2018-06-15 2020-09-29 Resonant Inc. Transversely excited film bulk acoustic resonator using rotated Y-X cut lithium niobate
US20220116015A1 (en) 2018-06-15 2022-04-14 Resonant Inc. Transversely-excited film bulk acoustic resonator with optimized electrode thickness, mark, and pitch
US11936358B2 (en) 2020-11-11 2024-03-19 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator with low thermal impedance
US11206009B2 (en) 2019-08-28 2021-12-21 Resonant Inc. Transversely-excited film bulk acoustic resonator with interdigital transducer with varied mark and pitch
US11929731B2 (en) 2018-02-18 2024-03-12 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator with optimized electrode mark, and pitch
US10911023B2 (en) 2018-06-15 2021-02-02 Resonant Inc. Transversely-excited film bulk acoustic resonator with etch-stop layer
US11374549B2 (en) 2018-06-15 2022-06-28 Resonant Inc. Filter using transversely-excited film bulk acoustic resonators with divided frequency-setting dielectric layers
US10826462B2 (en) 2018-06-15 2020-11-03 Resonant Inc. Transversely-excited film bulk acoustic resonators with molybdenum conductors
US11264966B2 (en) 2018-06-15 2022-03-01 Resonant Inc. Solidly-mounted transversely-excited film bulk acoustic resonator with diamond layers in Bragg reflector stack
US11901878B2 (en) 2018-06-15 2024-02-13 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonators with two-layer electrodes with a wider top layer
US11876498B2 (en) 2018-06-15 2024-01-16 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator with multiple diaphragm thicknesses and fabrication method
US10797675B2 (en) 2018-06-15 2020-10-06 Resonant Inc. Transversely excited film bulk acoustic resonator using rotated z-cut lithium niobate
US11870423B2 (en) 2018-06-15 2024-01-09 Murata Manufacturing Co., Ltd. Wide bandwidth temperature-compensated transversely-excited film bulk acoustic resonator
US11888463B2 (en) 2018-06-15 2024-01-30 Murata Manufacturing Co., Ltd. Multi-port filter using transversely-excited film bulk acoustic resonators
US11909381B2 (en) 2018-06-15 2024-02-20 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonators with two-layer electrodes having a narrower top layer
US11967945B2 (en) 2018-06-15 2024-04-23 Murata Manufacturing Co., Ltd. Transversly-excited film bulk acoustic resonators and filters
US10998882B2 (en) 2018-06-15 2021-05-04 Resonant Inc. XBAR resonators with non-rectangular diaphragms
US11646714B2 (en) * 2018-07-10 2023-05-09 Texas Instruments Incorporated Laterally vibrating bulk acoustic wave resonator
US10547281B1 (en) * 2018-07-13 2020-01-28 Qualcomm Incorporated Source impedance tuning circuit for a receive path
CN109167638A (zh) * 2018-07-18 2019-01-08 黑龙江工商学院 深海通信网络节点设备和深海通信网络系统
US10790801B2 (en) 2018-09-07 2020-09-29 Vtt Technical Research Centre Of Finland Ltd Loaded resonators for adjusting frequency response of acoustic wave resonators
US10630256B2 (en) 2018-09-07 2020-04-21 Vtt Technical Research Centre Of Finland Ltd Two-stage lateral bulk acoustic wave filter
US10756696B2 (en) 2018-09-10 2020-08-25 Vtt Technical Research Centre Of Finland Ltd Lateral bulk acoustic wave filter
CN113169721A (zh) * 2018-10-31 2021-07-23 谐振公司 固态装配型横向激励的薄膜体声波谐振器
US11146241B2 (en) 2019-02-08 2021-10-12 Vtt Technical Research Centre Of Finland Ltd Low loss acoustic device
CN113615083A (zh) 2019-03-14 2021-11-05 谐振公司 带有半λ介电层的横向激励的薄膜体声波谐振器
US11088670B2 (en) * 2019-09-11 2021-08-10 Vtt Technical Research Centre Of Finland Ltd Loaded series resonators for adjusting frequency response of acoustic wave resonators
CN114342257A (zh) * 2019-09-18 2022-04-12 福瑞斯恩系统 声波装置的换能器结构
US11223341B2 (en) 2019-10-22 2022-01-11 Vtt Technical Research Centre Of Finland Ltd Suppressing parasitic sidebands in lateral bulk acoustic wave resonators
CN111162748B (zh) * 2019-10-23 2021-06-01 诺思(天津)微系统有限责任公司 电极具有空隙层的体声波谐振器、滤波器及电子设备
CN110931922A (zh) * 2019-11-25 2020-03-27 武汉大学 一种基于压电双模态谐振器的双通带滤波器
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Also Published As

Publication number Publication date
CN108988819A (zh) 2018-12-11
US9893712B2 (en) 2018-02-13
WO2012049372A1 (en) 2012-04-19
EP2628246B1 (en) 2023-05-10
US20210058066A1 (en) 2021-02-25
EP2628246A1 (en) 2013-08-21
CN103222191A (zh) 2013-07-24
FI20106063A0 (fi) 2010-10-14
US11374551B2 (en) 2022-06-28
US20180212589A1 (en) 2018-07-26
JP5926735B2 (ja) 2016-05-25
US20220407500A1 (en) 2022-12-22
US10778186B2 (en) 2020-09-15
US20130278356A1 (en) 2013-10-24
EP2628246A4 (en) 2014-06-18
JP2013539946A (ja) 2013-10-28

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