ATE449457T1 - Dünnfilm-körper-oberflächenwellenfilter des leitertyps - Google Patents

Dünnfilm-körper-oberflächenwellenfilter des leitertyps

Info

Publication number
ATE449457T1
ATE449457T1 AT04770075T AT04770075T ATE449457T1 AT E449457 T1 ATE449457 T1 AT E449457T1 AT 04770075 T AT04770075 T AT 04770075T AT 04770075 T AT04770075 T AT 04770075T AT E449457 T1 ATE449457 T1 AT E449457T1
Authority
AT
Austria
Prior art keywords
resonators
series
thin film
body surface
wave filter
Prior art date
Application number
AT04770075T
Other languages
English (en)
Inventor
Robert F Milsom
Hans Peter Loebl
Original Assignee
Nxp Bv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nxp Bv filed Critical Nxp Bv
Application granted granted Critical
Publication of ATE449457T1 publication Critical patent/ATE449457T1/de

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/56—Monolithic crystal filters
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/56—Monolithic crystal filters
    • H03H9/564—Monolithic crystal filters implemented with thin-film techniques
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/56—Monolithic crystal filters
    • H03H9/566—Electric coupling means therefor
    • H03H9/568—Electric coupling means therefor consisting of a ladder configuration

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
AT04770075T 2003-10-06 2004-09-24 Dünnfilm-körper-oberflächenwellenfilter des leitertyps ATE449457T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP03103695 2003-10-06
PCT/IB2004/051851 WO2005034349A1 (en) 2003-10-06 2004-09-24 Ladder-type thin-film bulk acoustic wave filter

Publications (1)

Publication Number Publication Date
ATE449457T1 true ATE449457T1 (de) 2009-12-15

Family

ID=34400560

Family Applications (1)

Application Number Title Priority Date Filing Date
AT04770075T ATE449457T1 (de) 2003-10-06 2004-09-24 Dünnfilm-körper-oberflächenwellenfilter des leitertyps

Country Status (8)

Country Link
US (1) US7474174B2 (de)
EP (1) EP1673860B1 (de)
JP (1) JP4719683B2 (de)
KR (1) KR101323447B1 (de)
CN (1) CN100492902C (de)
AT (1) ATE449457T1 (de)
DE (1) DE602004024224D1 (de)
WO (1) WO2005034349A1 (de)

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FI20106063A (fi) * 2010-10-14 2012-06-08 Valtion Teknillinen Akustisesti kytketty laajakaistainen ohutkalvo-BAW-suodatin
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FI124732B (en) * 2011-11-11 2014-12-31 Teknologian Tutkimuskeskus Vtt Laterally connected bulk wave filter with improved passband characteristics
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US9571061B2 (en) 2014-06-06 2017-02-14 Akoustis, Inc. Integrated circuit configured with two or more single crystal acoustic resonator devices
US9537465B1 (en) 2014-06-06 2017-01-03 Akoustis, Inc. Acoustic resonator device with single crystal piezo material and capacitor on a bulk substrate
CN106575957B (zh) * 2014-06-06 2019-12-17 阿库斯蒂斯有限公司 配置有晶体声谐振器设备的集成电路
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US11356071B2 (en) 2016-03-11 2022-06-07 Akoustis, Inc. Piezoelectric acoustic resonator with improved TCF manufactured with piezoelectric thin film transfer process
US11070184B2 (en) 2016-03-11 2021-07-20 Akoustis, Inc. Piezoelectric acoustic resonator manufactured with piezoelectric thin film transfer process
US10979025B2 (en) 2016-03-11 2021-04-13 Akoustis, Inc. 5G band n79 acoustic wave resonator RF filter circuit
US10673513B2 (en) 2016-03-11 2020-06-02 Akoustis, Inc. Front end module for 5.2 GHz Wi-Fi acoustic wave resonator RF filter circuit
US11677372B2 (en) 2016-03-11 2023-06-13 Akoustis, Inc. Piezoelectric acoustic resonator with dielectric protective layer manufactured with piezoelectric thin film transfer process
US10217930B1 (en) 2016-03-11 2019-02-26 Akoustis, Inc. Method of manufacture for single crystal acoustic resonator devices using micro-vias
US10979023B2 (en) 2016-03-11 2021-04-13 Akoustis, Inc. 5.9 GHz c-V2X and DSRC acoustic wave resonator RF filter circuit
US10581398B2 (en) 2016-03-11 2020-03-03 Akoustis, Inc. Method of manufacture for single crystal acoustic resonator devices using micro-vias
US11177868B2 (en) 2016-03-11 2021-11-16 Akoustis, Inc. Front end module for 6.5 GHz Wi-Fi acoustic wave resonator RF filter circuit
US11558023B2 (en) 2016-03-11 2023-01-17 Akoustis, Inc. Method for fabricating an acoustic resonator device
US10985732B2 (en) 2016-03-11 2021-04-20 Akoustis, Inc. 5.6 GHz Wi-Fi acoustic wave resonator RF filter circuit
US20210257993A1 (en) 2016-03-11 2021-08-19 Akoustis, Inc. Acoustic wave resonator rf filter circuit device
US11832521B2 (en) 2017-10-16 2023-11-28 Akoustis, Inc. Methods of forming group III-nitride single crystal piezoelectric thin films using ordered deposition and stress neutral template layers
US10615773B2 (en) 2017-09-11 2020-04-07 Akoustis, Inc. Wireless communication infrastructure system configured with a single crystal piezo resonator and filter structure
US10110190B2 (en) 2016-11-02 2018-10-23 Akoustis, Inc. Structure and method of manufacture for acoustic resonator or filter devices using improved fabrication conditions and perimeter structure modifications
US11451213B2 (en) 2016-03-11 2022-09-20 Akoustis, Inc. 5G n79 Wi-Fi acoustic triplexer circuit
US11689186B2 (en) 2016-03-11 2023-06-27 Akoustis, Inc. 5.5 GHz Wi-Fi 5G coexistence acoustic wave resonator RF filter circuit
US11418169B2 (en) 2016-03-11 2022-08-16 Akoustis, Inc. 5G n41 2.6 GHz band acoustic wave resonator RF filter circuit
US10355659B2 (en) 2016-03-11 2019-07-16 Akoustis, Inc. Piezoelectric acoustic resonator manufactured with piezoelectric thin film transfer process
US11581866B2 (en) 2016-03-11 2023-02-14 Akoustis, Inc. RF acoustic wave resonators integrated with high electron mobility transistors including a shared piezoelectric/buffer layer and methods of forming the same
US10523180B2 (en) 2016-03-11 2019-12-31 Akoustis, Inc. Method and structure for single crystal acoustic resonator devices using thermal recrystallization
US10979022B2 (en) 2016-03-11 2021-04-13 Akoustis, Inc. 5.2 GHz Wi-Fi acoustic wave resonator RF filter circuit
US11411169B2 (en) 2017-10-16 2022-08-09 Akoustis, Inc. Methods of forming group III piezoelectric thin films via removal of portions of first sputtered material
US11683021B2 (en) 2016-03-11 2023-06-20 Akoustis, Inc. 4.5G 3.55-3.7 GHz band bulk acoustic wave resonator RF filter circuit
US10979026B2 (en) 2016-03-11 2021-04-13 Akoustis, Inc. 5.5 GHz Wi-fi 5G coexistence acoustic wave resonator RF filter circuit
US11394451B2 (en) 2016-03-11 2022-07-19 Akoustis, Inc. Front end module for 6.1 GHz Wi-Fi acoustic wave resonator RF filter circuit
US11063576B2 (en) 2016-03-11 2021-07-13 Akoustis, Inc. Front end module for 5.6 GHz Wi-Fi acoustic wave resonator RF filter circuit
US11424728B2 (en) 2016-03-11 2022-08-23 Akoustis, Inc. Piezoelectric acoustic resonator manufactured with piezoelectric thin film transfer process
US11476825B2 (en) 2016-03-11 2022-10-18 Akoustis, Inc. 5.5 GHz Wi-Fi coexistence acoustic wave resonator RF filter circuit
US11736177B2 (en) 2016-03-11 2023-08-22 Akoustis Inc. Front end modules for 5.6 GHz and 6.6 GHz Wi-Fi acoustic wave resonator RF filter circuits
US10979024B2 (en) 2016-03-11 2021-04-13 Akoustis, Inc. 5.2 GHz Wi-Fi coexistence acoustic wave resonator RF filter circuit
US11316496B2 (en) 2016-03-11 2022-04-26 Akoustis, Inc. Method and structure for high performance resonance circuit with single crystal piezoelectric capacitor dielectric material
US11184079B2 (en) 2016-03-11 2021-11-23 Akoustis, Inc. Front end module for 5.5 GHz Wi-Fi acoustic wave resonator RF filter circuit
US11411168B2 (en) 2017-10-16 2022-08-09 Akoustis, Inc. Methods of forming group III piezoelectric thin films via sputtering
US11895920B2 (en) 2016-08-15 2024-02-06 Akoustis, Inc. Methods of forming group III piezoelectric thin films via removal of portions of first sputtered material
WO2018061448A1 (ja) * 2016-09-28 2018-04-05 株式会社村田製作所 ラダー型フィルタ
US10431580B1 (en) 2017-01-12 2019-10-01 Akoustis, Inc. Monolithic single chip integrated radio frequency front end module configured with single crystal acoustic filter devices
US11856858B2 (en) 2017-10-16 2023-12-26 Akoustis, Inc. Methods of forming doped crystalline piezoelectric thin films via MOCVD and related doped crystalline piezoelectric thin films
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JP7205497B2 (ja) * 2018-02-02 2023-01-17 株式会社大真空 圧電フィルタ
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CN112840562A (zh) 2018-08-27 2021-05-25 阿库斯蒂斯有限公司 大功率体声波谐振器滤波器装置
CN111342808B (zh) * 2018-12-18 2023-08-15 天津大学 基于元素掺杂缩小有效面积的谐振器、滤波器和电子设备
US11618968B2 (en) 2020-02-07 2023-04-04 Akoustis, Inc. Apparatus including horizontal flow reactor with a central injector column having separate conduits for low-vapor pressure metalorganic precursors and other precursors for formation of piezoelectric layers on wafers
KR20210123566A (ko) 2020-04-03 2021-10-14 삼성전기주식회사 체적 음향 공진기 및 탄성파 필터 장치
US11496108B2 (en) 2020-08-17 2022-11-08 Akoustis, Inc. RF BAW resonator filter architecture for 6.5GHz Wi-Fi 6E coexistence and other ultra-wideband applications
CN112187212B (zh) * 2020-09-18 2021-12-07 杭州星阖科技有限公司 一种声学谐振器组件及滤波器
US11901880B2 (en) 2021-01-18 2024-02-13 Akoustis, Inc. 5 and 6 GHz Wi-Fi coexistence acoustic wave resonator RF diplexer circuit
CN112511131B (zh) * 2021-02-05 2021-05-25 成都频岢微电子有限公司 一种具有高隔离度和高通频带低频侧高陡峭度的双工器
CN113644895B (zh) * 2021-06-30 2024-02-23 中国电子科技集团公司第十三研究所 薄膜体声波谐振器滤波器及滤波器组件
CN113612464B (zh) * 2021-06-30 2023-06-09 中国电子科技集团公司第十三研究所 阶梯型结构压电滤波器
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Also Published As

Publication number Publication date
US7474174B2 (en) 2009-01-06
DE602004024224D1 (de) 2009-12-31
EP1673860B1 (de) 2009-11-18
JP2007507958A (ja) 2007-03-29
EP1673860A1 (de) 2006-06-28
KR101323447B1 (ko) 2013-10-29
CN1864328A (zh) 2006-11-15
CN100492902C (zh) 2009-05-27
KR20060120007A (ko) 2006-11-24
JP4719683B2 (ja) 2011-07-06
WO2005034349A1 (en) 2005-04-14
US20070120624A1 (en) 2007-05-31

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