JP2015515113A5 - - Google Patents

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Publication number
JP2015515113A5
JP2015515113A5 JP2014552231A JP2014552231A JP2015515113A5 JP 2015515113 A5 JP2015515113 A5 JP 2015515113A5 JP 2014552231 A JP2014552231 A JP 2014552231A JP 2014552231 A JP2014552231 A JP 2014552231A JP 2015515113 A5 JP2015515113 A5 JP 2015515113A5
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JP
Japan
Prior art keywords
membrane
substrate
angle
path
single crystal
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JP2014552231A
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English (en)
Japanese (ja)
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JP2015515113A (ja
JP5970081B2 (ja
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Priority claimed from US13/362,898 external-priority patent/US8757897B2/en
Priority claimed from US13/454,713 external-priority patent/US9323010B2/en
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Publication of JP2015515113A publication Critical patent/JP2015515113A/ja
Publication of JP2015515113A5 publication Critical patent/JP2015515113A5/ja
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JP2014552231A 2012-01-10 2013-01-07 光学用途及び他の用途のための、単結晶シリコン及び／または他の材料を用いて形成された構造体 Active JP5970081B2 (ja)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
US201261585217P 2012-01-10 2012-01-10
US61/585,217 2012-01-10
US13/362,898 US8757897B2 (en) 2012-01-10 2012-01-31 Optical interposer
US13/362,898 2012-01-31
US13/454,713 2012-04-24
US13/454,713 US9323010B2 (en) 2012-01-10 2012-04-24 Structures formed using monocrystalline silicon and/or other materials for optical and other applications
PCT/US2013/020562 WO2013106285A2 (en) 2012-01-10 2013-01-07 Structures formed using monocrystalline silicon and/or other materials for optical and other applications

Publications (3)

Publication Number Publication Date
JP2015515113A JP2015515113A (ja) 2015-05-21
JP2015515113A5 true JP2015515113A5 (enExample) 2016-02-12
JP5970081B2 JP5970081B2 (ja) 2016-08-17

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JP2014552231A Active JP5970081B2 (ja) 2012-01-10 2013-01-07 光学用途及び他の用途のための、単結晶シリコン及び／または他の材料を用いて形成された構造体

Country Status (7)

Country Link
US (1) US9323010B2 (enExample)
EP (2) EP2802915B1 (enExample)
JP (1) JP5970081B2 (enExample)
KR (2) KR101955060B1 (enExample)
CN (2) CN104364688B (enExample)
TW (2) TWI539191B (enExample)
WO (2) WO2013106285A2 (enExample)

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