JP2015509304A5 - - Google Patents

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Publication number
JP2015509304A5
JP2015509304A5 JP2014548280A JP2014548280A JP2015509304A5 JP 2015509304 A5 JP2015509304 A5 JP 2015509304A5 JP 2014548280 A JP2014548280 A JP 2014548280A JP 2014548280 A JP2014548280 A JP 2014548280A JP 2015509304 A5 JP2015509304 A5 JP 2015509304A5
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JP
Japan
Prior art keywords
substrate
cavity
transducer device
ultrasonic transducer
layer
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Application number
JP2014548280A
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English (en)
Japanese (ja)
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JP2015509304A (ja
JP6069798B2 (ja
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Priority claimed from PCT/IB2012/057273 external-priority patent/WO2013093728A1/en
Publication of JP2015509304A publication Critical patent/JP2015509304A/ja
Publication of JP2015509304A5 publication Critical patent/JP2015509304A5/ja
Application granted granted Critical
Publication of JP6069798B2 publication Critical patent/JP6069798B2/ja
Active legal-status Critical Current
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JP2014548280A 2011-12-20 2012-12-13 超音波トランスデューサデバイス及びこれを製造する方法 Active JP6069798B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201161577704P 2011-12-20 2011-12-20
US61/577,704 2011-12-20
PCT/IB2012/057273 WO2013093728A1 (en) 2011-12-20 2012-12-13 Ultrasound transducer device and method of manufacturing the same

Publications (3)

Publication Number Publication Date
JP2015509304A JP2015509304A (ja) 2015-03-26
JP2015509304A5 true JP2015509304A5 (enExample) 2016-01-28
JP6069798B2 JP6069798B2 (ja) 2017-02-01

Family

ID=47631486

Family Applications (1)

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JP2014548280A Active JP6069798B2 (ja) 2011-12-20 2012-12-13 超音波トランスデューサデバイス及びこれを製造する方法

Country Status (8)

Country Link
US (2) US9802224B2 (enExample)
EP (1) EP2750806B1 (enExample)
JP (1) JP6069798B2 (enExample)
CN (1) CN104023860B (enExample)
BR (1) BR112014014911A2 (enExample)
IN (1) IN2014CN04975A (enExample)
RU (1) RU2607720C2 (enExample)
WO (1) WO2013093728A1 (enExample)

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CN102440005B (zh) * 2009-05-25 2014-09-24 株式会社日立医疗器械 超声波换能器及利用该超声波换能器的超声波诊断装置
BR112014009659A2 (pt) * 2011-10-28 2017-05-09 Koninklijke Philips Nv célula de transdutor micro-usinado, capacitivo, pré-colapsada; e método de fabricação de uma célula de transdutor micro-usinado, capacitivo, pré-colapsada
BR112014014911A2 (pt) * 2011-12-20 2017-06-13 Koninklijke Philips Nv dispositivo transdutor de ultrassom; e método de fabricação de um dispositivo transdutor de ultrassom
US9259206B2 (en) * 2013-02-20 2016-02-16 Georgia Tech Research Corporation CMUT-on-CMOS based guidewire intravascular imaging
US9351081B2 (en) * 2013-02-27 2016-05-24 Texas Instruments Incorporated Capacitive micromachined ultrasonic transducer (CMUT) with through-substrate via (TSV) substrate plug
CN106999163B (zh) * 2014-12-11 2021-01-26 皇家飞利浦有限公司 具有交错列的微加工超声换能器的导管换能器
CN107735032B (zh) 2015-07-02 2021-09-21 皇家飞利浦有限公司 多模式电容式微加工超声换能器以及相关联的设备、系统和方法
JP7216550B2 (ja) 2016-06-13 2023-02-01 コーニンクレッカ フィリップス エヌ ヴェ 広帯域超音波トランスジューサ
US20180180724A1 (en) * 2016-12-26 2018-06-28 Nxp Usa, Inc. Ultrasonic transducer integrated with supporting electronics
CN110958916B (zh) 2017-06-30 2022-03-29 皇家飞利浦有限公司 用于管腔内超声成像换能器的埋入式沟槽以及相关的设备、系统和方法
JP7180129B2 (ja) * 2018-06-06 2022-11-30 セイコーエプソン株式会社 超音波装置および電子機器
CN109759306B (zh) * 2019-02-03 2020-11-13 中国科学院微电子研究所 超声换能器阵列结构及其制备方法
DE102019214261B3 (de) * 2019-09-19 2020-08-20 Robert Bosch Gmbh Herstellungsverfahren für ein mikromechanisches System und mikromechanisches System
EP3909691A1 (en) * 2020-05-14 2021-11-17 Koninklijke Philips N.V. An ultrasound transducer and a tiled array of ultrasound transducers
EP3909692A1 (en) * 2020-05-14 2021-11-17 Koninklijke Philips N.V. An ultrasound transducer and a tiled array of ultrasound transducers
DE102022122821A1 (de) * 2022-09-08 2024-03-14 Infineon Technologies Ag Sensorvorrichtungen mit akustischem Koppelmedium und zugehörige Herstellungsverfahren

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US7303530B2 (en) * 2003-05-22 2007-12-04 Siemens Medical Solutions Usa, Inc. Transducer arrays with an integrated sensor and methods of use
JP4123192B2 (ja) * 2004-06-03 2008-07-23 セイコーエプソン株式会社 超音波トランスデューサ、および超音波トランスデューサの製造方法
US7037746B1 (en) * 2004-12-27 2006-05-02 General Electric Company Capacitive micromachined ultrasound transducer fabricated with epitaxial silicon membrane
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JP5495918B2 (ja) * 2009-07-24 2014-05-21 キヤノン株式会社 電気機械変換装置、及び電気機械変換装置の作製方法
KR101593994B1 (ko) * 2009-09-04 2016-02-16 삼성전자주식회사 고출력 초음파 트랜스듀서
EP2455133A1 (en) * 2010-11-18 2012-05-23 Koninklijke Philips Electronics N.V. Catheter comprising capacitive micromachined ultrasonic transducers with an adjustable focus
CN103501922B (zh) * 2011-03-22 2016-08-17 皇家飞利浦有限公司 具有至衬底的受抑声耦合的超声波cmut
CN103875068B (zh) * 2011-10-17 2018-07-10 皇家飞利浦有限公司 穿晶片通路设备以及其制造方法
BR112014009659A2 (pt) * 2011-10-28 2017-05-09 Koninklijke Philips Nv célula de transdutor micro-usinado, capacitivo, pré-colapsada; e método de fabricação de uma célula de transdutor micro-usinado, capacitivo, pré-colapsada
US9117438B2 (en) * 2011-10-28 2015-08-25 Koninklijke Philips N.V. Pre-collapsed capacitive micro-machined transducer cell with plug
BR112014014911A2 (pt) * 2011-12-20 2017-06-13 Koninklijke Philips Nv dispositivo transdutor de ultrassom; e método de fabricação de um dispositivo transdutor de ultrassom
MX2014008859A (es) * 2012-01-27 2014-10-06 Koninkl Philips Nv Transductor micro-mecanizado capacitivo y metodo para la fabricacion del mismo.
CN104812504B (zh) * 2012-11-20 2018-01-26 皇家飞利浦有限公司 电容性微加工换能器和制造所述电容性微加工换能器的方法

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