CN104023860B - 超声换能器设备及制造所述超声换能器设备的方法 - Google Patents

超声换能器设备及制造所述超声换能器设备的方法 Download PDF

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Publication number
CN104023860B
CN104023860B CN201280063552.6A CN201280063552A CN104023860B CN 104023860 B CN104023860 B CN 104023860B CN 201280063552 A CN201280063552 A CN 201280063552A CN 104023860 B CN104023860 B CN 104023860B
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CN
China
Prior art keywords
substrate
cavity
layer
cmut
ultrasonic transducer
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CN201280063552.6A
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English (en)
Chinese (zh)
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CN104023860A (zh
Inventor
R·德克尔
B·马赛利斯
M·米尔德
R·毛奇斯措克
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Koninklijke Philips NV
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Koninklijke Philips NV
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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292—Electrostatic transducers, e.g. electret-type
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49005—Acoustic transducer

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
CN201280063552.6A 2011-12-20 2012-12-13 超声换能器设备及制造所述超声换能器设备的方法 Active CN104023860B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201161577704P 2011-12-20 2011-12-20
US61/577,704 2011-12-20
PCT/IB2012/057273 WO2013093728A1 (en) 2011-12-20 2012-12-13 Ultrasound transducer device and method of manufacturing the same

Publications (2)

Publication Number Publication Date
CN104023860A CN104023860A (zh) 2014-09-03
CN104023860B true CN104023860B (zh) 2016-06-15

Family

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CN201280063552.6A Active CN104023860B (zh) 2011-12-20 2012-12-13 超声换能器设备及制造所述超声换能器设备的方法

Country Status (8)

Country Link
US (2) US9802224B2 (enExample)
EP (1) EP2750806B1 (enExample)
JP (1) JP6069798B2 (enExample)
CN (1) CN104023860B (enExample)
BR (1) BR112014014911A2 (enExample)
IN (1) IN2014CN04975A (enExample)
RU (1) RU2607720C2 (enExample)
WO (1) WO2013093728A1 (enExample)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5409784B2 (ja) * 2009-05-25 2014-02-05 株式会社日立メディコ 超音波トランスデューサおよびそれを用いた超音波診断装置
WO2013061298A2 (en) * 2011-10-28 2013-05-02 Koninklijke Philips Electronics N.V. Pre-collapsed capacitive micro-machined transducer cell with stress layer
US9802224B2 (en) * 2011-12-20 2017-10-31 Koninklijke Philips N.V. Ultrasound transducer device and method of manufacturing the same
US9259206B2 (en) * 2013-02-20 2016-02-16 Georgia Tech Research Corporation CMUT-on-CMOS based guidewire intravascular imaging
US9351081B2 (en) * 2013-02-27 2016-05-24 Texas Instruments Incorporated Capacitive micromachined ultrasonic transducer (CMUT) with through-substrate via (TSV) substrate plug
JP6312938B2 (ja) * 2014-12-11 2018-04-18 コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． マイクロマシン超音波トランスデューサの互い違いの列を有するカテーテルトランスデューサ
US11766237B2 (en) 2015-07-02 2023-09-26 Philips Image Guided Therapy Corporation Multi-mode capacitive micromachined ultrasound transducer and associated devices, systems, and methods for multiple different intravascular sensing capabilities
CN109311055B (zh) 2016-06-13 2021-06-29 皇家飞利浦有限公司 宽带超声换能器
US20180180724A1 (en) * 2016-12-26 2018-06-28 Nxp Usa, Inc. Ultrasonic transducer integrated with supporting electronics
CN110958916B (zh) 2017-06-30 2022-03-29 皇家飞利浦有限公司 用于管腔内超声成像换能器的埋入式沟槽以及相关的设备、系统和方法
JP7180129B2 (ja) * 2018-06-06 2022-11-30 セイコーエプソン株式会社 超音波装置および電子機器
CN109759306B (zh) * 2019-02-03 2020-11-13 中国科学院微电子研究所 超声换能器阵列结构及其制备方法
DE102019214261B3 (de) * 2019-09-19 2020-08-20 Robert Bosch Gmbh Herstellungsverfahren für ein mikromechanisches System und mikromechanisches System
EP3909692A1 (en) * 2020-05-14 2021-11-17 Koninklijke Philips N.V. An ultrasound transducer and a tiled array of ultrasound transducers
EP3909691A1 (en) * 2020-05-14 2021-11-17 Koninklijke Philips N.V. An ultrasound transducer and a tiled array of ultrasound transducers
DE102022122821A1 (de) 2022-09-08 2024-03-14 Infineon Technologies Ag Sensorvorrichtungen mit akustischem Koppelmedium und zugehörige Herstellungsverfahren

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1704177A (zh) * 2004-06-03 2005-12-07 精工爱普生株式会社 超声波转换器及超声波转换器的制造方法
EP1908529A2 (en) * 2006-10-05 2008-04-09 Hitachi, Ltd. Ultrasonic transducer and manufacturing method thereof

Family Cites Families (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2117415C1 (ru) * 1994-05-31 1998-08-10 Шанаурин Александр Михайлович Электростатический конденсаторный преобразователь
JP4723732B2 (ja) * 2000-07-12 2011-07-13 セイコーインスツル株式会社 脈検出装置及び超音波診断装置
US6669644B2 (en) * 2001-07-31 2003-12-30 Koninklijke Philips Electronics N.V. Micro-machined ultrasonic transducer (MUT) substrate that limits the lateral propagation of acoustic energy
US6659954B2 (en) * 2001-12-19 2003-12-09 Koninklijke Philips Electronics Nv Micromachined ultrasound transducer and method for fabricating same
US7303530B2 (en) * 2003-05-22 2007-12-04 Siemens Medical Solutions Usa, Inc. Transducer arrays with an integrated sensor and methods of use
US7037746B1 (en) * 2004-12-27 2006-05-02 General Electric Company Capacitive micromachined ultrasound transducer fabricated with epitaxial silicon membrane
ITRM20050093A1 (it) * 2005-03-04 2006-09-05 Consiglio Nazionale Ricerche Procedimento micromeccanico superficiale di fabbricazione di trasduttori ultracustici capacitivi microlavorati e relativo trasduttore ultracustico capacitivo microlavorato.
US20080304729A1 (en) * 2005-04-25 2008-12-11 Koninklijke Philips Electronics, N.V. Method and Apparatus for Continuous Imaging by Ultrasound Transducer System
US7615834B2 (en) * 2006-02-28 2009-11-10 The Board Of Trustees Of The Leland Stanford Junior University Capacitive micromachined ultrasonic transducer(CMUT) with varying thickness membrane
JP4804961B2 (ja) * 2006-03-03 2011-11-02 オリンパスメディカルシステムズ株式会社 超音波振動子及びそれを搭載した体腔内超音波診断装置
US7741686B2 (en) * 2006-07-20 2010-06-22 The Board Of Trustees Of The Leland Stanford Junior University Trench isolated capacitive micromachined ultrasonic transducer arrays with a supporting frame
JP4885779B2 (ja) * 2007-03-29 2012-02-29 オリンパスメディカルシステムズ株式会社 静電容量型トランスデューサ装置及び体腔内超音波診断システム
US8641628B2 (en) * 2007-09-26 2014-02-04 Siemens Medical Solutions Usa, Inc. Aperture synthesis using cMUTs
US7843022B2 (en) 2007-10-18 2010-11-30 The Board Of Trustees Of The Leland Stanford Junior University High-temperature electrostatic transducers and fabrication method
JP5628178B2 (ja) * 2008-09-16 2014-11-19 コーニンクレッカ フィリップス エヌ ヴェ 容量性マイクロマシン超音波トランスデューサ
US20100173437A1 (en) * 2008-10-21 2010-07-08 Wygant Ira O Method of fabricating CMUTs that generate low-frequency and high-intensity ultrasound
JP5495918B2 (ja) * 2009-07-24 2014-05-21 キヤノン株式会社 電気機械変換装置、及び電気機械変換装置の作製方法
KR101593994B1 (ko) * 2009-09-04 2016-02-16 삼성전자주식회사 고출력 초음파 트랜스듀서
EP2455133A1 (en) * 2010-11-18 2012-05-23 Koninklijke Philips Electronics N.V. Catheter comprising capacitive micromachined ultrasonic transducers with an adjustable focus
JP5961246B2 (ja) * 2011-03-22 2016-08-02 コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． 基板に対して抑制された音響結合を持つ超音波ｃｍｕｔ
CN103875068B (zh) * 2011-10-17 2018-07-10 皇家飞利浦有限公司 穿晶片通路设备以及其制造方法
WO2013061298A2 (en) * 2011-10-28 2013-05-02 Koninklijke Philips Electronics N.V. Pre-collapsed capacitive micro-machined transducer cell with stress layer
CN103906579B (zh) * 2011-10-28 2016-08-24 皇家飞利浦有限公司 一种预塌陷电容式微加工换能器单元及其制造方法
US9802224B2 (en) * 2011-12-20 2017-10-31 Koninklijke Philips N.V. Ultrasound transducer device and method of manufacturing the same
EP2806982B1 (en) * 2012-01-27 2020-03-11 Koninklijke Philips N.V. Capacitive micro-machined transducer and method of manufacturing the same
JP6328131B2 (ja) * 2012-11-20 2018-05-23 コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． 容量性マイクロマシントランスデューサ及びその製造方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1704177A (zh) * 2004-06-03 2005-12-07 精工爱普生株式会社 超声波转换器及超声波转换器的制造方法
EP1908529A2 (en) * 2006-10-05 2008-04-09 Hitachi, Ltd. Ultrasonic transducer and manufacturing method thereof

Also Published As

Publication number Publication date
CN104023860A (zh) 2014-09-03
US20180029077A1 (en) 2018-02-01
IN2014CN04975A (enExample) 2015-09-18
BR112014014911A2 (pt) 2017-06-13
EP2750806A1 (en) 2014-07-09
JP2015509304A (ja) 2015-03-26
US10835922B2 (en) 2020-11-17
EP2750806B1 (en) 2019-05-08
US20140307528A1 (en) 2014-10-16
JP6069798B2 (ja) 2017-02-01
US9802224B2 (en) 2017-10-31
RU2607720C2 (ru) 2017-01-10
RU2014129830A (ru) 2016-02-10
WO2013093728A1 (en) 2013-06-27

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