IN2014CN04975A - - Google Patents

Info

Publication number
IN2014CN04975A
IN2014CN04975A IN4975CHN2014A IN2014CN04975A IN 2014CN04975 A IN2014CN04975 A IN 2014CN04975A IN 4975CHN2014 A IN4975CHN2014 A IN 4975CHN2014A IN 2014CN04975 A IN2014CN04975 A IN 2014CN04975A
Authority
IN
India
Prior art keywords
substrate
cavity
trenches
cell
cmut cell
Prior art date
Application number
Inventor
Ronald Dekker
Bout Marcelis
Marcel Mulder
Ruediger Mauczok
Original Assignee
Koninkl Philips Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koninkl Philips Nv filed Critical Koninkl Philips Nv
Publication of IN2014CN04975A publication Critical patent/IN2014CN04975A/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292—Electrostatic transducers, e.g. electret-type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49005—Acoustic transducer

Abstract

The present invention relates to an ultrasound transducer device comprising at least one cMUT cell (30) for transmitting and/or receiving ultrasound waves the cMUT cell (30) comprising a cell membrane (30a) and a cavity (30b) underneath the cell membrane. The device further comprises a substrate (10) having a first side (10a) and a second side (10b) the at least one cMUT cell (30) arranged on the first side (10a) of the substrate (10). The substrate (10) comprises a substrate base layer (12) and a plurality of adjacent trenches (17a) extending into the substrate (10) in a direction orthogonal to the substratesides (10a 10b) wherein spacers (12a) are each formed between adjacent trenches (17a). The substrate (10) further comprises a connecting cavity (17b) which connects the trenches (17a) and which extends in a direction parallel to the substrate sides (10a 10b) the trenches (17a) and the connecting cavity (17b) together forming a substrate cavity (17) in the substrate (10). The substrate (10) further comprises a substrate membrane (23) covering the substrate cavity (17). The substrate cavity (17) is located in a region of the substrate (10) underneath the cMUT cell (30). The present invention further relates to a method of manufacturing such ultrasound transducer device.
IN4975CHN2014 2011-12-20 2012-12-13 IN2014CN04975A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201161577704P 2011-12-20 2011-12-20
PCT/IB2012/057273 WO2013093728A1 (en) 2011-12-20 2012-12-13 Ultrasound transducer device and method of manufacturing the same

Publications (1)

Publication Number Publication Date
IN2014CN04975A true IN2014CN04975A (en) 2015-09-18

Family

ID=47631486

Family Applications (1)

Application Number Title Priority Date Filing Date
IN4975CHN2014 IN2014CN04975A (en) 2011-12-20 2012-12-13

Country Status (8)

Country Link
US (2) US9802224B2 (en)
EP (1) EP2750806B1 (en)
JP (1) JP6069798B2 (en)
CN (1) CN104023860B (en)
BR (1) BR112014014911A2 (en)
IN (1) IN2014CN04975A (en)
RU (1) RU2607720C2 (en)
WO (1) WO2013093728A1 (en)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5409784B2 (en) * 2009-05-25 2014-02-05 株式会社日立メディコ Ultrasonic transducer and ultrasonic diagnostic apparatus using the same
US9534949B2 (en) * 2011-10-28 2017-01-03 Koninklijke Philips N.V. Pre-collapsed capacitive micro-machined transducer cell with stress layer
WO2013093728A1 (en) * 2011-12-20 2013-06-27 Koninklijke Philips Electronics N.V. Ultrasound transducer device and method of manufacturing the same
US9259206B2 (en) * 2013-02-20 2016-02-16 Georgia Tech Research Corporation CMUT-on-CMOS based guidewire intravascular imaging
US9351081B2 (en) * 2013-02-27 2016-05-24 Texas Instruments Incorporated Capacitive micromachined ultrasonic transducer (CMUT) with through-substrate via (TSV) substrate plug
EP3229979B1 (en) * 2014-12-11 2018-04-04 Koninklijke Philips N.V. Catheter transducer with staggered columns of micromachined ultrasonic transducers
CN107735032B (en) 2015-07-02 2021-09-21 皇家飞利浦有限公司 Multi-mode capacitive micromachined ultrasonic transducer and associated apparatus, systems, and methods
WO2017216139A1 (en) 2016-06-13 2017-12-21 Koninklijke Philips N.V. Broadband ultrasound transducer
US20180180724A1 (en) * 2016-12-26 2018-06-28 Nxp Usa, Inc. Ultrasonic transducer integrated with supporting electronics
WO2019002231A1 (en) 2017-06-30 2019-01-03 Koninklijke Philips N.V. Intraluminal ultrasound imaging device comprising a substrate separated into a plurality of spaced-apart segments, intraluminal ultrasound imaging device comprising a trench, and method of manufacturing
JP7180129B2 (en) * 2018-06-06 2022-11-30 セイコーエプソン株式会社 Ultrasound equipment and electronics
CN109759306B (en) * 2019-02-03 2020-11-13 中国科学院微电子研究所 Ultrasonic transducer array structure and preparation method thereof
DE102019214261B3 (en) * 2019-09-19 2020-08-20 Robert Bosch Gmbh Manufacturing process for a micromechanical system and micromechanical system
EP3909692A1 (en) * 2020-05-14 2021-11-17 Koninklijke Philips N.V. An ultrasound transducer and a tiled array of ultrasound transducers
EP3909691A1 (en) * 2020-05-14 2021-11-17 Koninklijke Philips N.V. An ultrasound transducer and a tiled array of ultrasound transducers
DE102022122821A1 (en) 2022-09-08 2024-03-14 Infineon Technologies Ag Sensor devices with acoustic coupling medium and associated manufacturing processes

Family Cites Families (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2117415C1 (en) * 1994-05-31 1998-08-10 Шанаурин Александр Михайлович Electrostatic capacitor converter
JP4723732B2 (en) * 2000-07-12 2011-07-13 セイコーインスツル株式会社 Pulse detection device and ultrasonic diagnostic device
US6669644B2 (en) * 2001-07-31 2003-12-30 Koninklijke Philips Electronics N.V. Micro-machined ultrasonic transducer (MUT) substrate that limits the lateral propagation of acoustic energy
US6659954B2 (en) * 2001-12-19 2003-12-09 Koninklijke Philips Electronics Nv Micromachined ultrasound transducer and method for fabricating same
US7303530B2 (en) * 2003-05-22 2007-12-04 Siemens Medical Solutions Usa, Inc. Transducer arrays with an integrated sensor and methods of use
JP4123192B2 (en) * 2004-06-03 2008-07-23 セイコーエプソン株式会社 Ultrasonic transducer and method of manufacturing ultrasonic transducer
US7037746B1 (en) * 2004-12-27 2006-05-02 General Electric Company Capacitive micromachined ultrasound transducer fabricated with epitaxial silicon membrane
ITRM20050093A1 (en) * 2005-03-04 2006-09-05 Consiglio Nazionale Ricerche MICROMECHANICAL SURFACE PROCEDURE FOR THE MANUFACTURE OF ULTRACUSTIC TRANSDUCERS MICRO-FINISHED CAPACITORS AND THEIR ULTRACUSTIC CAPACITIVE MICROLAVORIZED TRANSDUCER.
CN101166473B (en) * 2005-04-25 2012-11-14 皇家飞利浦电子股份有限公司 Apparatus for continuous imaging by ultrasound transducer system
US7615834B2 (en) * 2006-02-28 2009-11-10 The Board Of Trustees Of The Leland Stanford Junior University Capacitive micromachined ultrasonic transducer(CMUT) with varying thickness membrane
JP4804961B2 (en) * 2006-03-03 2011-11-02 オリンパスメディカルシステムズ株式会社 Ultrasonic transducer and intracorporeal ultrasonic diagnostic apparatus equipped with the same
US7741686B2 (en) * 2006-07-20 2010-06-22 The Board Of Trustees Of The Leland Stanford Junior University Trench isolated capacitive micromachined ultrasonic transducer arrays with a supporting frame
JP4800170B2 (en) * 2006-10-05 2011-10-26 株式会社日立製作所 Ultrasonic transducer and manufacturing method thereof
JP4885779B2 (en) * 2007-03-29 2012-02-29 オリンパスメディカルシステムズ株式会社 Capacitance type transducer device and intracorporeal ultrasound diagnostic system
US8641628B2 (en) * 2007-09-26 2014-02-04 Siemens Medical Solutions Usa, Inc. Aperture synthesis using cMUTs
US7843022B2 (en) 2007-10-18 2010-11-30 The Board Of Trustees Of The Leland Stanford Junior University High-temperature electrostatic transducers and fabrication method
RU2511671C2 (en) * 2008-09-16 2014-04-10 Конинклейке Филипс Электроникс Н.В. Capacitive micromachined ultrasonic transducer
US20100173437A1 (en) * 2008-10-21 2010-07-08 Wygant Ira O Method of fabricating CMUTs that generate low-frequency and high-intensity ultrasound
JP5495918B2 (en) * 2009-07-24 2014-05-21 キヤノン株式会社 Electromechanical transducer and method for producing electromechanical transducer
KR101593994B1 (en) * 2009-09-04 2016-02-16 삼성전자주식회사 High power ultrasonic transducer
EP2455133A1 (en) * 2010-11-18 2012-05-23 Koninklijke Philips Electronics N.V. Catheter comprising capacitive micromachined ultrasonic transducers with an adjustable focus
US20130331705A1 (en) * 2011-03-22 2013-12-12 Koninklijke Philips Electronics N.V. Ultrasonic cmut with suppressed acoustic coupling to the substrate
RU2603435C2 (en) * 2011-10-17 2016-11-27 Конинклейке Филипс Н.В. Through-wafer via device and method of manufacturing the same
US9534949B2 (en) * 2011-10-28 2017-01-03 Koninklijke Philips N.V. Pre-collapsed capacitive micro-machined transducer cell with stress layer
MX343897B (en) * 2011-10-28 2016-11-28 Koninklijke Philips Nv Pre-collapsed capacitive micro-machined transducer cell with plug.
WO2013093728A1 (en) * 2011-12-20 2013-06-27 Koninklijke Philips Electronics N.V. Ultrasound transducer device and method of manufacturing the same
MX2014008859A (en) * 2012-01-27 2014-10-06 Koninkl Philips Nv Capacitive micro-machined transducer and method of manufacturing the same.
US9607606B2 (en) * 2012-11-20 2017-03-28 Koninkijke Philips N.V. Capacitive micro-machined transducer and method of manufacturing the same

Also Published As

Publication number Publication date
BR112014014911A2 (en) 2017-06-13
EP2750806A1 (en) 2014-07-09
RU2014129830A (en) 2016-02-10
US10835922B2 (en) 2020-11-17
WO2013093728A1 (en) 2013-06-27
US20140307528A1 (en) 2014-10-16
US20180029077A1 (en) 2018-02-01
JP6069798B2 (en) 2017-02-01
CN104023860B (en) 2016-06-15
JP2015509304A (en) 2015-03-26
RU2607720C2 (en) 2017-01-10
US9802224B2 (en) 2017-10-31
CN104023860A (en) 2014-09-03
EP2750806B1 (en) 2019-05-08

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