RU2607720C2 - Устройство ультразвукового преобразователя и способ его изготовления - Google Patents

Устройство ультразвукового преобразователя и способ его изготовления Download PDF

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Publication number
RU2607720C2
RU2607720C2 RU2014129830A RU2014129830A RU2607720C2 RU 2607720 C2 RU2607720 C2 RU 2607720C2 RU 2014129830 A RU2014129830 A RU 2014129830A RU 2014129830 A RU2014129830 A RU 2014129830A RU 2607720 C2 RU2607720 C2 RU 2607720C2
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Russia
Prior art keywords
substrate
cavity
layer
cmut
cell
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RU2014129830A
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English (en)
Russian (ru)
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RU2014129830A (ru
Inventor
Роналд ДЕККЕР
Боут МАРСЕЛИС
Марсель МЮЛДЕР
Рюдигер МАУКЗОК
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Конинклейке Филипс Н.В.
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292—Electrostatic transducers, e.g. electret-type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49005—Acoustic transducer

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
RU2014129830A 2011-12-20 2012-12-13 Устройство ультразвукового преобразователя и способ его изготовления RU2607720C2 (ru)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201161577704P 2011-12-20 2011-12-20
US61/577,704 2011-12-20
PCT/IB2012/057273 WO2013093728A1 (en) 2011-12-20 2012-12-13 Ultrasound transducer device and method of manufacturing the same

Publications (2)

Publication Number Publication Date
RU2014129830A RU2014129830A (ru) 2016-02-10
RU2607720C2 true RU2607720C2 (ru) 2017-01-10

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RU2014129830A RU2607720C2 (ru) 2011-12-20 2012-12-13 Устройство ультразвукового преобразователя и способ его изготовления

Country Status (8)

Country Link
US (2) US9802224B2 (enExample)
EP (1) EP2750806B1 (enExample)
JP (1) JP6069798B2 (enExample)
CN (1) CN104023860B (enExample)
BR (1) BR112014014911A2 (enExample)
IN (1) IN2014CN04975A (enExample)
RU (1) RU2607720C2 (enExample)
WO (1) WO2013093728A1 (enExample)

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US9085012B2 (en) * 2009-05-25 2015-07-21 Hitachi Medical Corporation Ultrasonic transducer and ultrasonic diagnostic apparatus provided with same
CN103917304B (zh) * 2011-10-28 2016-08-17 皇家飞利浦有限公司 具有应力层的预塌陷电容式微加工换能器单元
JP6069798B2 (ja) * 2011-12-20 2017-02-01 コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． 超音波トランスデューサデバイス及びこれを製造する方法
US9259206B2 (en) * 2013-02-20 2016-02-16 Georgia Tech Research Corporation CMUT-on-CMOS based guidewire intravascular imaging
US9351081B2 (en) * 2013-02-27 2016-05-24 Texas Instruments Incorporated Capacitive micromachined ultrasonic transducer (CMUT) with through-substrate via (TSV) substrate plug
WO2016091985A1 (en) * 2014-12-11 2016-06-16 Koninklijke Philips N.V. Catheter transducer with staggered columns of micromachined ultrasonic transducers
JP6932085B2 (ja) 2015-07-02 2021-09-08 コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． マルチモード容量性マイクロマシン超音波トランスデューサ並びに関連するデバイス、システム及び方法
US11400487B2 (en) 2016-06-13 2022-08-02 Koninklijke Philips N.V. Broadband ultrasound transducer
US20180180724A1 (en) * 2016-12-26 2018-06-28 Nxp Usa, Inc. Ultrasonic transducer integrated with supporting electronics
EP3645176A1 (en) 2017-06-30 2020-05-06 Koninklijke Philips N.V. Intraluminal ultrasound imaging device comprising a substrate separated into a plurality of spaced-apart segments, intraluminal ultrasound imaging device comprising a trench, and method of manufacturing
JP7180129B2 (ja) * 2018-06-06 2022-11-30 セイコーエプソン株式会社 超音波装置および電子機器
CN109759306B (zh) * 2019-02-03 2020-11-13 中国科学院微电子研究所 超声换能器阵列结构及其制备方法
DE102019214261B3 (de) * 2019-09-19 2020-08-20 Robert Bosch Gmbh Herstellungsverfahren für ein mikromechanisches System und mikromechanisches System
EP3909691A1 (en) * 2020-05-14 2021-11-17 Koninklijke Philips N.V. An ultrasound transducer and a tiled array of ultrasound transducers
EP3909692A1 (en) * 2020-05-14 2021-11-17 Koninklijke Philips N.V. An ultrasound transducer and a tiled array of ultrasound transducers
DE102022122821A1 (de) 2022-09-08 2024-03-14 Infineon Technologies Ag Sensorvorrichtungen mit akustischem Koppelmedium und zugehörige Herstellungsverfahren

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RU2117415C1 (ru) * 1994-05-31 1998-08-10 Шанаурин Александр Михайлович Электростатический конденсаторный преобразователь
US7303530B2 (en) * 2003-05-22 2007-12-04 Siemens Medical Solutions Usa, Inc. Transducer arrays with an integrated sensor and methods of use
US20090122651A1 (en) * 2007-10-18 2009-05-14 Mario Kupnik Direct wafer bonded 2-D CUMT array
RU2404711C2 (ru) * 2005-04-25 2010-11-27 Конинклейке Филипс Электроникс Н.В. Способ и устройство для непрерывной визуализации посредством системы ультразвукового преобразователя
US20110018387A1 (en) * 2009-07-24 2011-01-27 Canon Kabushiki Kaisha Electromechanical transducer device and method of making the same
US20110057541A1 (en) * 2009-09-04 2011-03-10 Samsung Electronics Co., Ltd. High power ultrasonic transducer

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JP4723732B2 (ja) * 2000-07-12 2011-07-13 セイコーインスツル株式会社 脈検出装置及び超音波診断装置
US6669644B2 (en) * 2001-07-31 2003-12-30 Koninklijke Philips Electronics N.V. Micro-machined ultrasonic transducer (MUT) substrate that limits the lateral propagation of acoustic energy
US6659954B2 (en) * 2001-12-19 2003-12-09 Koninklijke Philips Electronics Nv Micromachined ultrasound transducer and method for fabricating same
JP4123192B2 (ja) * 2004-06-03 2008-07-23 セイコーエプソン株式会社 超音波トランスデューサ、および超音波トランスデューサの製造方法
US7037746B1 (en) * 2004-12-27 2006-05-02 General Electric Company Capacitive micromachined ultrasound transducer fabricated with epitaxial silicon membrane
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US7741686B2 (en) * 2006-07-20 2010-06-22 The Board Of Trustees Of The Leland Stanford Junior University Trench isolated capacitive micromachined ultrasonic transducer arrays with a supporting frame
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JP4885779B2 (ja) * 2007-03-29 2012-02-29 オリンパスメディカルシステムズ株式会社 静電容量型トランスデューサ装置及び体腔内超音波診断システム
US8641628B2 (en) * 2007-09-26 2014-02-04 Siemens Medical Solutions Usa, Inc. Aperture synthesis using cMUTs
US9132693B2 (en) * 2008-09-16 2015-09-15 Koninklijke Philps N.V. Capacitive micromachine ultrasound transducer
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EP2455133A1 (en) * 2010-11-18 2012-05-23 Koninklijke Philips Electronics N.V. Catheter comprising capacitive micromachined ultrasonic transducers with an adjustable focus
WO2012127360A2 (en) * 2011-03-22 2012-09-27 Koninklijke Philips Electronics N.V. Ultrasonic cmut with suppressed acoustic coupling to the substrate
CN103875068B (zh) * 2011-10-17 2018-07-10 皇家飞利浦有限公司 穿晶片通路设备以及其制造方法
CN103917304B (zh) * 2011-10-28 2016-08-17 皇家飞利浦有限公司 具有应力层的预塌陷电容式微加工换能器单元
EP2747904B1 (en) * 2011-10-28 2020-04-08 Koninklijke Philips N.V. Pre-collapsed capacitive micro-machined transducer cell with plug
JP6069798B2 (ja) * 2011-12-20 2017-02-01 コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． 超音波トランスデューサデバイス及びこれを製造する方法
US9231496B2 (en) * 2012-01-27 2016-01-05 Koninklijke Philips N.V. Capacitive micro-machined transducer and method of manufacturing the same
CN104812504B (zh) * 2012-11-20 2018-01-26 皇家飞利浦有限公司 电容性微加工换能器和制造所述电容性微加工换能器的方法

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RU2117415C1 (ru) * 1994-05-31 1998-08-10 Шанаурин Александр Михайлович Электростатический конденсаторный преобразователь
US7303530B2 (en) * 2003-05-22 2007-12-04 Siemens Medical Solutions Usa, Inc. Transducer arrays with an integrated sensor and methods of use
RU2404711C2 (ru) * 2005-04-25 2010-11-27 Конинклейке Филипс Электроникс Н.В. Способ и устройство для непрерывной визуализации посредством системы ультразвукового преобразователя
US20090122651A1 (en) * 2007-10-18 2009-05-14 Mario Kupnik Direct wafer bonded 2-D CUMT array
US20110018387A1 (en) * 2009-07-24 2011-01-27 Canon Kabushiki Kaisha Electromechanical transducer device and method of making the same
US20110057541A1 (en) * 2009-09-04 2011-03-10 Samsung Electronics Co., Ltd. High power ultrasonic transducer

Also Published As

Publication number Publication date
IN2014CN04975A (enExample) 2015-09-18
JP2015509304A (ja) 2015-03-26
US20140307528A1 (en) 2014-10-16
EP2750806A1 (en) 2014-07-09
US20180029077A1 (en) 2018-02-01
EP2750806B1 (en) 2019-05-08
US9802224B2 (en) 2017-10-31
RU2014129830A (ru) 2016-02-10
US10835922B2 (en) 2020-11-17
WO2013093728A1 (en) 2013-06-27
JP6069798B2 (ja) 2017-02-01
BR112014014911A2 (pt) 2017-06-13
CN104023860B (zh) 2016-06-15
CN104023860A (zh) 2014-09-03

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