MX343897B - Celda de transductor micro-mecanizado capacitivo pre-colapsado con enchufe. - Google Patents
Celda de transductor micro-mecanizado capacitivo pre-colapsado con enchufe.Info
- Publication number
- MX343897B MX343897B MX2014004905A MX2014004905A MX343897B MX 343897 B MX343897 B MX 343897B MX 2014004905 A MX2014004905 A MX 2014004905A MX 2014004905 A MX2014004905 A MX 2014004905A MX 343897 B MX343897 B MX 343897B
- Authority
- MX
- Mexico
- Prior art keywords
- plug
- membrane
- capacitive micro
- transducer cell
- collapsed
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G10—MUSICAL INSTRUMENTS; ACOUSTICS
- G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
- G10K11/00—Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
- G10K11/18—Methods or devices for transmitting, conducting or directing sound
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/0292—Electrostatic transducers, e.g. electret-type
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R31/00—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49005—Acoustic transducer
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Signal Processing (AREA)
- Multimedia (AREA)
- Pressure Sensors (AREA)
- Micromachines (AREA)
- Transducers For Ultrasonic Waves (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
La presente invención se refiere a una celda de transductor micro-mecanizado capacitivo pre-colapsado (10) que comprende un substrato (12), y una membrana (14) que cubre un área de membrana total (Atotal), en donde una cavidad (20) se forma entre la membrana (14) y el substrato (12), la membrana (14) comprende un orificio (15) y una porción de borde (14a) que rodea el orificio (15), la porción de borde (14a) de la membrana (14) que se colapsa al substrato (12). La celda además comprende un enchufe (30) configurado en el orificio (15) de la membrana (14), el enchufe (30) que se localiza únicamente in una sub-área (A5b) del área de membrana total (Atotal). La presente invención además se refiere a un método para fabricar tal celda de transductor micro-mecanizado capacitivo pre-colapsado (10).
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201161552485P | 2011-10-28 | 2011-10-28 | |
PCT/IB2012/055605 WO2013061204A2 (en) | 2011-10-28 | 2012-10-15 | Pre-collapsed capacitive micro-machined transducer cell with plug |
Publications (2)
Publication Number | Publication Date |
---|---|
MX2014004905A MX2014004905A (es) | 2014-05-28 |
MX343897B true MX343897B (es) | 2016-11-28 |
Family
ID=47227991
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
MX2014004905A MX343897B (es) | 2011-10-28 | 2012-10-15 | Celda de transductor micro-mecanizado capacitivo pre-colapsado con enchufe. |
Country Status (8)
Country | Link |
---|---|
US (1) | US9117438B2 (es) |
EP (1) | EP2747904B1 (es) |
JP (1) | JP5961697B2 (es) |
CN (1) | CN103906579B (es) |
BR (1) | BR112014009698A2 (es) |
MX (1) | MX343897B (es) |
RU (1) | RU2595800C2 (es) |
WO (1) | WO2013061204A2 (es) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103917304B (zh) * | 2011-10-28 | 2016-08-17 | 皇家飞利浦有限公司 | 具有应力层的预塌陷电容式微加工换能器单元 |
WO2013093728A1 (en) | 2011-12-20 | 2013-06-27 | Koninklijke Philips Electronics N.V. | Ultrasound transducer device and method of manufacturing the same |
JP6553174B2 (ja) * | 2014-09-11 | 2019-07-31 | コーニンクレッカ フィリップス エヌ ヴェKoninklijke Philips N.V. | 広帯域の体内通過超音波通信システム |
EP3317026B1 (en) * | 2015-06-30 | 2023-12-20 | Koninklijke Philips N.V. | Ultrasound system and ultrasonic pulse transmission method |
US10043903B2 (en) | 2015-12-21 | 2018-08-07 | Samsung Electronics Co., Ltd. | Semiconductor devices with source/drain stress liner |
US11061000B2 (en) * | 2016-12-01 | 2021-07-13 | Koninklijke Philips N.V. | CMUT probe, system and method |
RU2732839C1 (ru) * | 2019-07-09 | 2020-09-23 | Федеральное государственное бюджетное образовательное учреждение высшего образования "Пензенский государственный университет" (ФГБОУ ВО "ПГУ") | Полупроводниковый преобразователь давления с повышенной точностью и чувствительностью |
US11304005B2 (en) | 2020-02-07 | 2022-04-12 | xMEMS Labs, Inc. | Crossover circuit |
US11172300B2 (en) * | 2020-02-07 | 2021-11-09 | xMEMS Labs, Inc. | Sound producing device |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2005120130A1 (ja) * | 2004-06-03 | 2005-12-15 | Olympus Corporation | 静電容量型超音波振動子とその製造方法、静電容量型超音波プローブ |
JP4885779B2 (ja) * | 2007-03-29 | 2012-02-29 | オリンパスメディカルシステムズ株式会社 | 静電容量型トランスデューサ装置及び体腔内超音波診断システム |
US8203912B2 (en) * | 2007-07-31 | 2012-06-19 | Koninklijke Philips Electronics N.V. | CMUTs with a high-k dielectric |
EP2207484B1 (en) * | 2007-09-17 | 2016-11-09 | Koninklijke Philips N.V. | Production of pre-collapsed capacitive micro-machined ultrasonic transducers and applications thereof |
US8787116B2 (en) * | 2007-12-14 | 2014-07-22 | Koninklijke Philips N.V. | Collapsed mode operable cMUT including contoured substrate |
EP2145696A1 (en) * | 2008-07-15 | 2010-01-20 | UAB Minatech | Capacitive micromachined ultrasonic transducer and its fabrication method |
CN102159334A (zh) * | 2008-09-16 | 2011-08-17 | 皇家飞利浦电子股份有限公司 | 电容性微机械加工的超声换能器 |
CN102333485B (zh) * | 2009-02-27 | 2014-12-10 | 皇家飞利浦电子股份有限公司 | 具有机械塌陷保持的预塌陷cmut |
-
2012
- 2012-10-15 JP JP2014537759A patent/JP5961697B2/ja active Active
- 2012-10-15 RU RU2014121503/28A patent/RU2595800C2/ru not_active IP Right Cessation
- 2012-10-15 BR BR112014009698A patent/BR112014009698A2/pt not_active IP Right Cessation
- 2012-10-15 WO PCT/IB2012/055605 patent/WO2013061204A2/en active Application Filing
- 2012-10-15 US US14/349,079 patent/US9117438B2/en active Active
- 2012-10-15 MX MX2014004905A patent/MX343897B/es active IP Right Grant
- 2012-10-15 CN CN201280052980.9A patent/CN103906579B/zh active Active
- 2012-10-15 EP EP12791561.9A patent/EP2747904B1/en active Active
Also Published As
Publication number | Publication date |
---|---|
EP2747904B1 (en) | 2020-04-08 |
US9117438B2 (en) | 2015-08-25 |
WO2013061204A2 (en) | 2013-05-02 |
RU2014121503A (ru) | 2015-12-10 |
CN103906579A (zh) | 2014-07-02 |
RU2595800C2 (ru) | 2016-08-27 |
JP5961697B2 (ja) | 2016-08-02 |
EP2747904A2 (en) | 2014-07-02 |
WO2013061204A3 (en) | 2013-09-12 |
US20140247698A1 (en) | 2014-09-04 |
BR112014009698A2 (pt) | 2017-05-09 |
JP2015504620A (ja) | 2015-02-12 |
CN103906579B (zh) | 2016-08-24 |
MX2014004905A (es) | 2014-05-28 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
FG | Grant or registration |