MX343897B - Celda de transductor micro-mecanizado capacitivo pre-colapsado con enchufe. - Google Patents

Celda de transductor micro-mecanizado capacitivo pre-colapsado con enchufe.

Info

Publication number
MX343897B
MX343897B MX2014004905A MX2014004905A MX343897B MX 343897 B MX343897 B MX 343897B MX 2014004905 A MX2014004905 A MX 2014004905A MX 2014004905 A MX2014004905 A MX 2014004905A MX 343897 B MX343897 B MX 343897B
Authority
MX
Mexico
Prior art keywords
plug
membrane
capacitive micro
transducer cell
collapsed
Prior art date
Application number
MX2014004905A
Other languages
English (en)
Other versions
MX2014004905A (es
Inventor
Dirksen Peter
Dekker Ronald
Adrianus Henneken Vincent
Leeuwenstein Adriaan
Marcelis Bout
Douglas Fraser John
Original Assignee
Koninklijke Philips Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koninklijke Philips Nv filed Critical Koninklijke Philips Nv
Publication of MX2014004905A publication Critical patent/MX2014004905A/es
Publication of MX343897B publication Critical patent/MX343897B/es

Links

Classifications

    • G—PHYSICS
    • G10—MUSICAL INSTRUMENTS; ACOUSTICS
    • G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K11/00—Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
    • G10K11/18—Methods or devices for transmitting, conducting or directing sound
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292—Electrostatic transducers, e.g. electret-type
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R31/00—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49005—Acoustic transducer

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Mechanical Engineering (AREA)
  • Multimedia (AREA)
  • Manufacturing & Machinery (AREA)
  • Signal Processing (AREA)
  • Pressure Sensors (AREA)
  • Micromachines (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

La presente invención se refiere a una celda de transductor micro-mecanizado capacitivo pre-colapsado (10) que comprende un substrato (12), y una membrana (14) que cubre un área de membrana total (Atotal), en donde una cavidad (20) se forma entre la membrana (14) y el substrato (12), la membrana (14) comprende un orificio (15) y una porción de borde (14a) que rodea el orificio (15), la porción de borde (14a) de la membrana (14) que se colapsa al substrato (12). La celda además comprende un enchufe (30) configurado en el orificio (15) de la membrana (14), el enchufe (30) que se localiza únicamente in una sub-área (A5b) del área de membrana total (Atotal). La presente invención además se refiere a un método para fabricar tal celda de transductor micro-mecanizado capacitivo pre-colapsado (10).
MX2014004905A 2011-10-28 2012-10-15 Celda de transductor micro-mecanizado capacitivo pre-colapsado con enchufe. MX343897B (es)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201161552485P 2011-10-28 2011-10-28
PCT/IB2012/055605 WO2013061204A2 (en) 2011-10-28 2012-10-15 Pre-collapsed capacitive micro-machined transducer cell with plug

Publications (2)

Publication Number Publication Date
MX2014004905A MX2014004905A (es) 2014-05-28
MX343897B true MX343897B (es) 2016-11-28

Family

ID=47227991

Family Applications (1)

Application Number Title Priority Date Filing Date
MX2014004905A MX343897B (es) 2011-10-28 2012-10-15 Celda de transductor micro-mecanizado capacitivo pre-colapsado con enchufe.

Country Status (8)

Country Link
US (1) US9117438B2 (es)
EP (1) EP2747904B1 (es)
JP (1) JP5961697B2 (es)
CN (1) CN103906579B (es)
BR (1) BR112014009698A2 (es)
MX (1) MX343897B (es)
RU (1) RU2595800C2 (es)
WO (1) WO2013061204A2 (es)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6210992B2 (ja) * 2011-10-28 2017-10-11 コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． 応力層を持つ事前圧壊容量マイクロマシン・トランスデューサセル
JP6069798B2 (ja) * 2011-12-20 2017-02-01 コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． 超音波トランスデューサデバイス及びこれを製造する方法
US10313027B2 (en) 2014-09-11 2019-06-04 Koninklijke Philips N.V. Wide band through-body ultrasonic communication system
EP3317026B1 (en) * 2015-06-30 2023-12-20 Koninklijke Philips N.V. Ultrasound system and ultrasonic pulse transmission method
US10043903B2 (en) 2015-12-21 2018-08-07 Samsung Electronics Co., Ltd. Semiconductor devices with source/drain stress liner
WO2018100015A1 (en) * 2016-12-01 2018-06-07 Koninklijke Philips N.V. Cmut probe, system and method
RU2732839C1 (ru) * 2019-07-09 2020-09-23 Федеральное государственное бюджетное образовательное учреждение высшего образования "Пензенский государственный университет" (ФГБОУ ВО "ПГУ") Полупроводниковый преобразователь давления с повышенной точностью и чувствительностью
US11172300B2 (en) * 2020-02-07 2021-11-09 xMEMS Labs, Inc. Sound producing device
US11304005B2 (en) 2020-02-07 2022-04-12 xMEMS Labs, Inc. Crossover circuit

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005120130A1 (ja) * 2004-06-03 2005-12-15 Olympus Corporation 静電容量型超音波振動子とその製造方法、静電容量型超音波プローブ
JP4885779B2 (ja) * 2007-03-29 2012-02-29 オリンパスメディカルシステムズ株式会社 静電容量型トランスデューサ装置及び体腔内超音波診断システム
EP2170531A2 (en) * 2007-07-31 2010-04-07 Koninklijke Philips Electronics N.V. Cmuts with a high-k dielectric
WO2009037655A2 (en) 2007-09-17 2009-03-26 Koninklijke Philips Electronics, N.V. Production of pre-collapsed capacitive micro-machined ultrasonic transducers and applications thereof
WO2009077961A2 (en) * 2007-12-14 2009-06-25 Koninklijke Philips Electronics, N.V. Collapsed mode operable cmut including contoured substrate
EP2145696A1 (en) * 2008-07-15 2010-01-20 UAB Minatech Capacitive micromachined ultrasonic transducer and its fabrication method
EP2326432A2 (en) 2008-09-16 2011-06-01 Koninklijke Philips Electronics N.V. Capacitive micromachined ultrasound transducer
JP5559818B2 (ja) * 2009-02-27 2014-07-23 コーニンクレッカ フィリップス エヌ ヴェ 機械的な圧壊保持機能を備える事前圧壊ｃｍｕｔ

Also Published As

Publication number Publication date
WO2013061204A2 (en) 2013-05-02
BR112014009698A2 (pt) 2017-05-09
RU2014121503A (ru) 2015-12-10
EP2747904A2 (en) 2014-07-02
MX2014004905A (es) 2014-05-28
EP2747904B1 (en) 2020-04-08
US20140247698A1 (en) 2014-09-04
US9117438B2 (en) 2015-08-25
JP5961697B2 (ja) 2016-08-02
CN103906579A (zh) 2014-07-02
JP2015504620A (ja) 2015-02-12
CN103906579B (zh) 2016-08-24
RU2595800C2 (ru) 2016-08-27
WO2013061204A3 (en) 2013-09-12

Similar Documents

Publication Publication Date Title
MX2014004905A (es) Celda de transductor micro-mecanizado capacitivo pre-colapsado con enchufe.
MX2014004910A (es) Celda transductora, micro-labrada, capacitiva, pre-colapsada con capa de tension.
USD671932S1 (en) Cell phone case
USD671933S1 (en) Cell phone case
USD715225S1 (en) Electrical power housing with USB connections
USD751990S1 (en) Housing for electric connector
USD699251S1 (en) Electronic display with graphical user interface
MX2014005795A (es) Celda transductora micro-torneada capacitiva pre-colapsada con region colapsada en forma anular.
USD754433S1 (en) Single panel cell phone wallet
USD746777S1 (en) Electrical connector
USD650389S1 (en) Card for electronic computer
USD818438S1 (en) Electrical plug housing
USD789197S1 (en) Package with surface ornamentation
USD709035S1 (en) Electrical connector
USD733659S1 (en) Electrical connector assembly
WO2014197101A3 (en) Pressure sensing implant
USD666199S1 (en) Electronic mouse
TWD145355S (zh) 電連接器
EP2731133A3 (en) Interconnection structure and fabrication thereof
USD777677S1 (en) Electrical connector
PH12015500723A1 (en) An acoustic device and method of manufacture
USD685744S1 (en) Electrical terminal
USD718252S1 (en) Electrical connector
USD702650S1 (en) Electrical component faceplate
USD637957S1 (en) Electrical connector assembly

Legal Events

Date Code Title Description
FG Grant or registration